Air cylinder

As the indicator LED protrudes from the switch unit, mounting the switch bracket above the LED may cause damage to it. (4) Insert the auto switch mounting screw (M3) included in accessories from the mounting hole of the auto switch mounting band, inserting the through hole of the switch bracket.

CEx-OMQ0011

Nm N M1 M M3 W W2 W W4 ML2B25 10.0 1.2 3.0 200.0 58.0 65.0 100.0 ML2B32 20.0 2.4 6.0 300.0 80.0 96.0 150.0 ML2B40 40.0 4.8 12.0 500.0 106.0 140.0 250.0 ML2B25 ML2B32 ML2B40 J 0.43 0.68 1.21 18 ML2B/M1 ML2B/W1 ML2B/W1 0 0 0 Nm 0 0 0 N N 0 m/s m/s m/s ML2B/M2 ML2B/W2 ML2B/W2 N m N N m/s ML2B/M3 m/s m/s 20 ML2B/W3 ML2B/W3 10 Nm 5 3 2 1 N N m/s m/s m/s ML2B/W4 500 N 00 N

0.01

Description Note Material Bracket set 1 SFD-BR100 With 2 countersunk head screws (M3) IDK e AMG AFF SFD200-C Component Parts No. Description Note Material AM Element 1 PC, Polyolefin, PU o !

CXT

) M2 M3 M1 M2 1.25 1.68 Slide 12 3 0.53 0.70 Ball bushing 3.34 4.25 Slide 16 7 1.53 2.11 Ball bushing 11.4 17.1 Slide l l 20 12 5.60 7.28 Ball bushing Note) For the purpose of calculating the moment, the length of the arm is the distance that is measured from the guide shaft center ( mark).

Magnetically Coupled Rodless Cylinder

Dimensions L A LA Attached from top W C PA MM Note 1) M F HB HA Note 2) Attached from bottom: MD R Body B (mm) Note 1) Note 2) B C F HA HB L LA MM MD M PA R W A Model CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 16 35 6.5 5.5 16.5 23 57 25 M4 x 0.7 M3 4 25 6 36 18 36 6.5 5.5 17 23.5 66 30 M4 x 0.7 M3 4 27 6 37 20 46 8.0 5.5 21 28.5 70 30 M5 x 0.8 M4 5 36 7 47 22.5 60 9.5 6.0 27.5 36 80 35 M6 x 1.0

Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

Compressed air 1.0MPa Fluid Max. operating pressure Min. operating pressure (1) 0.05MPa 1.5MPa Proof pressure Ambient and fluid temperature Filtration rating 5 to 60C 0.01m(95% particle size collection) Oil mist removal rate Max.0.1mg/m3 (ANR) (2) (At saturation of element oil, less than 0.01mg/m3(ANR){0.008ppm}) 2 years or when pressure drop reaches 0.1MPa Element life Note 1) With N.O.auto

Stainless Steel Heat

Assembly is required. 7 Technical Data Pressure dew point Condensed water calculation Atmospheric pressure 45 Relative humidity 100% 40 0.1MPa Amount of water in air g /m3 35 80% 60% 0.2 40% 0.3 0.4 0.5 30 0.6 0.7 0.8 25 Amount of condensed water 20% 3 8 1.0 18.2 3.0 = 15.2g/m3 20 2 3 4 1.5 15 10 5 8 7 3.0 1 6 0 5 Intake air temperature C (atmospheric pressure) Air temperature (Pressure

Microspeed Cylinder

CUX16-PS Proper tightening torque (Nm) (cylinder body) 10 16 20, 25 32 Hexagon socket head cap screw size (mm) M3 Bore size (mm) Rod seal 1 pc. CUX20-PS Gasket 1 pc. CUX25-PS 0.5410% Grease pack (10g) 1 pc. CUX32-PS M4 1.2310% Seals cannot be replaced for 10mm bore size. M5 2.5510% M6 4.0210% 2.

VP300/500/700

Remove pilot valve mounting screws (M3, 2 pcs.), rotate the pilot valve at 180 and then re-tighten the valve with the screw.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Real-time switch output Unit switching Hysteresis mode ON YES Accumulated flow l Display Real-time flow rate l/min OFF P-1 P-2 Real-time flow rate GPM gal (US) "P" Window comparator mode H : Hysteresis GPM = gal (US)/min H H Note) Fixed SI unit (l/min, l, m3 or m3x10) will be set for the type without the unit switching function.

