ARM10/11

mA 50 mA 20 mA Impact resistance 30 G 14-4-21 4 Series ARM11A Flow Characteristics Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa ARM11AA1-307 (One-touch fittings: IN 6, OUT 4) ARM11AA1-307-1 (One-touch fittings: IN 6, OUT 4) 0.35 0.6 0.7 0.30 Outlet pressure MPa Outlet pressure MPa 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0.00 0 20 40 60 80 100 0 0 50 100 150 Flow

ARM10/11

mA 50 mA 20 mA Impact resistance 30 G 14-4-21 4 Series ARM11A Flow Characteristics Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa ARM11AA1-307 (One-touch fittings: IN 6, OUT 4) ARM11AA1-307-1 (One-touch fittings: IN 6, OUT 4) 0.35 0.6 0.7 0.30 Outlet pressure MPa Outlet pressure MPa 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0.00 0 20 40 60 80 100 0 0 50 100 150 Flow

Magnetically Coupled Rodless Cylinder/ Basic Type CY3B Series ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

Standard stroke 6 10 15 20 25 32 40 50 63 6mm 10mm 15mm Port thread type 20mm Bore size 6, 10, 15 Type M thread Rc NPT G Symbol 25mm 32mm Nil 20, 25, 32, 40 40mm TN TF 50, 63 50mm 63mm Standard Stroke Bore size (mm) Standard stroke (mm) Maximum available stroke (mm) 300 50, 100, 150, 200 6 500 50, 100, 150, 200, 250, 300 10 15 20 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 1000 1500 100

Multistage Ejector (N)ZL Series

50 75 40 40 100 50 30 30 20 20 50 25 10 10 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 1.0 2.0 3.0 4.0 5.0 6.0 Supply pressure [MPa] Supply pressure [MPa] Flow rate Characteristics Flow rate characteristics Supply pressure: 0.4MPa Supply pressure: 0.4MPa 100 90 100 90 Vacuum pressure [kPa] Vacuum pressure [kPa] 80 80 70 70 60 60 50 50 40 40 30 30 20 20 10 10 0 0 10 20 30 40 50 60 70 80 90 100 110 120

MX-OMP0051

MXQ16B 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20.6 33 23 23 23 29 38 63 63 63 MXQ20B 32.2 21.2 21.2 21.2 21.2 21.2 21.2 21.2 21.2 30.9 31.9 31.9 31.9 44.9 44.9 46.9 69.9 69.9 D-M9V/M9WV A 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6(A) 18 7.4 7.4 7.4 7.4 2 2.6 5.6 7.6 7.6 MXQ8(A,C) 13.9 13.9 13.9 13.9 13.9 13.9 7.1 7.1 7.1 13.1 30.1 7.1 MXQ12(A,C) 16.5 16.5 16.5 16.5

11-cq2-e

Grease pack part no.: GR-S-010 (10 g) 80 Compact Cylinder/Water Resistant: Double Acting, Single Rod Series CQ2 Replacement Procedure is 20, 25, 32, 40 50, 63, 80, 100 P.290 Construction Standard (40 to 100) !2 !3 !1 !0 !3 !3 !2 !1 Without Auto Switch With Auto Switch The numbers are the same as the "Construction" of the CQ2 series catalog (CAT.ES20-205).

Low Profile Guide Type

10 12 33.5 22.5 12 46 44 23.5 55 100,150,200,250,300,350,400,450,500,550,600 CYP Model KC KA KB KH KW L LA LL LW LZ ML MM N PA PB PC Q QA QB QW CY1F10 6.5 44 8 19 59 38 58 20 86 19 5 M3 x 0.5 18.5 40 40 8.5 90 4 12 33 CY1F15 6.5 51 10 19 66 53 65 20 99 19 5 M3 x 0.5 18.5 50 50 7 97 4 12 40 CY1F25 7.5 66 13 27 84.5 70 89 25.5 128.5 17 9 M5 x 0.8 24 65 65 8 129 5.5 14.5 52 P (Piping port)

NCQ8

1) Refer to page 50 for auto switch common specifications.

Multistage Ejector Series ZL112/212 1

MPa Supply pressure: 0.4 MPa 100 90 100 90 ZQ Vacuum pressure (kPa) Vacuum pressure (kPa) 80 80 70 70 ZF 60 60 50 50 ZP 40 40 30 30 ZCU 20 20 10 10 AMJ 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300 130 Suction flow rate (/min(ANR)) Suction flow rate (/min(ANR)) Misc.

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

60 80 100 Load N 0 20 40 60 80 100 Load N 0 50 100 150 200 250 8-9-10 10 Air Slide Table Long Stroke Type Series MXY Construction @3 y w q r u #0 MX MTS !

