ZSE F/ISE ZSM PF2 IF Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Data Special fitting types are used in semiconductor production equipment (Metal gasket seal fittings) Leak rate: 1 x 10 10 Pa.m3/s ZSE/ISE60(F)-A2 ZSE/ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (Metal gasket seal fittings
Nil Metric thread (M3, M5) Rc NPT G N F Bore size Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 1/8 1/4 3/8 1/2 AS1000 AS1000 AS2000 AS2000, 3000, 4000, 5000 AS3000, 4000, 5000 AS4000, 5000 650 A AS Series Speed Controller: Standard Type In-line Type Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.
case of M3 Dimensions with broken lines stand for a locking knob type.
Amount of displacement on A when the load is applied at F. Amount of displacement on A when the load is applied at F.
Operating model: MHY2-16D Opening time: 0.15 s a = 40 (mm) b = 7 (mm) c = 8 (mm) d = 5 (mm) e = 10 (mm) f = 12 (mm) A part a b c B part e f d 2.
How to Order JA 40 F 14-150 Option Mounting type None Nil High temperature specifications 5 to 100C Nil F L Basic type Flange type Foot type Applicable bore size (mm) X11 Symbol Applicable bore size (mm) Model 6 10 15 20 30 40 63 80 100 140 160 6 10 10, 15 20 25, 32 40 50, 63 80 100 125, 140 160 Thread nominal size (Standard) Nominal thread size Applicable cylinder nominal thread size Standard
M3 M3, M4 M3, M4 M3, M4, M5 M4, M5, M6 M3 M3, M4 M3, M4 M3, M4, M5 M4, M5, M6 MSQ MRQ Symbol: A4 Symbol: A5 Symbol: A3 The long shaft can be further shortened by machining it into a stepped round shaft. (If shortening the shaft is not required, indicate for dimension X.) (If not specifying dimension C1, indicate instead.)
Table deflection due to yaw moment load Displacement at A when load is applied F Table deflection due to roll moment load Displacement at A when load is applied F A A F A F F L L L L dimension mm L dimension mm L dimension mm MXY6 MXY6 MXY6 100 100 100 MXY8 MXY8 MXY8 100 100 100 MXY12 MXY12 MXY12 140 140 140 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-
Max. 0.1 mg/m3 (ANR) Note 2) Downstream oil mist concentration (Before oil saturation, 0.01 mg/m3 (ANR) or less, approx. 0.008 ppm) When 2 years passed, or pressure drop reaches 0.1 MPa Element life Refer to Best Pneumatics No. 5 for further details. Note 1) With auto drain is 0.1 MPa (N.O. type), 0.15 MPa (N.C. type).
Metric Long stroke Standard stroke Without auto switch With auto switch A Long stroke L1 24 25.5 28.5 32.5 Long stroke (mm) Standard stroke (mm) Standard C Bore (mm) Bore (mm) With/Without auto switch A C1 H1 X Inch L1 14 15.5 18.5 22.5 B 22 22 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 A B 32 32 41 44 F 7.5 7.5 9 11 L B 17 17 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 Metric 6 8 7 12 12 16 20 25 12 16 20 25 9 10
: MDHR3-10R 11221122MDHR3-10E port location 3 x M3 x 0.5 thread depth 6 P.C.D.24 A (Mounting thread) 17.5 20 120 120 40 2-3 B 8.5 25 Finger closing port M3 x 0.5 M3 x 0.5 25 Finger closing port Finger opening port M3 x 0.5 M3 x 0.5 9.5 Finger opening port 44 +0.02 2 x 3 0 depth 6 31 (A, B common view) 0 9h9-0.036 4 x M3 x 0.5 thread depth 6 2 x 4.2 (A, B common view) 9.7 4.7 1 19.5 10.1 5.8
Calculation of applied lateral load The lateral load F equals the total load of the work piece. Thus, F = x m g (N) 1. Calculation of applied lateral load F The lateral load F equals the coefficient between the work piece and the conveyor. Thus, from the total amount of the work piece and coefficient of friction, F = x m g (N) 2.
port) S + Stroke N 52 3 x 1/4 (Rc, NPT, G) (Piping port) 20 17 30 10 W 2 x Speed controller valve Top width across flats 3 11.5 3 14 45 45 M16 x 1.5 45 Hs 30 IA IB 40 35 20 38 Width across flats 17 F 4 x M6 Thread depth 12 R15 0.050 d90.093 +0.027 H8 0 Shaft: 12 Hole: 12 97 ZZ + Stroke Z + Stroke Clevis width CKP1A: 16.5 CKP1B: 19.5 CKP1C: 12.5 +0.3 0 +0.4 0 +0.5 0 Unit: mm 40 Symbol F IA
I F RHC (mm) (mm) MK(2) M 30.5 32 41.5 K 46 58 68 J 40 46.5 55 I 76.5 91 110 N 16 15 19 H 73 88 106 F 93.5 107.5 130.5 O 18.5 19.5 21.5 N 16 15 19 M 13 15 19 K 46 58 68 J 40 46.5 55 H 73 88 106 F 76.5 91 110 Applicable cylinder ML2B25 ML2B32 ML2B40 Applicable cylinder ML2B25 ML2B32 ML2B40 RS Q G MM 16 21.5 24.5 PA Rc 1/8 Rc 1/8 Rc 1/4 LL 28 30.5 37.5 KK 15 16 17.5 O 69 84 102 PP 56 62.5 77
DataA: Inlet Air Temperature F 80 90 100 110 120 130 140 149 C 27 32 37.8 43 49 54 60 65 IDFB60/IDFB70 1.33 1.21 1.00 0.78 0.61 0.48 0.38 0.28 IDFB80/IDFB90 1.38 1.38 1.00 0.83 0.63 0.50 0.45 0.37 DataB: Ambient Temperature F 80 90 100 110 113 C 27 32 37.8 43 45 IDFB60/IDFB70 1.16 1.11 1.00 0.78 0.71 IDFB80/IDFB90 1.40 1.22 1.00 0.88 0.83 DataC: Inlet Air Pressure psi 50 60 70 80 90 100 120
E 2-H C D A B Side support B MY-SB 2-J C D A B (mm) A 61 70 87 B 75 84 105 C D E F G H J Part no.
Yaw moment M3 = W4 x L2 YES L2 Is there any influence of noise? (Refer to Caution on Handling on pages 706 and 707.) Install a noise filter. NO M3 There is no particular problem in using the system.
A C B Applicable model Dimensions [mm] A B C HECR002-A5-E 14 230 35 HECR004-A5-E 45 HECR006-A5-E HECR008-A5-E 44 HECR010-A2-E HECR008-W5-E 46 HECR012-W2-E 310 13 400 15 Option symbol F With Flow Switch F HECR Applicable model HECR002-A5-F HECR004-A5-F HECR006-A5-F HECR008-A5-F HECR010-A2-F HECR008-W5-F HECR012-W2-F With flow switch This is an ON/OFF switch detecting low levels of the circulating
SZ3 60 LOZ Manual override E Nil D Non-locking push type A B C D Push & turn locking type, screw driver operated E F F A, B port size Type of valve actuation Rated voltage COM specifications Pilot system A B C 4 One-touch fitting 6 One-touch fitting M5 x 0.8 Mixed 2 position single solenoid 2 position double solenoid 3 position closed center 3 position exhaust center 3 position pressure
MLU B 25 30 D F J79W S MDLU With Auto Switch Number of auto switches Built-in magnet 2 pcs. 1 pc.