CXWM/CXWL

Table (2) Housing Mounting Style with Auto Switch (CDBXW -) Component Parts for Mounting Switches and No. of Component Parts M L 10 16 20 25 32 Assembly model no. for mounting switch Component parts Material CDBXW 10MM L CDBXW 16MM L CDBXW 20MM L CDBXW 25MM L CDBXW 32MM L 1 1 1 1 Magnet mounting block ass'y Aluminum alloy 1 1 1 1 1 Aluminum alloy Switch mounting rail 2 Spacer Mounting block

5

119 12 12 1/8 12.5 12.5 M5 x 0.8 32 79 11 11 121 12 12 1/8 10.5 10.5 1/8 40 87 12 12 139 13 13 1/8 13 10 1/8 Up to 1500 50 102 13 13 162 14 14 1/4 14 14 1/4 63 102 13 13 162 14 14 1/4 14 14 1/4 80 122 196 20 20 3/8 17.5 17.5 3/8 100 122 196 20 20 1/2 17.5 17.5 1/2 Female Rod End (mm) Bore size A1 H MM ZZ 20 8 13 M4 x 0.7 92 25 8 14 M5 x 0.8 93 32 12 14 M6 x 1 95 40 13 15 M8 x 1.25 104

CG5-S

(mm) Connection threads Model KGY04-M5 -01 -02 KGY06-M5 -01 -02 -03 KGY08-01 -02 -03 KGY10-01 -02 -03 -04 KGY12-02 -03 -04 KGY16-03 -04 M5 x 0.8 4 R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 KGV04-M5 M5 x 0.8 4 -01 R 1/8 M5 x 0.8 KGV06-M5 M5 x 0.8 6 6 -01 R 1/8 <M5 type> <M5 type> -02 R 1/4 KGV08-01 R 1/8 8 8 -02 R 1/4 -03 R 3/8 KGV10

A

1/4 1 1/4 2.59 1-14 1/2 5/8 3/4 3/4 5/8 3/4 D I M E N S I O N S O V E R S I Z E D R O D S I N G L E D E TA C H A B L E R E A R C L E V I S M O U N T I N G T Y P E NC A1C (XB5) XD BORE (INCH) KK A AA B C D DD E EA EE FA G J M MM P ZD WF CD LR F L LF CB CW Y 6 1/8 5/16-24 200 (2) 1 1/8 2.6 1.5 1/2 2 1/2 0.3 1.26 1.06 1 2.40 6 5/8 1 3/8 3 5/8 2.09 3/4-16 7/8 3/8 3/8 1/2 1/2 5/8 3/8 3/4 3/4 1

Rotary Actuator/Vane Type

E E CRQ2X MSQX L L MRQ K K D B C G G D B C N N 1 M T T M 25.5 (34.5: Connector type) 2 x R Auto switch 2 x R Y Y Auto switch W W1 Size: 20, 30 Size: 40 W W 2 67 8 8 15 32.5 When D-M9m is used 65 4 *1.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Rod End Lock: -R Bore size (mm) WH W P WA WB 20 30 M5 x 0.8 16 15(16) 23 25 30 M5 x 0.8 16 15(16) 25 32 25 Rc 1/8 16 15(16) 28.5 40 20 Rc 1/8 16 15(16) 33 50 20 Rc 1/4 18 17(18) 40.5 63 20 Rc 1/4 18 17(18) 47.5 80 20 Rc 3/8 22 22 60.5 100 20 Rc 1/2 22 22 71 ( ): Denotes the dimensions for long strokes.

KR

(mm) <M5, M6> <M5, M6> A Weight (g) D P M L Model Urethane 2-applicable tubing KAU23-M5 38 9.6 15.5 34.5 9 M5 x 0.8 M6 x 1 2.2 2.2 10 38.5 3.4 2.9 11 1 8 KAU23-M6 KAU23-U01 11 3.2 9.6 KAU04-M5 39.5 M5 x 0.8 M6 x 1 4 2.2 2.2 KAU04-M6 10 11 10.4 16 36 10.4 40 4 1 8 KAU04-U01 11 4.2 4.2 K 1 4 KAU04-U02 42 16 14 KAU06-M5 42.5 M5 x 0.8 M6 x 1 39 2.2 2.2 12 KAU06-M6 43 13 M Connection thread 17

CXS

CXSL CXSM CXSL 1 1 Weight m (kg) Weight m (kg) 32 32 25 25 0.1 0.1 20 20 0 0.06 0 20 40 60 80 100 20 40 60 80 100 Overhang L (mm) Overhang L (mm) Graph V = up to 800mm/s; up to 30mm 8 Graph V = up to 1000mm/s; up to 30mm 9 2 CXSM CXSL CXSM CXSL 1 1 Weight m (kg) Weight m (kg) 32 32 25 25 0.1 0.1 20 20 0 0.04 0 0.04 20 40 60 80 100 20 40 60 80 100 Overhang L (mm) Overhang L (mm) Graph V =

ZR

Output Specifications 25 (L) 1 output NPN open collector 30 V, 80 mA or less Analog output (1 to 5 V) ZSE4 ZSE4B 26 (L) 67 (L) 1 output PNP open collector 80 mA or less 26 (L) Analog output (1 to 5 V) ZSE4E 27 (L) 2 outputs NPN open collector 30 V, 80 mA or less 67 (L) 2 outputs PNP open collector 80 mA or less 13-3-16 16 Series ZR Large Size Vacuum Module: Ejector System ZX ZR ZM ZH ZU Courtesy

•

r 140-150 16,9'8 Tube Connection Male thread Female thread 12",:18 M5XO.8,M6 x l M4 x 0.7,M5 x 0,8 Mounting Thread dia 110-1)6 M5XO.8,M6 x l M5 x 0.8,M6 x 1 12Q'9'32 M6X1,M8 x 1 M5 X0,8,M6xl ,M8 x 1.25 r ~40 150 M6Xl,M8X1 M6 x l,M8 x l ,25 Pad type Aat type FI, at with rib Deep type Bellows type Pad Oia.