Turntable Cylinder Series MGT

75st Load weight m(kg) Load weight m(kg) 40 50 100 Larger than 50st 50st 25st 30 25, 50st 20 50 40 10 30 5 4 3 2 20 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 304050 100 200 300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) Allowable side load F(N) 1N: Approx. 0. 102kgf F Stroke (mm) Bore size (mm) Model 25 50 75 100 125 150 175 200 MGTM 140 151 162 176 193 212 178 204 63

PFA/PFW

34 4-4.5 40 50 (41.5) 3 4 1 2 73 Connector pin numbers Pin name Pin No.

Nozzle Type Ionizer

2 x M3 7.5 2 x 3.4 2 x R10 25 5 40 50 Internal mounting 2 x 3.4 20.5 33 30 30 52 46 44 26 17 11 26 12 8 x 3.4 2 x Hexagon socket head cap screw M3 x 6 (Accessory) 40 5 22.7 Internal mounting Pivot mounting 21 33 30 (Mounting angle adjustable range) (83) 61 61 Pivoting bracket IZN10-B2 20 3.4 64 56 90 (Mounting angle adjustable range) 11.4 28 20 20 9 24 3.4 4 14 40 18 2 x Hexagon socket head

Title not found

AW20 (K) to 40 (KJ !

PFxx-OMJ0005CN

(25) PFM750--D/F 50(25) PFM711--C/E 100(50) PFM711--D/F 100(50) ( )CO2 ( ) CO2 () 25[L/min] 10[L/min] [L/min] [L/min] 50[L/min] 100[L/min] [L/min] [L/min] -57No.PF-OMJ0005CN-I (350[kPa]) 25[L/min] 10[L/min] [kPa] [kPa] [L/min] [L/min] 100[L/min] 50[L/min] [kPa] [kPa] [L/min] [L/min] -58No.PF-OMJ0005CN-I PFM7-(N)01/(N)02/F01 17 2 -59No.PF-OMJ0005CN-I PFM7-(N)01L/(N)02L/F01L 2 17 -60No.PF-OMJ0005CN-I

Air Cylinder CP Series Cylinder Positioner Assembly

$i3:;i, (3ol;1 2.40 ) 79+ 0 0033 M26rl 5 0.83 1 5 0 1.57 (61) (37) (40) (83) (38) \2t) Mi lLmete6 in Parenlheses CLEVIS PIN ROD CLEVI! DIMENSIONS REAF CLEVIS AORE .Dd9 I NUMEER BORE CDP.3A 50 40. 50. 63 0.47 2 . 1 9 1.47 0 . 1 6 0 . 1 2 (55.5) (47.s) l4) (3) 63 0.63 ! !!

Title not found

Srole = 0.79 120mm) waool E CPA1 FN w/o Boot with gool' BORE a EB c o E K M tit N P FD FT FX FZ H zz d 1 n e zz 1 3 8 (35) 3 1 9 (811 2.76 (70) 2.05 (52) 0.79 (20) 1 5 7 (40) 117) MBxl 25 0.24 (7) 0 4 3 { r 1 ) Mr8x1.5 1 1 8 {30J 3.54 (90) 2.76 t70l 035 (9.0) l.12) (90) (50) 4.33 (110) 228 l5a) 6.26 o59) 2.24 (s) 2.05 (52) 0.59 (1s) 2.60 (66) s T o 167 '1.22 {40) o 6 7 tlr) M10x1.25 0.24

KJ

40 42.5 42.5 43.5 45 48.5 49.5 50 54 54.5 56.5 58.5 59 60.5 12.7 14.29 12.7 14.29 12.7 14.9 1 8 2.5 14 15.5 44.5 42 46 44 48.5 46.5 49.5 51.5 52.5 55.5 56.5 60 61 64.5 64.5 65.5 68.5 5 32 3 16 10.4 9.7 16 10.4 3 16 3.5 18 11.4 10.6 16.5 11.4 K 14.29 1 4 13.2 4.6 19 13.2 12 17 M 17.46 Connection thread 21 22 35 42 43 56 31 41 68 (With seal) H 5 16 15.2 6 15.2 13.7 18.5 17.46 D 19.05 3 8 17.9

Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

40 0.02 0.01 63 80 100 Standard Stroke Table Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Replacement Parts: Seal Kits 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit No. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40

IR1000/2000/3000

30 Set pressure (kPa) 54.5 40 55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 100 0 20 40 60 80 100 120 57.0 100 95 90 85 80 75 70 65 60 Flow rate (l/min (ANR)) VAC side pressure (kPa) IRV3000 IRV3000 0 53.0 10 53.5 20 54.0 SET side pressure (kPa) 30 Set pressure (kPa) 54.5 40 55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 57.0 100 95 90 85 80 75 70 65 60 100 0 20 40 60 80 100 120 140 160 VAC