Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

F 50 50 50 60 35 60 70 75 80 FF 40 40 40 50 35 60 70 75 80 GA 22 22 22 22 55 61 102 154 190 13-/22-MXS25-10 13-/22-MXS25-20 13-/22-MXS25-30 13-/22-MXS25-40 13-/22-MXS25-50 13-/22-MXS25-75 13-/22-MXS25-100 13-/22-MXS25-125 13-/22-MXS25-150 795 MXS 1322Air Slide Table Dimensions: MXS25 1322Axial piping (25) MXS25-P 1322Air Preparation Equipment Pressure Control Equipment Flow Control Equipment

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n 2 (" 2. 4. 6. 8 ..) (" = 4. 8. 12. ' 6 ..) (" =4. 8. ' 2. '6.. ) (" = 4. 8. ' 2. ' 6 .. ) With 2 pes tDrtterent slIriaces, 90 80 85 '0 Same surface), Wilh 1 pc. D-M90V D-M90WV 80 + 3O

VS 8-2/VS 8-4

or less 70 or less 80 or less 70 or less 80 or less 80 or less Single 2-position 5 (R1) 3 (R2) Double 1 (P) N.C.

10

Max. operating frequency (cycle/min) Note) 80 70 45 25 10 Extended 1.3 2.8 5.4 6.4 14.1 14.7 Spring force (N) Compressed 3.9 5.4 8.4 17.4 29.1 34.4 150 Max. allowable thrust (N) 245 422 814 1961 2942 Ambient temperature (C) 10 to 60 (No freezing) Basic type 15 23 65 5.5 120 300 Weight (g) With cap 16 25 70 135 350 Note) Max. absorbed energy and max. operating frequency values are at room

3 position cylinder series RZQ provides intermediate stop mechanism. 2 intermediate strokes are possible with only a small extension in total length. First stage stroke can be specified without changing the overall length. High accuracy is achieved by an intermediate stop method of pressing metallic components against each other. A tube rod with a large bore which is 70% the piston diameter

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Fittings & Tubing Air Cylinders Rotary Actuators Action Double acting Operating pressure 0.15 to 0.7 MPa Proof pressure 1.05 MPa 10 to 60C (No freezing) Ambient and fluid temperature 50 to 300 mm/s (Adjuster option/Metal stopper: 50 to 200 mm/s) Piston speed Rubber bumper (Standard, Adjuster option/Rubber stopper) None (Adjuster option/Metal stopper) Cushion Non-lube Lubrication +1 0 mm Stroke

Vacuum

Flat with rib 1 0 12 29.9 46 80 91 1 . 7 1 5 12 29.9 46 57 80 9 1 3 1 . 8 1 8 t25 21.5n4 465 30.5 Deep type '5132" tube may be substituted lor 4mm (Check leakage) I t o IPR $enies ffitlr Buflen lnimen Pad Diameters s20 . a25. o32 Pad Diameters @4O. sso Flat type Deep typeZPB2SD only Deep typeIZPR4oD only ) Flat type. Flat with rib Flat type .

Vacuum

Flat with rib 1 0 12 29.9 46 80 91 1 . 7 1 5 12 29.9 46 57 80 9 1 3 1 . 8 1 8 t25 21.5n4 465 30.5 Deep type '5132" tube may be substituted lor 4mm (Check leakage) I t o IPR $enies ffitlr Buflen lnimens Pad Diameters s20 . a25. o32 Pad Diameters @4O. sso Flat type Deep typeZPB2SD only Deep typeIZPR4oD only Flat type. Flat with rib Flat type .

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

TMH ASD AS Maximum return speed (mm/s) 100 200 300 Speed Controller Cylinder Solenoid valve Tubing Silencer AS-FE 6 ASD230FG CJ2 SYJ500 TU0604 1 m AN11001 KE 10 16 Cylinder size AS-FG AS-FG 20 ASD330FG CM2 SYJ700 TU0604 1 m AN11001 Cylinder size 25 AS-FP 32 Values at 0.5 MPa and 20C.

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Next, measure the maximum flow to be saturated in the first place, then measure this flow rate at 80%, 60%, 40%, 20% and the upstream and downstream pressure. And then, obtain the sonic conductance C from this maximum flow rate. In addition, calculate b using each data of others and the subsonic flow formula, and then obtain the critical pressure ratio b from that average.