Compact Cylinder with Lock Series CLQ

Note Holding force N (Maximum static load) Equivalent to 0.5MPa Switch mounting screw (M3 x 0.5 x 10l) 32, 40 50, 63 80, 100 BQ-2 Standard Strokes Switch spacer Switch mounting nut Standard stroke (m) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Bore size (mm) 20, 25 32, 40, 50, 63, 80, 100 Applicable switch Reed switch Solid state switch D-F7/J79 D-F7V

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

Dimensions L A LA Attached from top W C PA MM Note 1) M F HB HA Note 2) Attached from bottom: MD R Body B (mm) Note 1) Note 2) B C F HA HB L LA MM MD M PA R W A Model CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 16 35 6.5 5.5 16.5 23 57 25 M4 x 0.7 M3 4 25 6 36 18 36 6.5 5.5 17 23.5 66 30 M4 x 0.7 M3 4 27 6 37 20 46 8.0 5.5 21 28.5 70 30 M5 x 0.8 M4 5 36 7 47 22.5 60 9.5 6.0 27.5 36 80 35 M6 x 1.0

Pin Clamp Cylinder Series CKQ/CLKQ

Hexagon socket head cap screw Round head Phillips screw With spring washer, M3 x 0.5 x 14 L With spring washer, M3 x 0.5 x 16 L Switch mounting fitting Magnetic field resistant auto switch Mounting bracket kit number Items and number of each item Switch mounting bracket x 1 Switch mounting nut x 1 Round head Phillips screw x 1 Hexagon socket head cap screw x 2 Spring washer x 4 BQP1-

Stainless Steel Heat Exchanger Type Air Dryer Series IDUS/IDFS

Assembly is required. 7 Technical Data Pressure dew point Condensed water calculation Atmospheric pressure 45 Relative humidity 100% 40 0.1MPa Amount of water in air g /m3 35 80% 60% 0.2 40% 0.3 0.4 0.5 30 0.6 0.7 0.8 25 Amount of condensed water 20% 3 8 1.0 18.2 3.0 = 15.2g/m3 20 2 3 4 1.5 15 10 5 8 7 3.0 1 6 0 5 Intake air temperature C (atmospheric pressure) Air temperature (Pressure

Uniaxial Electric Actuator Series LJ1

M1 W 10 50 100 L1 10 30 20 0 0 2 4 6 8 10 0 1 2 3 4 5 Work load (W) kg Work load (W) kg Work load (W) kg 300 30 150 L2 200 20 M2 100 L2 mm L2 mm L2 mm W 100 10 50 L2 M2 0 10 30 20 0 1 2 3 4 5 0 2 4 6 8 10 Work load (W) kg Work load (W)kg Work load (W) kg 30 300 150 a=500 a=500 a=500 Horizontal/Lateral a=1000 a=1000 a=1000 20 200 100 a=2000 a=2000 L3 mm L3 mm L3 mm a=2000 L3 100 10 50 W M3

MXW Series Long Stroke Slide Table

Torque Recommended torque in lbf (N m) Hexagonal wrench width across flats Type Fixing thread size 1.5 5.3 (0.6) MXW 8 M3 x 4 1.5 5.3 (0.6) MXW12 M3 x 4 1.5 MXW16 M3 x 4 5.3 (0.6) 2 MXW20 M4 x 5 7.1 (0.8) 2.5 MXW25 M5 x 6 8.9 (1) 139 MXW Series Long Stroke Slide Table Operation Guide Maximum dynamic load and allowable moments are different depending on work mounting orientation,cylinder

Compact Cylinder with Air Cushion Series RQ

Auto switch mounting screw (M3 x 0.5 x 10l) Auto switch spacer Auto switch mounting nut 4 Series RQ Dimensions/20, 25 Refer to pages 12 and 13 for proper auto switch mounting positions and height.

Compact Cylinder with Air Cushion and Lock Series RLQ

Auto Switch Mounting Direct mount Rail mount Watchmakers screw driver Auto switch mounting screw (M3 x 0.5 x 10l) Set screw Auto switch spacer Auto switch D-A9 D-F9 Auto switch mounting nut When tightening the mounting screw, use a watchmakers screw driver with a handle about 5 to 6 mm in diameter. Tighten with a torque of 0.10 to 0.20 Nm.

3 Position Cylinder Series RZQ

Switch mounting screws (M3 x 0.5 x 10l) Switch spacer 32, 40 50, 63 Manufacture of intermediate strokes BQ-2 Method Spacers installed in standard stroke body. Switch mounting nut Ordering Refer to standard part number and ordering on page 1.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations