Speed Controller: Standard Type In-line Type AS Series

Free flow Controlled flow Weight (g) Sonic conductance dm3/(sbar) Sonic conductance dm3/(sbar) Critical pressure ratio Critical pressure ratio Model Port size Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS1000-M3 AS1000-M5 AS2000-01 AS2000-02 AS3000-02 AS3000-03 AS4000-02 AS4000-03 AS4000-04 AS5000-02 AS5000-03 AS5000-04 0.06 20 0.06 20 M3 x 0.5 4.7 0.15 0.22 80 0.25 90 M5 x 0.8 33 0.7

Precision Regulator

rInterface tInterface with bracket 225 173 130 97 129 169 30 eAFM20-A 41 wAF20-A eAFM30-A qIR100--X170 wAF30-A eAFM40-A 50 qIR20--X170 qIR30--X170 wAF40-A 820 Made to Order IR1000/2000/3000 Series With Digital Pressure Switch 7 Manifold Specifications (Except IR2120 and IR3000 series) 8 With digital pressure switch (model no: ISE30A-01--ML).

HRX-OM-X084

MT.04 Cumulative use time: It occurs at 5,000 hours. (It can be changed within the range of 1 to 9 hour) Notice of dust-proof filter Maintenance MT.05 Cumulative use time: It occurs at 5,000 hours.

HRX-OM-X071

MT.04 Cumulative use time: It occurs at 5,000 hours. (It can be changed within the range of 1 to 9 hour) Notice of dust-proof filter Maintenance MT.05 Cumulative use time: It occurs at 5,000 hours.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

(Manifold specification sheet on page 41.)

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

A L D VQZ D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 VQD Color: White VZS VFS EXH port silencer VS 63 Silencer is installed in the EXH port.

AME

Refer to dimensions on pages 14-20-40 to 14-20-41 for details. w e Sight glass Tempered glass AM850 is aluminum casted. Replacement Parts AME450 Model No.

MU

Part no. 25 32 40 50, 63 0.040 0.076 0.040 0.076 0.040 0.076 0.050 0.093 CD-MU02 CD-MU03 CD-MU04 CD-MU05 25 32 40 50, 63 8 10 10 14 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 17 19 22 27 18.2 22.2 26.2 32.2 6 7 8 11 19.6 21.9 25.4 31.2 16.5 18 21 26 23 27 31 38 7.6 9.6 9.6 13.4 NT-03 NT-MU03 NT-04 NT-05 A nut is attached with rod end male thread as standard. (Double rod type: 2 pcs.)

MTS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 41 + Stroke M2.5 x 0.45 12 53 + Stroke 9 15 0.2 9 4-M3 x 0.5, effective length 5 10 15 0.2 Rod end male thread Width across flats 3.5 +0.035 +0.025 4 M3 x 0.5 3.9 M3 x 0.5 6.4 7 8 4 24 5.5 2.4 Stud bolt part no.: MT-S8 Rod end nut part no.: NTJ-006A 8

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order. q Symbol Description Body size 20 30 40 50 60 25 Nil K Note 1) Without backflow function With backflow function With backflow function w + Nil N F Thread type e Rc NPT G + 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Port size r + Nil B Note 3) H Note 2) a Without mounting option With bracket

Series 10-, 21- AW-B Filter Regulator

Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order. q Symbol Description Body size 20 40 60 30 Nil K Note 1) Without backflow function With backflow function With backflow function w + Nil N Note 2) F Note 3) Thread type Rc NPT G e + 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Port size r + Nil B Note 5) H Note 4) a Without mounting option

PFxx-OMP0001CN

No.PF-OMP0001CN-F // PFMB7501 PFMB7102 PFMB7202 2 10 11 12 14 14 16 17 [] 21 OU1OUT2 {3 ] 22 22 [] 24 25 F0 26 F1 OUT1 28 F2 OUT2 36 F3 41 F10 42 F13 43 F20 44 F22 45 F30 46 F31 47 F80 OFF 48 F81 49 F90 50 F98 52 F99 53 54 58 59 61 62 62 65 67 -1No.PF-OMP0001CN-F (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems

