60

SUP. 3 1 2 3 1 2 3 1 2 E Padlock mounting position D C SUP J 2 2 x K A T IN OUT AA 3 L 2 x P1 (Port size) B V BB U Built-in silencer (Option) M (Width across flats) 3 N P2 (Port size) Q EXH Y Bracket (Option) R S X W Dimensions (mm) Standard specifications Model P1 P2 A B C D E F G H I J K L M 1/8, 1/4 1/4, 3/8 1/8 1/4 3/8 1/2 1/2 66.4 80.3 104.9 110.4 134.3 22.3 29.4 38.5 42 53 40 53 70

C95

16.5 23 45 80 21 25 20 102 37 40 G 1/4 22 95 169 81 18 72 150 19 33 45 D100 21 30 20 116 37 40 G 1/4 25 114 189 96 20 89 170 19 37.5 55 T ZZ GE GF J MB K N S V GR MM P Q H VA W Bore size (mm) -X 32 34 216 88.5 18.3 M6 x 1 4 6 27 164 6.5 4 M10 x 1.25 G 1/8 37 48 13 6.5 40 39.5 240 96.5 19.5 M6 x 1 4 6.5 27 182 8 4 M12 x 1.25 G 1/4 41.5 54 16.5 9 2050 47 268 111.2 22.4 M8 x 1.25 5 8 31.5 195

Ionizer

Bar length (mm) IZS31-E3 IZS31-E3 IZS31-E4 IZS31-E5 1 300 30 1 380 1 1 620 80 1 1 780 L 1 3 1100 3 1 1260 2 2 1500 Part no L 5 1 1900 IZS31-E3 IZS31-E4 IZS31-E5 200 4 2 2300 280 360 The model number requires the suffix -X14 to indicate that the body is to be shipped fitted with a security cover. IZS31 Standard part no.

AMG

Model AMG250 AMG350 AMG450 AMG550 AMG650 AMG850 AMG150 (1) Flow rate (l /min (ANR)) 750 1500 2200 3500 6000 12000 300 Port size (Nominal size B) 1/8, 1/4, 3/8 1/4, 3/8, 1/2 3/8, 1/2, 3/4 1/2, 3/4, 1 3/4, 1 1, 11/2 11/2, 2 Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note 1) Max. flow is at 0.7MPa. Max. flow depends on operating pressure.

MK

1 !2 !3 No. !4 !5 !6 !7 !8 !

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

M5 AS 1 000 Body size Lock nut option Nil J (3) 1 2 3 4 5 M3, M5 standard Hexagon lock nut Round lock nut 1 8 1 4 , standard standard standard standard 8 3 Note 3) Only for AS1000 2 1 Option H (1) 2 1 High temperature (5 to 80C) Thread type Low temperature (30 to 60C) L (2) Note 1) AS5000 is available as special. AS1000 is not applicable. Note 2) AS1000, AS2000 are not applicable.

Air Cylinder Series MB

X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 27 27 31.5 31.5 38 38 1/8 1/4 1/4 3/8 3/8 1/2 84 84 94 94 114 114 4 4 5 9 11.5 17 6.5 9 10.5 12 14 15 135 139 156 156 190 190 to 500 to 500 to 600 to 600 to 800 to 800 19.5 27 32 32 37 37 10 14 18 18 22 26 With rod boot (mm) f l 901 to 1000 h Bore size (mm) e 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700

Suction cups with flange

ZXP7-PFL1 (1) (2) (3) (4) (5) -X1 Applicable cups Cup part numbers Cup with adapter Adapter unit Vacuum inlet: Cup unit Male thread M6x1 (5) (1) (3) (4) (2) Cup Cup Cup Cup Attachment Weight by cup material (g/cup) series form material diameter Part number N U F S/SF NBR (Urethane (FKM (Silicone ZP 08 U ZPT08U-A6 4 4 4 4 ZP08U ZP 08 B ZPT08B-A6 4 4 4 4 ZP08B ZPT1-A6 ZP 10 UT ZPT10UT-A6

CC

C J G5-S Air-hydro Converter: CCT40 CV MVGQ 50 M32 x 2 Lube-plug CC Rc 1/4 Air port size RB J D-X 20Rc 1/4 Oil port size Data L Dimension (Effective oil level stroke) (mm) Effective oil level stroke (mm) 50 100 150 200 300 L 213.5 263.5 313.5 363.5 463.5 10-17-9 10 Valve Unit Series CCVS/CCVL How to Order CCV S 1 1 1 U1 Suffix S Single valve Valve unit size Unit for CC63 (Unit mounted to

VCC

VCKK1209-02F VCKK1008-02F VCKK1075-02F VCKK0806-02F VCKK0604-02F Symbol F G H J K Part no.

