VQC

M5 101 n 1 2 3 4 5 6 7 Stations D-side 8 U-side 2-Rc 3/4 3(R) port 2-Rc 1/2 1(P) port 12 20.5 43.5 77.5 95.5 2-Rc 1/8 (External pilot port) 2-Rc 1/4, 3/8, C8, C10, C12 (2(B), 4(A) port) 11.5 21.5 (6.5) 2-Rc 1/8 (Pilot EXH port) 27 31 38.7 Formulas: L1 = 25n + 106, L2 = 25n + 192 n: Stations (maximum 20 stations) n L L1 L2 20 606 692 19 581 667 18 556 642 17 531 617 16 506 592 15 481 567 14

Table of Contents

Inlet pressure 0.5 MPa Total stroke time (t) (1) Piping length SV1000: 1 m, SV2000/3000: 2 m, SV4000: 3 m Stroke (L) Speed d% d% Stroke (mm) Speed at the end Cylinder direction Vertical upward Stroke Speed controller Meter-out, Directly connected to cylinder, Needle fully open (2) Load ratio {(Load weight x 9.8) Theoretical output} x 100% Speed at the end (u) Time (s) SOL: ON(OFF) 1-2-6

Miniature Regulator Series ARJ310

6 t Zinc chromated w Electroless nickel plated Black zinc chromated Accessory Accessory IN 2 Series ARJ310 Dimensions ARJ310-01 ARJ310F-01 Approx. 31 Approx. 56 Approx. 56 Approx. 35 32 22 M12 x 1 Panel fitting dimensions 12.5/Panel thickness: 4 or less Approx. 27 19 2 2 -5.5 Approx. 57.2 8.5 Approx. 82.5 15 Applicable tube O.D. 4, 6, 5/32, 1/4 Port size Rc, NPT 1/8 2 2 1 1 Pressure gauge

ZSE40/ISE40

Only for ZSE40(F)/ISE40--30/70(L)-M, displays the input mode and the compensation value alternately. If auto shift input is not complete, zero is displayed. 16-2-20 7 Series ZSE40/ISE40 High Precision, Digital Pressure Switch Unit Set Output Type It's only subject to ZSE40(F)/ISE40--(L).

5 Port Solenoid Valve, Series VQC

M5 101 n 1 2 3 4 5 6 7 Stations D-side 8 U-side 2-Rc 3/4 3(R) port 2-Rc 1/2 1(P) port 12 20.5 43.5 77.5 95.5 2-Rc 1/8 (External pilot port) 2-Rc 1/4, 3/8, C8, C10, C12 (2(B), 4(A) port) 11.5 21.5 (6.5) 2-Rc 1/8 (Pilot EXH port) 27 31 38.7 (mm) Formulas: L1 = 25n + 106, L2 = 25n + 192 n: Stations (maximum 20 stations) n L L1 L2 20 606 692 19 581 667 18 556 642 17 531 617 16 506 592 15 481

Vacuum Pad: Ball Joint Type

width across flats 3 ZP3E 3 ZP2 ZP2V 2 A B ZP Stroke: 20 to 50 mm ZPT ZPR ZPT ZPR XT661 Dimensions: 10 mm Stroke (mm) A B C D F H I J Model ZPT20F10-01-A14 20 22 12.5 15.5 36 48.5 1 15 ZPT25F10-01-A14 50 25 28 ZPT32F10-01-A14 32 35 13 16 36.5 49 1 15.5 Additional Dimensions by Stroke (mm) H I J Stroke 20 +10 +5.5 0 30 +20 +15.5 50 +40 +60.5 +25 715 ZPT Series 10 13 16 40 50 J K J K ZPT F

Process Pump

Size Symbol SMC SMC 2 2 1 2 2 2 2 A B C 6 x 4 4 x 3 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" SMC P Panel mount union U Union : Basic size : With reducer : Basic size : With reducer Note) Check the IN/OUT side fitting size and fitting type for selecting the fitting. SMC E 2A S LQ3 LQ3 fittings Caution 1.

Precision Clean Regulator

min (ANR) Flow rate L/min (ANR) SRP1101-01 Conditions/Inlet pressure: 0.5 MPa SRP1-01 Conditions/Inlet pressure: 0.7 MPa 0.25 0.50 0.20 0.40 Outlet pressure MPa Outlet pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate L/min (ANR) Flow rate L/min (ANR) Pressure Characteristics (Representative value) Fluid: Air Initial

PSxx-OML0002CN

2 ) C ZS-38-A3 (M35 L 2 ) ZS-27-C (M38 L 2 ) + ZS-27-D (M38 L 2 ) ZS-38-3L 3 1 2m ZS-38-4L 4 2 2m ZS-38-3G 3 1 2m ZS-38-4G 4 2 2m ZS-38-5L 3 1m ZS-38-U (10 ) ZS-27-01 4mm ZS-38-C4H O 6mm ZS-38-C6H O 1/4 inch ZS-38-N7H O 4mm ZS-38-C4L O 6mm ZS-38-C6L O 1/4 inch ZS-38-N7L O -9No.PS-OML0002CN-G LCD ((OUT1),(OUT2)) LCD 4 ON/OFF ON/OFF (kPaMPa) -10No.PS-OML0002CN-G 2

VXA21/22

(P1+0.1013) l/min(ANR) Calculation by effective area Q=109.6.S.(P1+0.1013) l/min(ANR) Water How to Read the Graph In case of a flow of 2 l/min.