2.0

Inscribed number 3 3 x 1 3 3A 1/8" x 1/16" 4 4 x 2 4 4A 5/32" x 1/32" 6 6 x 4 6 6A 1/4" x 1/8" KO Plug connector, Without connector G (Option) Grommet, 300 mm y Lead wire length Nil 300 mm 6 600 mm 10 1000 mm The plug connector is included but does not come assembled.

Return Filter FH100 Series

Petroleum, Water-glycol, Emulsion: NBR; Phosphoric ester: FKM FH FH HOW Model/Rated Flow Rate Model Port size (Rc) Rated flow rate (L/min) Micromesh Paper FH100-06 FH100-08 FH100-10 FH100-12 FH100-16 FH100-20 FH100-24 3/4 60 50 1 100 80 1 1/4 150 120 1 1/2 200 160 2 300 260 2 1/2 550 450 3 700 600 Description Part no.

PF3A7xxH.eng

(For accumulated decrement) [ 150] 150 L/min (PF3A703H) [ H] Setting of Hysteresis [ 300] 300 L/min (PF3A706H) Caution Press the button once to reduce the value by one digit, press and hold to continuously reduce. [ 600] 600 L/min (PF3A712H) : If the error cannot be reset after the above measures are taken, then please contact SMC.

PF3A7xxH-L.eng

(For accumulated increment) [H_1 ] Setting of Hysteresis [ 300] 300 L/min (PF3A706H) Do not use the product in a place where static electricity is a problem. Otherwise it can cause failure or malfunction of the system.

ASR

pressure 0.1 MPa 0.1MPa 1.4 Pressure valve Flow valve 1.2 0.2 MPa 0.2MPa 1.0 Delay time (sec) 0.3 MPa 0.3MPa Quick supply and exhaust valve 0.8 Working stroke 0.1 MPa 0.1MPa 0.6 Return stroke 0.2 MPa 0.3 MPa 0.2MPa 0.3MPa 0.4 Cylinder operating pressure (MPa) Air consumption reduction ratio (%) Return stroke 0.5 0.3 0.2 0.1 AS 0.5 MPa 0.5MPa Working stroke 0.2 0 17 25 33 ASP 0.0 0.5 40 50 63 80

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

Double acting, Single rod Fluid Air Proof pressure 1.05 MPa Maximum operating pressure 0.5 MPa Minimum operating pressure Note 1) 0.005 MPa 10 to 80C Ambient and fluid temperature Cushion Rubber bumper (Provided as standard) Lubrication Note 2) Not required (Non-lube) Rod end thread Female thread Rod end thread tolerance JIS class 2 +1.0 0 Stroke length tolerance Piston speed Note 3) 0.3 to 300

Process Pump Series PA3000/5000/PAX1000 Series PB1000

SUP=0.3MPa 80 SUP=0.2MPa 60 Note 2) 1 cycle discharge rate PA3000: Approx. 22ml PA5000: Approx. 100ml Selection procedure 1. First mark the intersection point for a discharge rate of 4l/min and a lifting range of 15m. 2. Find the pilot air pressure for the marked point.

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

For Deionized Water and Chemicals Digital Flow Switch Series PF2D How to Order PF2D5 13 20 1 Remote Type Sensor Unit Flow rate range 0.4 to 4l/min 1.8 to 20l/min 4 to 40l/min 04 20 40 Output for display unit Note 1) + analog output (1 to 5V) Output for display unit Note 1) + analog output (4 to 20mA) Output specifications 1 2 Port size: (inch) Note 1) Output for the display units of PF2D 300

Low Profile

SX90/090 Series CAT.ES70-59A Low Profile 2/3-Port Solenoid Valve SX90/090 Series How to Order SX9 1 5 G 2-port valve q SX090 5 G 3-port valve w e r q Type of actuation w Power-saving circuit e Rated voltage r Electrical entry 1 Normally closed 2 Universal Nil Without power-saving circuit Y1 With power-saving circuit 5 24 VDC 6 12 VDC G Grommet (Lead wire length: 300 mm) Specifications Model

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

For Dry Air, Pilot Operated 2 Port Solenoid Valve Series VQ20/30 Compact & lightweight with large flow capacity Weight (g) Effective area (mm2) 46 9 (Cv0.5) VQ20 VQ30 80 17.5 (Cv1) Series VQ30 VX VNl VQ Series VQ20 High frequency operation possible and long operating life High speed response 5ms or less (VQ20), 20ms or less (VQ30) (Without indicator light and surge voltage suppressor, at