SFOD-OMT0009CN

(INx) (b)DRIVE ONNo.1(OUTx ) (c)BUSY ONINP OFF() (d)No.1 AREA ON(150mm ) (e)BUSY OFFINP ON(No.1 ) (f)No.2(INx) (g)DRIVEONNo.2((OUTx ) (h)AREA OFFBUSY ONINP OFF() (i)No.2 AREA ON(170mm ) (j)No.2 AREA OFF(130mm ) (k)BUSY OFFINP ON(No.2 ) -50mm No.1 ( 200mm1 150mm2 250mm) No.2 ( 100mm1 130mm2 170mm) No.1 No.2 No.

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

0 RL T TB +0.03 0 R RH 10 10 Detail of part U QL Q (n-1) x Q -Mounting reference planes D B PR PR max18 B B PH PH Type of centralized piping on one side without switch rail Type of shock absorber (Only for MXY12) FH M LA L JH FW J MA HR HA MB F H MM FL Model M5 x 0.8 (Width across flats 2.5) MXY6 M3 x 0.5 28 32 8.5 24 60 0.5 18 3 21.5 2 20 4 12 M6 x 1 (Width across flats 3) M8 x 1 (Width

•

Note) The above does not appty 1 0 analog output types. Series ZSE48/ISE4DB (mm) Dimensions Standard Type 4 M4X07 20 30 25 5 6 8 5 / dePlh 5.5 I ~i" ~1 I I I .. -# I f-ri: ~ It: ~\I I II 0 '" !~ \'\1 ~/I I~ j 'l OI :A(PT)Y. T1 NPTF Ya PipIng port / I M5XO 8 "eplh 5/ I 8 ~~ With Bracket A I 30 ~ o ~ I I ::1 ';!1 rl .J '1'1..

JXCx-OMT0001CN

(170mm ) (j)No.2 AREA OFF(130mm ) (k)BUSY OFFINP ON(No.2 ) -50mm No.1 (.200mm 1: 150mm 2: 250mm No.2 .100mm 1: 130mm 2: 170mm No.1 No.2 No.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Indicator/Pilot port direction XMA Rear flange surface XYA Symbol Nil A F J K M Rear flange surface Indicator Without indicator Pilot port direction Indicator Without indicator Pilot port direction Symbol Nil A F G J K L M Right flange surface Left flange surface Right flange surface Left flange surface Rear flange side Rear flange side Left flange surface Right flange surface Left flange

End Lock Cylinder Series CBG1

P 2-TC TD D I E 0 -0.05 0 -0.05 E AL TE 2-TC K F TA DL2 TF TG A S + Stroke H NA F ZZ + Stroke Section TA With non-locking type manual override (suffix N) With locking type manual override (suffix L) HN HR MO RF WL WL KA 0.1 C 8-J NA (mm) Stroke range Bore size (mm) A AL B1 C D DL2 E F GA GB H H1 HR HN (max.)

VFS2000, body ported and base mounted valves, Thread type: Rc(PT), Port sizes: 1/8, 1/4, Maximum operating pressure: 9.9kgf/cm2, Ambient and fluid temperature: -10 to 60 C, Manual override: non locking push style, VFS2200-5FZ-01N, VALVE, VFS2000 SOL VALVE 4/5 PORT, NE, VFS2000 BASE MT 1/8, 1.03617 lb

Compressed Air Preparation Filter

Dimensions [mm] Auto drain (1.0 MPa) Auto drain (1.6 MPa) Drain guide B C D E F G Bracket related dimensions Model Port size A H I J K L M N O P AFF70D, AM70D, AMD70D 1, 1 1/2 391.5 379.5 382 31.5 144 136 68 23 40 124 82 48.4 90 18 9 16 10 2.6 AFF80D, AM80D, AMD80D 1 1/2 404 392 394.5 38 170 160 80 23 40 148 93.5 58.5 110 22 11 20 12 3.2 AFF90D, AM90D, AMD90D 1 1/2, 2 470 458 460.5 38 170

Process Valve

size: 32A, 40A, 50A Applicable cable O.D. 6 to 8 (D, DL) Pg9 Pilot port 12 (P1), 10 (P2) Port size: refer to table below Manual override (Non-locking push type) G (Air operated) H (Grommet: G) I (DIN terminal: D, DZ) P1 P2 F E D A B B C A J Main port 1 (A) (Back side 2 (B)) Port size: refer to table below Main port 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H I J Model VNA5-32A VNA6

Brake mechanism added

Black 0 V G Shield Connector pin arrangement A phase output pulse G A DB phase output pulse F B H E D C -X Counter value 0 1 2 3 4 3 2 1 699