MQQ

0.2 14 10 H 30 S + Stroke Z + Stroke 9 ZZ + Stroke Bore size (mm) S CI Z H ZZ 20 24 97.5 168 40.5 177 25 30 102.5 177 44.5 186 10-5-22 22 Low Friction Cylinder: Anti-lateral Load Type Metal Seal Series MQM For other dimensions, refer to basic style on page 10-5-20.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) Vacuum entry (Female thread) Vertical Vacuum entry direction M8 x 1.25 M5 x 0.8 Rc 1/8 Connection/Vacuum entry Connection 10 Female thread 10 to 16 17 14 19 M5 x 0.8 20 to 32 10 to 16 47 46 M5 x 0.8 40, 50 M8 x 1.25 20 to 32 Pad dia.

OMR0031

External Connection (P.20) for wiring. Refer to section 17.

High Vacuum Angle Valve

15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

Booster Regulator Series VBA1110 to 4200 1

Air operated type 14-9-1 2 Series VBA1110 to 4200 Size Selection Pulsation is decreased by using tank.

Pulse Valve

port 1/8, 1/4 (Rc, NPT, G) 2 x P Port size 2 x P Port size F E F E D D C B C B Port size: Size 14 A A ( 52) ( 52) (20) (20) Silencer (Option) Silencer (Option) Pilot port 1/8, 1/4 (Rc, NPT, G) Pilot port 1/8, 1/4 (Rc, NPT, G) Exhaust port 3/8 Exhaust port 3/8 2 x P Port size 2 x P Port size F E F E G G D C B D C B 20 20 Dimensions [mm] Model Port size P A B C D E F G JSXFAF-06 3/4 74 55.5

VQ5000

Stations D side U side SOL.A 1 ( ) ( + ) Black None SOL.B 14 ( ) ( + ) Yellow Black 1 station 1 14 SOL.A 2 ( ) ( + ) Brown None 2 15 SOL.B 15 ( ) ( + ) Pink Black 2 stations 3 16 4 SOL.A 3 ( ) ( + ) Red None 17 5 SOL.B 16 ( ) ( + ) Blue White 3 stations 18 6 19 SOL.A 4 ( ) ( + ) Orange None 7 SOL.B 17 ( ) ( + ) Purple None 4 stations 20 8 21 SOL.A 5 ( ) ( + ) Yellow None 9 22 SOL.B

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

74 60 820 263 86 70 0.05 AN300-03 3 8 AN400-04 1 2 0.02 AN500-06 3 4 0.01 AN600-10 1 1 1 0.005 AN700-12 1 4 AN800-14 1 2 AN900-20 0.002 50 200 1000 5000 20 100 500 2000 10 50 10 Construction/Parts/Dimensions Air flow (l/min (ANR)) AN500 to 900 AN200 to 400 Noise Level (Initial conditions) End plate End plate AN200 to 900 Condition: 0.5 MPa at inlet pressure of solenoid valve Measurement

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

20 37.4 66.5 20 16 20 (38) VQ4 The broken line indicate DIN rail mounted style [-D].

100

material 1 Resin Refer to . on page 14 for replacement parts. 10 Sound absorbing material 2 Resin 11 Valve plate PBT Specific Product Precautions Refer to m on page 14 for replacement parts. 12 Knob POM 13 Needle Brass (Electroless nickel plating) 14 Port block assembly Aluminum alloy/NBR/Stainless steel Refer to b on page 14 for replacement parts. 15 Supply valve, Release valve Refer to

SFOD-OMT0005CN

No.SFOD-OMT0005CN-C EtherNet/IP (DC24V) / / JXC91 1 . 4 2 . 6 2.1. . 6 2.2. . 7 2.3 . 8 2.4 () . 9 (1) . 9 (2) . 9 (3) . 9 (4)PLC . 9 (5) . 9 (6) . 10 (7) . 10 (8) () . 11 (9) . 11 3 . 12 3.1. . 12 3.2 . 13 3.3. . 14 (1)(JXC917-) . 14 (2)DIN (JXC918-) . 15 3.4. . 16 (1) . 16 (2) . 16 (3) . 17 4 . 18 4.1 (IP ) . 18 4.2 . 19 TMEtherNet/IP TM . 20 4.3 RSLogix5000 4.4 EtherNet/

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

14 H 13.5 12.5 13 20 20.5 22 29 33 33 I 28 34 40 50 58 72 J 4.5 4.5 6 6 8 8 10 12 12 N 9.5 11 11 18 18.5 20 26 25 25 Q NN S 62 63 83 106 111 124 150 176 188 K 5 4 11 8 10 15 16 25 26 V A 4 4 4 8 8 8 10 T C 8 14 14 26 32 32 41 L 35 38 57 66 70 80 92 110 122 MM NA 10 14 17 24 30 36 46 55 69 Model 12-CY3B6 12-CY3B10 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 12-CY3B50 12-CY3B63 R