Dual Speed Controller with One-touch Fitting Series ASD 1

3 6 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 07, 08, 09, 10, 11 Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations ASD530F ASD630F 1500 1000 14 10,11 12 20 Flow rate (l/min (ANR)) Flow rate (l/min (ANR

ASD

(l/min (ANR)) Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Needle rotation (Turns) Needle rotation (Turns) Needle rotation (Turns) ASD530F ASD630F 1000 1500 14 20 10, 11 12 Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 12 1000 10 8 10, 11, 12 08, 09 15 500

VM

Roller Lever/VM1000-4N-01, VM1000-4NU-01 VM1100-4N-01, VM1100-4NU-01 JIS Symbol/2 port 3 port 0.5MPa supply Applicable tube T0425 TU0425, T0403, TS0425 VM1100-4N-01 VM1000-4N-01 Side piping 3 ports 2 ports VM1100-4NU-01 VM1000-4NU-01 6N F.O.F. 2.5mm P.T. 2mm O.T. 4.5mm T.T.

PF2A/PF2W

Note 1) Current consumption (No load) Weight Note 2) Port size (Rc, NPT, G) Detection type Display PF2 1.7 to 17.0 l/min 1.7 to 17.0 l/min 2 to 16 l/min 0.1 l/min 0.1 l/pulse 3% F .S. or less 2% F .S. or less 0.35 to 4.5 l/min 0.35 to 4.5 l/min 0.5 to 4 l/min 0.05 l/min 0.05 l/pulse 3.5 to 45 l/min 3.5 to 45 l/min 5 to 40 l/min 0.5 l/min 0.5 l/pulse 7 to 110 l/min 7 to 110 l/min 10 to 100

TABLE OF CONTENTS

/4 NPT 9 6 3 3/8 NPT 1 10 1/2 NPT 33 12 11 1 NPT 23 13 1 1/2 NPT 24 14 3/4 NPT 29 19 2 NPT 26 16 2 1/2 NPT 27 17 3 NPT 28 18 B Mounting Bracket In an AC appl. give full details 2 Series 20 3 Series 30 4 Series 40 5 Series 50 7 Series 70 8 Series 80 1 2WNO 2 2WNC 3 3WNC 4 3WNO 5 3WDC 6 3WMP 18 Direct Lift 2WNO 27 Direct Lift 2WNC 28 Pilot Lift 2WNC G 1/32 H 3/64 J 1/16 K 3/32 L 7/64 N 1/8

Digital Flow Switches Series PF2A

to 10.5 l/min 2.5 to 52.5 l/min 5 to 105 l/min 10 to 210 l/min 25 to 525 l/min Set flow rate range Note 1) 0.1 l/min 0.5 l/min 1 l/min 2 l/min 5 l/min Minimum set unit Note 1) Accumulated pulse flow rate exchange 0.1 l/pulse 0.5 l/pulse 1 l/pulse 2 l/pulse 5 l/pulse value (Pulse width: 50 ms) Note 1) Note 2, 3) l/min, CFM x 10-2 l/min, CFM x 10-1 Real-time flow rate Display units l, ft3

Digital Flow Switches

Maximum measured flow rate value [l/min] Maximum measured flow rate value [l/min] Minimum measured flow rate value [l/min] Part no. Minimum measured flow rate value [l/min] Part no. Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.

Digital Flow Switches, Series PF2A, Series PF2W

Maximum measured flow rate value [l/min] Maximum measured flow rate value [l/min] Minimum measured flow rate value [l/min] Part no. Minimum measured flow rate value [l/min] Part no. Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Kit How To Order: VQZ200/300 Body Ported Manifold Preferred Option Program VV3QZ 2 2 08 00T C Series DIN rail mount D None DIN rail mounting (DIN rail standard length) 2 3 VQZ200 VQZ300 Kit C Connector Number of stations 02 2 stations 20 20 stations How To Order: VQZ200/300 Body Ported Valve For Manifolding N7T VQZ 1 2 2 5 L Series Port size {2(A) port} 2 3 VQZ200 Body width 15mm VQZ300

ZX

Indicate each part number. 4 Table (2) How to Order Solenoid Valves Z L 5 ZX1-VJ114 Z L 4 2 5 ZX1-VJ3 Manual override Type of actuation Body option Light/Surge voltage suppressor Nil B Non-locking push type Locking slotted type 1 2 N.C. (Normally closed) N.O.