CJ2

1 !

Table of Contents

VQZ N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") VQD P. 2-4-18 P. 2-4-20 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) kit C6 (6) N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-50 P. 2-4-54

Stability of suction position,

Width across flats 19 Width across flats 19 M14 x 1 M14 x 1 Width across flats 19 M5 x 0.8/ Effective thread depth 5 5 5 26.5 44.1 69.1 25 M5 x 0.8/ Effective thread depth 5 23 40.6 65.6 25 5 5 M5 x 0.8/ Effective thread depth 5 21 38.6 63.6 25 5 5 M10 x 1 M10 x 1 M10 x 1 Seal washer Seal washer A A A A A A Seal washer 31 40 31 34.5 7 38 32.5 10 5 35 32 23.3 6 Width across flats 6 44 40 29.4

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

How to Order Rated pressure range ISE20B 0 to 1 MPa ISE20B M5 L M For positive pressure For vacuum/ compound pressure ZSE20B L M M5 q w e r t y u q Rated pressure range w Output specification e Unit specification ZSE20B 0 to 100 kPa ZSE20BF 100 to 100 kPa Symbol Description Symbol Description Nil Units selection function*1 M SI unit only*2 P Units selection function (Initial value psi)*1

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

66 56 5 (58) 56.5 54.5 A, B port 26.5 20.5 13.5 11.5 13.5 SMC 9 9 18 18 M5 X 0.8 (Not applicable to standard.) 2-PE port (Rc(PT)1/4)(Rc(PT)1/4) 2-Rc(PT)1/4, 3/8 R1, R2 port M5 X 0.8 External pilot port (Only external pilot style(R)) Rc(PT)1/4, 3/8 21 21 P port (Rc(PT)3/8) (Rc(PT)3/8) 33 0 1 02 03 DIN connector (Y): VQZ325 (R)lYl 0 1 02 03 L plug connector (L): VQZ325 (R)lLl Indicator light

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

for 1/4" M5: M5 thread 53 13.8 A 2 10 Manual override 24.5 7.8 (N1, N3, N7) (M5: 5.7) Cover diameter 1.4 Cross sectional area 0.2mm2 (Lead wire length) 300 SMC 27.5 16.3 18 13.6 7 23.4 Mounting holes 41 M5 x 0.8 P port M5 x 0.8 R port R 3 P 1 10.7 9 M5 x 0.8 External pilot port 32 (Only external pilot port type(R)) L type plug connector (L): VQZ115L -N1, N3, N7, M5 M type plug connector

Hydraulic

YH2-06B YH2-08B YH2-10B YH2-03B YH2-05C YH2-06C YH2-06B YH2-10C M5 x 0.8 M6 x 1.0 25 76 60 41 32 +0.07 0 16 12.5 20 M16 x 1.5 16 M5 x 0.8 M6 x 1.0 25 76 60 41 32 +0.07 0 16 12.5 20 M20 x 1.5 16 l +0.084 0 M5 x 0.8 M6 x 1.0 31.5 90 70 50 40 20 16 20 M24 x 1.5 20 C B-series +0.1 0 M6 x 1.0 M8 x 1.25 40 145 115 75 60 E 30 20 24 M30 x 1.5 31.5 dH10 L L +0.1 0 M6 x 1.0 M8 x 1.25 40 145 115 75

MHZ2/MHZJ2

Max. screw-in depth l mm Maximum torque Nm Model Bolts M3 x 0.5 MHZ2-10 MHZ2-16 MHZ2-20 MHZ2-25 5 8 10 12 0.69 2.1 4.3 7.3 Maximum torque Nm Max. screw-in depth l mm Model Bolts M4 x 0.7 Without clearance M5 x 0.8 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 MHZ2-10 MHZ2-16 MHZ2-20 MHZ2-25 0.88 2.1 4.3 7.3 6 8 10 12 Impact load M6 x 1 Using the body through hole Hole depth mm Bore mm 11H9 17H9 21H9

High Vacuum Angle Valve

How to Order [Option] XLGV M9N 16 A 1 G L Flange size 16, 25, 40 1 q e u r t XLGV M9N 50 A 1 G L Flange size 50, 63, 80 i w y o !0 !

MG

MGPM, MGPL Common Dimensions Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW Q CV 16 20 25 25, 50, 75, 100, 125, 150, 175, 200, 250 71 58 8 8 5 30 11 8 64 M4 15 15 22 M5 x 0.8 12 M5 x 0.8 4.3 8 4.5 M5 x 0.8 40 10 19 16 78 1.5 62 10 10 6 36 10.5 8.5 83 M5 18 18 24 M5 x 0.8 13 M5 x 0.8 5.6 9.5 5.5 1/8 37.5 10.5 25 18 25, 50, 75, 100, 125, 150