MXS

(Unit: mm) A 2 2.5 4 5 5.5 10 B Model MXS 6 MXS 8 MXS12 MXS16 MXS20 MXS25 3 3.11-5 Air Slide Table Series MXS How to Order MXS 12 50 F9N S Air slide table Number of auto switches Bore size (Stroke mm) 2 1 n 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

(mm) Bore size A B C D F FB FC FT FX FY FZ GA GB H MM NA NB NN S Z 10 15 12 14 4 8 13 4.5 1.6 24 14 32 8 5 28 M4 x 0.7 12.5 9.5 M8 x 1.0 46 74 16 15 18.3 20 5 8 19 5.5 2.3 33 20 42 8 5 28 M5 x 0.8 12.5 9.5 M10 x 1.0 47 75 5 Series CJ2Y Dimensions Head flange (G) CJ2YG Bore size Stroke Z Mounting nut MM NN GA Piping port 2 x M5 x 0.8 GB NN Cover surface Rod end nut C D B 0 0.3 FY FB 2 x

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet Flat Type with Groove A 3 30.5 11 1.2 11 04 6 37 14 14.5 10 47 18 20.5 J K Width across flats E 3 30.5 11 1.8 11 6 37 14 14.5 10 47 18 20.5 06 08 N S U F GN GS HS 7 15 55 36.5 1.2 10 20 62.5 44 06 08 15 55 36.5 1.8 20 62.5 44 04 JB K ZP3 T UM B5 C2 3 31.5 12 11 J K 10 6 38 15 14.5 10 48 19 20.5 JB K 15 56 37.5 10 20 63.5 45 10

MXH Series Compact Slide

7.5 4-M4 x 0.7 Depth 6 23 5 13 8 18 21.5 46 47 20 23 5 20 6.5 6.5 5 NS 12.5 13 11 7.5 35 + Stroke 46.5 + Stroke 11.5 20 4-M4 x 0.7 Depth 6 5 + Stroke 12 Stroke (mm) LT NS LA LB J 5 14 49 4 10 10 49 14 10 4 15 24 59 4 20 20 59 24 20 4 25 30 69 4 30 30 69 30 30 4 40 45 20 79 6 20 50 89 55 25 25 6 60 60 30 99 6 30 34 Compact Slide MXH Series Dimensions 16 LT (mm) 8 24 16 LA LB 14 J-M4

RHC

20 27 27.5 24.5 72 62 15 17.5 12 16 10.5 19.5 14 14.5 9 8.5 20.5 14 25 25 29.5 30 27 74.5 64.5 15 17.5 12 16 10.5 19.5 14 14.5 9 8.5 20.5 14 REC 32 32 33 33.5 30.5 78 68 15 19.5 12 18 10.5 21.5 14 16.5 9 8.5 22.5 16 40 40 37.5 38 35 82.5 72.5 20 24.5 17 23 15.5 26.5 19 21.5 14 13.5 27.5 21 CX 50 50 43 43.5 40.5 88 78 18 28.5 15 23.5 13.5 27 17 22 12 11.5 28 21.5 63 63 50.5 50.5 47.5 95 85

3 Position Cylinder Series RZQ

20 32 10 6 14 22 124 92 114 40 14 7 20 28 134.5 96.5 124.5 50 146 102 14 132 8 20 30 63 CU Bore size (mm) L B + Full stroke RR CW CX+0.2 +0.4 CX CZ RR CL + Full stroke CZ -0.3 -0.1 18 36 10 32 A + Full stroke 18 36 10 40 22 44 14 50 22 44 14 63 10 Series RZQ Auto Switches Proper Mounting Position(For Detection of Piston A Stop Position) and Mounting Height D-A7 D-A80 =U B + First-stage

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 27 27 31.5 31.5 38 38 13 14 15.5 16.5 19 19 1/8 1/4 1/4 3/8 3/8 1/2 16 16 16 16 16 16 84 84 94 94 114 114 4 4 5 5 5 5 4 4 5 9 11.5 17 M6 X 1.0 M6 X 1.0 M8 X 1.25 M8 X 1.25 M10 X 1.5 M10 X 1.5 6.5 9 10.5 12 14 15 6 6 7 7 10 10 47 51 58 58 72 72 M10 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 135 139 156 156 190 190 up to 500 up to

AS-FG/ASD-FG

AS121FG-M5 AS231FG-01 R(PT) 1/8 20, 25, 32 AS221FG-01 AS231FG-02 R(PT) 1/4 20, 25, 32, 40 AS221FG-02 AS331FG-02 R(PT) 1/4 40, 50, 63 AS321FG-02 AS331FG-03 R(PT) 3/8 40, 50, 63 AS321FG-03 AS431FG-04 R(PT) 1/2 63, 80, 100 AS421FG-04 AS131FG-U10/32 10-32UNF 6, 10, 16, 20 AS121FG-U10/32 AS231FG-N01 NPT1/8 20, 25, 32 AS221FG-N01 Elbow type AS231FG-N02 NPT1/4 20, 25, 32, 40 AS221FG-N02 AS331FG-N02