VK3000 VV5K3-20-06 [Option] Note) CE-compliant: For DIN terminal only VV5K3-40-06-M5 Common SUP/Common EXH How to Order Type 20: Body ported (A, B port top ported) 20 05 VV5K3 Applicable solenoid valve VK3120--M5(-Q) VK3120--01(-Q) VK332--M5(-Q) VK332--01(-Q) A port: Rc 1/8, M5 x 0.8 A, B port Rc 1/8, M5 x 0.8 VK3120 Valve stations VK332 Thread type Q CE-compliant Nil CE-compliant 01 1 station
19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM (Based on IEC529) Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4 Single wiring (Refer to the connector wiring diagram.)
20 SUP=0.2MPa SUP=0.2MPa 10 10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.
Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD
20 SUP=0.2MPa SUP=0.2MPa 10 10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min 1m = 3.28ft 1l/min = 0.035SCFM Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.
20 SUP=0.2MPa SUP=0.2MPa 10 10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.
{Rc3/4} FGH200-06 {Rc3/4} FGH300-06 {Rc3/4} 0.05 0.05 0.05 Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) 0.01 0.01 0.01 0.005 0.005 0.005 0.001 10 30 50 70 100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) FGH100-10 {Rc1} FGH200-10 {Rc1} FGH300-10 {Rc1} 0.05 0.05 0.05 Pressure drop (MPa) Pressure drop (MPa) Pressure drop (
Component module KBC1 KBC2 KBC3 KBC4 KBP1 KBP2 KBP3 KBP4 KBV2-06 2 KBE2-06 2 KBN2 1 KBN2 KBV1-06 KBE2-06 KBV2-06 5 Bracket: KBX(Page 87) Component module KB X 6 KBV2-06 1 KBV1-06 1 KBR2-1 1 KBH2-R2S 1 KBP1 1 KBP1 KBR2-1 Applicable thread size KBH2-R2R KBV2-06 KBP1 Type Bracket: KBX KBV1-06 Part No.
AM550-06, 10 P. 14-20-16 Mist separator 35 dB or more of noise reduction AMC310-03 AMC510-06 AMC610-10 Exhaust cleaner VBA2200-03 Air operated type VBAT05 (5 l, Directly connected to booster regulator) VBAT20 (20 l, Directly connected to booster regulator) VBAT38 (38 l, Directly connected to booster regulator) JIS Symbol Air tank VBAT10 (10 l, Directly connected to booster regulator) Handle
PSI -8 to 5 PSI -8 to 20 PSI -13 to 20 PSI 0 to 10 PSI 0 to 20 PSI, 3:1 RATIO 0 to 20 PSI, 5:1 RATIO XX XX XX XX XX XX XX XX XX XX XX XX XX XX XX XX XX XX BARB OPTIONS ADJUSTING OPTION W/K = WITH ADJUSTING KNOB W/S = WITH 1/4" SHAFT W/0S = FLUSH SHAFT P80 = 1/16" ID BARBS P85 = 1/8" ID BARBS NOTE: UNITS COME STANDARD WITH STRAIGHT CONNECTIONS FOR 1/16" ID TUBING Back to Top .
Series VXF How to Order VXF 2150 06 1 G Solenoid type Normally closed VXFA 2150 06 Air operated type Option Nil S Standard With silencer Refer to the table (2) below for availability.
-02 to 06 VH430-02 to 06 (Refer to figures of porting direction in the right.) 3 (Exhaust center) VH421-02 to 06 VH431-02 to 06 Rc3/4: 58(3.2) 2 position 3 position 3 4 2 1 2 (Position) VH422-02 to 06 VH432-02 to 06 N Flow direction 2(A) Flow direction 4(B) Flow direction 2(A) Flow direction 4(B) 90 45 45 Rc3/4: 185(10.2) 1 2 9.7 VH6 VH600-06, 10 3 (Closed center) 3/4, 1 Rc1: 194(10.5) 3
Universal mounting Model Model Size (Nominal x Height) Piece Metric size Inch size TMH-23J TMH-04J TMH-06J TMH-06 TMH-01J TMH-03J TMH-05 TMH-07 TMH-09 TMH-11 TMH-13 M3 x 15 M3 x 20 1 M4 x 25 TMH-08 TMH-10 TMH-12 The holder can be used to secure an individual part.
AS2201F -01-06 AS2200-01 AS2201F -02-08 AS2200-02 100 200 50 100 0 0 SV100 ANA1 -C08 T0604 SV200 ANA1 -C10 T0806 200 CM2 32 400 MB 50 300 150 Stroke (mm) Stroke (mm) AS2201F -01-06 AS2200-01 AS3201F -02-08 AS3000-02 200 100 100 50 0 0 200 CM2 40 400 MB 63 150 300 Stroke (mm) Stroke (mm) AS2201F -02-06 AS2200-02 100 AS4000-03 200 50 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid
Universal mounting Model Model Size (Nominal x Height) Piece Metric size Inch size TMH-23J TMH-04J TMH-06J TMH-06 TMH-01J TMH-03J TMH-05 TMH-07 TMH-09 TMH-11 TMH-13 M3 x 15 M3 x 20 1 M4 x 25 TMH-08 TMH-10 TMH-12 The holder can be used to secure an individual part.
N01e} The iMicaled 110w rate values are al a pressure 01 O.5MPa and a temperature 01 20 Q C. 1 Speed Controller 5 .
(inch) 4 6 8 10 12 Accessory Model TM-04 TM-06 TM-08 2 x 6 T TM-04 TM-06 TM-08 TM-10 TM-12 2.6 x 8 4 TM-10 VMG 3 x 8 TM-12 Dimensions: Multi-tube Holder (Pitch) N-holding part Cutting groove for separation N (No. of holding parts) Applicable tubing O.D.
(mm) Model Model Accessory TM-04 TM-06 TM-08 2 x 6 TM-04 TM-06 TM-08 TM-10 TM-12 4 6 8 10 12 2.6 x 8 4 TM-10 3 x 8 TM-12 Dimensions: Multi-tube Holder N x D (Pitch) N x holding part Cutting groove for separation N (No. of holding parts) Applicable tubing O.D.
Applicable model 02 03 04 06 10 1/4 3/8 1/2 3/4 1 8 3 Pressure gauge 3 4 5 6 1 AMR300-02/03 AMR400-02 to 04 AMR500-04 to 06 AMR600-10 3 4 5 6 1 2 Nil E2 E3 E4 E6 E10 None None With pressure switch S Nil 4 3 1/4 3/8 1/2 3/4 1 Port size Adapter assembly Thread type Symbol Port size Nil N F Rc NPT G Thread type 02 03 04 06 10 1/4 3/8 1/2 3/4 1 The port size of adapter assembly is same as the