MU

Part no. 25 32 40 50, 63 0.040 0.076 0.040 0.076 0.040 0.076 0.050 0.093 CD-MU02 CD-MU03 CD-MU04 CD-MU05 25 32 40 50, 63 8 10 10 14 18.2 22.2 26.2 32.2 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 17 19 22 27 6 7 8 11 19.6 21.9 25.4 31.2 23 27 31 38 16.5 18 21 26 7.6 9.6 9.6 13.4 NT-03 NT-MU03 NT-04 NT-05 A nut is attached with rod end male thread as standard. (Double rod type: 2 pcs.)

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

See page 5 for How to Order Pilot Valve Assembly See page 5 for How to Order Port Block Assembly SY3000-41-2A (with screw & gasket) SY5000-41-2A (with screw & gasket) Description Pilot valve assembly Port block assembly Note No. 6 7 Die-cast aluminum SY3000 is die-cast zinc 1 Body White ( ) Note) 8 Bottom cover assembly 2 3 4 5 Adapter plate End plate Piston Spool valve assembly White White

DOC1020530

Actuator operation from host . 40 8.1 CiA 402 drive profile . 40 8.1.1 FSA state . 40 8.1.2 Controlword / Statusword . 41 8.1.3 Control mode . 42 8.2 Parameter setting . 43 8.3 Servo-on and Homing . 44 8.4 Positioning operation (Profile position mode) . 45 9.

Type: 41 (Feedback Sensor Type), Bar Length: 340mm, Electrode Cartridge, Needle Material: High Speed De-Ionizing Cartridge, Tungsten, Input/Output Specifications: NPN (or N/A for Type 40), Power Supply Cable: 3m, One-Touch Fitting: 04 (ø4), Bracket: B (Bracket), Sensor: G (Auto Balance Sensor, High Accuracy for Types 41 & 42)

MU

Size B d d C l 0.040 0.076 0.040 0.076 0.040 0.076 0.050 0.093 8 10 10 14 M10 X 1.25 19.6 21.9 25.4 31.2 16.5 18 21 26 25 32 40 50, 63 6 7 8 11 23 27 31 38 25 32 40 50, 63 17 19 22 27 7.6 9.6 9.6 13.4 18.2 22.2 26.2 32.2 CD-MU02 CD-MU03 CD-MU04 CD-MU05 NT-03 NT-MU03 NT-04 NT-05 M12 X 1.25 M14 X 1.5 M18 X 1.5 A nut is attached with rod end male thread as standard.

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ISO 9002] SMC Taiwan [ISO 9002] SMC UK [ISO 9001/ISO14001] SMC US [ISO 9001] 15 Table of Contents Page Page Actuators Valves Pin Cylinder/Series CJ1 38 Gas and Chemical Liquid Valve/Series LVM 17 Miniature Cylinder/Series CJP 39 High Purity Chemical Valve/Series LV 18 Mini Free-Mount Cylinder/Series CUJ 40 Ultra Compact Valve. 3 Port Solenoid Valve 19 Electric Actuator/Series LG, LJ, LX 41

2/3 Port Valve

B(9.5) B(12.7) B(19.1) 1B(25.4) 1 B(31.8) 1 B(38.1) 2B(50.8) VNA 111 211 311 411 511 611 711 AS 420-03 420-04 500-06 600-10 800-12 900-14 900-20 Caution Warning 1Piping When operation is suspended, surge pressure will be generated between the cylinder and VNA11A.

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2 Rc(PT)1I4 ASP;l3OF:,FO~ RIPT)114 G(PF)1I8 I\Sps:ioFf;03' R(PT)318 G(PF)118 ),I'SPsJOF;;04: R(PT)1 /2 G{PF)1/4 A~P33!1F" 'l Il1 NPT1 /8 10-32UNF ,~Sp430FNO,? NPT1/4 NPTl /8 "ASP53QF~NOiI NPT3I8 NPT1/8 ')(~P630FNo,4 NPT112 NPT1 /4 Note) All brass parts are electroless nickel plaled.