HRX-OM-X037

Fig. 2-2 Names of the parts (This drawing shows HRL200-A-40.) 2.2.1 HRL-W-40 (Water-cooled type) Fig. 2-2 Names of the parts (This drawing shows HRL100/200-W-40.) HRL Series 2.2 Name and Function of Parts 2-3 HRX-OM-X037 Chapter 2 Name and Function of Parts Table 2.2-1 Accessory list (1) Operation Manual 2 pcs. (English 1 pc.

HRX-OM-W032

Press the 2 sec.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

2!6 @4 @1 @8 MX MTS MY #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !

HRX-OM-M090

and Fig. 5.2-2 Key operation (2/2) show the operation of keys of the thermochiller.

HRX-OM-R005

1 Part number of product HRS Series 2.1 Part number of product 2-1 HRX-OM-R005 Chapter 2 Name and Function of Parts 2.2 Name and Function of Parts Fig. 2-2 Names of each part Table 2-1 Accessories list (2) (4) 1 Alarm code list label 1pc. 2pcs. 2 Operation Manual (Jpn: 1pc.

HRX-OM-O021

1 Part number of product HRS Series 2.1 Part number of product 2-1 HRX-OM-O021 Chapter 2 Name and Function of Parts 2.2 Name and Function of Parts Fig. 2-2 Names of each part Table 2-1 Accessories list 1 Alarm code list label 1pc. 2pcs. 2 Operation Manual (Jpn: 1pc.

CXS

5.5 through 2-9.5 counterbore with depth 5.3 2-M4 x 0.7 with depth 6 64 25 62 23 11.5 50 28 6 12 12 30 10 M6 x 1.0 x 18.5 53 CXS20 2-M5 x 0.8 2-6.9 through 2-11 counterbore with depth 6.3 2-M5 x 0.8 with depth 7.5 80 30 78 28 14 60 35 6 12 12 30 12 M6 x 1.0 x 18.5 64 CXS25 2-M6 x 1.0 2-6.9 through 2-11 counterbore with depth 6.3 2-M5 x 0.8 with depth 8 98 38 96 36 18 75 44 8 16 14 30 16 M8

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Note 3) Weight without sub-plate 1.12-35 VQZ1000/2000/3000 Base Mounted Construction: VQZ1000/2000/3000 Metal seal Rubber seal 4 3 2 1 4 3 2 1 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 2 position double 2 position double (B) 2 (A) 4 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 (1) 3 position closed

Shock Absorbers and Rate Controls

(anilonl Pflt20tt -1, -2, -3 5.525.t2 N/A (lf)l/a.12 Ut{F 1T l . t 3 l.?0 3.11 .21 /A N/A t.12. .63 Prnt 25tI -2, -3 5.525.72N/A (lFllYB-12 UllF .38 t.l3 l.?0 3.41 N/A N/A 1.25 ,oJ Pfl22otf -1, -2, .3 8.14 8.34 rya(rr)r r4-l? utllF .38 l,13 l.?0 i.03 L I /A r{/ALl2 .tti, Pm225tI t, -2, -3 8 . 1 4 8.34N/A llF) lYo-12 UNt .38 l.t 3 t.?

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

(A) 2 1 (P) 3 (R) Rubber seal type VQZ200 300 / Metal seal type 3 2 1 3 2 1 N.C. N.C. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) 3 2 1 3 2 1 N.O. (A) 2 N.O. (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Parts list No.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

49 59 69 94 119 144 J 40 40 40 50 60 85 118 155 I 10 10 10 10 15 40 55 68 NN 2 2 2 2 3 4 5 7 H 40 40 40 50 30 35 35 35 G 16 16 16 16 21 26 39 19 N 4 4 4 4 6 6 6 8 HA 40 40 40 50 30 70 70 70 NA 2 2 2 2 2 4 4 4 GA 16 16 16 16 51 61 109 159 KA 125 173 223 13-/22-MXS16L-10 13-/22-MXS16L-20 13-/22-MXS16L-30 13-/22-MXS16L-40 13-/22-MXS16L-50 13-/22-MXS16L-75 13-/22-MXS16L-100 13-/22-MXS16L-125

SMC Basic Pneumatics

Fig 7 .21 a. P R ISO Symbol D t:-_ --= FlgT,21 a:2J2, b: 3/2 direct solenoid, spring retum, poppet type valve.

%silltr

Fig 7 .21 a. P R ISO Symbol D t:-_ --= FlgT,21 a:2J2, b: 3/2 direct solenoid, spring retum, poppet type valve.

MLGP

Step 2 1. For vertical mounting 2.

MLGP

Step 2 1. For vertical mounting 2.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

() 0.75 mm2 5.9 101.1 16 ATEX Compliant Base Mounted Type Series 52-SY7000 Dimensions 21 22.5 2-position single L plug connector (L) 52-SY7140 (R) -L13.5 02 03 79.2 41.7 61 10.4 21.5 2 x 4.3 (Mounting holes) 21 Manual override M5 x 0.8 (External pilot port) 4 B A Insulation: Black () 23 PE B A 38 46 Insulation: Red (+) X EB EA P 21 69 6.4 21.5 123.3 67.2 M5 x 0.8 (Pilot EXH. port)

EXxx-OMQ0015CN

2/2 ) (2 byte/1 ) (2 byte/1 ) -65No.EX-OMQ0015CN EX600 SI [EX600-SPN# (32 coils, Status)]4 Byte No.

REC

2, 4, 6, ) 10 15 60 60 + 45 (n 2) D-C73C D-C80C DH7C 10 15 65 (n 2) 2 15 + 50 ( ) 65 + 50 (n 2) (n = 2, 4, 6, ) (n 2) 2 15 + 50 ( ) D-B5/B64 D-G5NTL 10 15 75 (n = 2, 4, 6, ) 75 + 55 (n 2) (n 2) 2 20 + 50 ( ) D-B59W 15 20 75 (n = 2, 4, 6, ) D-A3 D-A44 D-G39 D-K39 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

MVGQ

62 M14 x 2 35 M14 x 2 M14 x 2 41 44 80 190 108 221 170 15 200 21 25 Note 1) It is possible to manufacture the intermediate strokes other than the standard strokes by means of installing a spacer.

Rotary Table

socket head cap screw 6 21 Round head no.0 Philips screw 1 20 Bearing 1 19 Needle bearing 1 18 Piston seal 4 17 Wear ring 4 16 Magnet 2 15 Bearing retainer 1 14 Table 1 13 O-ring 4 12 Gasket 4 11 Seal retainer 2 10 Cushion pad 2 Not required for models with shock absorber. 9 Adjustment bolt (or shock absorber) 2 8 Hexagon nut 2 7 Pinion 1 6 Piston 2 5 End cover 1 4 Seal 1 3 Plate 1 2 Cover