Table of Contents

(mm) Thread Weight g Applicable tubing A B C D E F H Model 3 2 1 M3 x 0.5 M5 x 0.8 M-3AU-2 M-5AU-2 4.5 7 9 10 3 4 5 7.7 0.9 0.7 1.5 4 2 x 1 .2 4 Thread Component Parts E D Material Brass Brass No. 1 2 3 Description Sleeve Barb fitting Gasket Note Electroless nickel plated Electroless nickel plated F K NBR, Stainless steel M B C A H Width across flats H Barb elbow: M-3ALU-2, M-5ALHU-2 D Applicable

VM

B L2 Q L1 H 1(P) 2(A) L3 L4 L5 L6 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 41 1.2 26 23 11 3.5 11 M5 M5 M5 18 29.1 16.5 VHK-B1A 29 29.1 44.5 14.5 1 27 22 16.5 26 61.6 58.2 2.0 2.0 54 51 1 8 11 41 8.6 1.2 13 3.5 18 32.6 16.5 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-01S-01S 1 8 1 8 30 32.6 65.2 57 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62

smcmaintenancepartslist

2 A-A section (port on rod end) A A-A section (port on rod end) A A A The numbers are the same as the "Construction" of the CQ2 series catalog (CAT.ES20-205). Seal Kit List Description Material Note No. Replacement Parts: Seal Kit Kit no. Contents Bore size (mm) !2 !3 !

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

WB WA View E GC GA Mounting nut Relief port M5 x 0.8 Rod end nut MM NN F Piping port 2 x M5 x 0.8 Cover surface GB Piping port M5 x 0.8 D LY LB LH LZ LX Head cover port location Axial direction (R) NB LT H NA A 2 x LC Mounting hole Y X The overall cylinder length does not change.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

2) 22.5 (Extension end adjuster) Bottom view of MXQ8L-30 13224 6.5 8 6.5 I J 5.5 8 3.5 Vacuum suction port M5 x 0.8 Max. 11 (Retraction end adjuster) 27 23 6 2 7 2 x M3 x 0.5 thread depth 4 Operating port 2 x M5 x 0.8 3H9 ( ) depth 3 +0.025 0 HA GA NN x M4 x 0.7 thread depth 8 4 3H9 ( ) depth 3 +0.025 0 A B 1 14 7 7 3.2 3.2 6.5 A B H (NN 1) x H G 12.5 12.5 5.7 5.7 A-A B-B (mm) Model F 25

Modular F.R.L. Unit

E F F E E B C Cross interface E: 4-Rc F: Without thread A D E Model Y14-M5 Y24-01 Y24-02 Y34-01 Y34-02 Y44-02 Y44-03 Y54-03 Y54-04 Applicable model AC10 Port size M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 C 14 D 25 B 16 A 23 AC20 22 40 40 40 AC25, AC30 28 48 43 49 AC40 Cautions in Mounting 36 54 48 60 62 When mounting a cross interface directly on the IN side of the lubricator, be sure to use a

MHZ2/MHZJ2

safety margin of a=4, which allows for impacts that occur during normal transportation, etc. 2 x F > mg Number of fingers When = 0.2 When = 0.1 mg F = x 4 2 x 0.2 and therefore, mg F > 2 x mg F = x 4 2 x 0.1 = 10 x mg = 20 x mg With "a" representing the extra margin, F is determined by the following formula: 10 x work piece weight 20 x work piece weight Note) Even in cases where the

3 Port Air Operated Valve Series SYJA300 1

x 0.5 (Mounting screw) M5 x 0.8 (P, A, R port) 44.5 1.8 (Breathing hole) With filter (80 mesh) 8.5 P R 6 1 1 .5 11 17 9 1.8 (Breathing hole) (P, A, R port) 1/8 42 With filter (80 mesh) Series SYJA700 Base mounted: SYJA74-01 02 Body ported: SYJA72-01 (-F) 2-3.2 25 25.5 (For manifold mounting) 12 1.5 13 A 18 1 23.5 11 M5 x 0.8 48.7 (Bracket) (Pilot port) (Pilot port) 2-3.2 M5 x 0.8 (For mounting

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Standard stroke range (mm) Long stroke range (mm) Bore size (mm) B1 A C D E F GA GB H H1 I J K KA MM NA P S TA TB TC ZZ WA WB WH W CS1 AL 30 18 22 22 30 35 35 40 40 15.5 13 17 17 19 27 27 32 41 14 8 10 12 16 20 20 25 30 2 2 2 2 2 2 3 3 12 12 12 13 14 14 20 20 10(12) 35 5 6 6 8 11 11 13 16 26 M4 x 0.7 depth 7 5 6 8 10 14 18 18 22 26 M8 x 1.25 11 11 11 12 13 13 11 M5 x 0.8 106(114) 16 15(

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

D C 2 2 A A Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B B Dimensions Dimensions (mm) (mm) D Y F A B C E A B C D E N F Model Model ZPR10F-0-B5 ZPR20F-0-B5 M5 x 0.8 1.5 39.5 12.5 10 12 10 23.4 20 22 ZPR13F-0-B5 ZPR20F-0-B8 M8 x 1.25 13 15 2 40 23.9 13 10.5 12.5

VFS

Cannot be used as a single unit. 3-8-9 10 Series VFS1000 How to Order VFS1 1 20 01 1 G Symbol Option 2 position single F: With foot bracket Thread type 1 Nil N Rc NPT NPTF G Port size 01 Rc 1 8 T 2 position double F Option 2 Mountable only for VFS1120.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Relief port (10-, 21-) Vacuum port (11-, 22-) Width across flats B1 H1 2 x NN MM MM NA 2 x Eh8 20, 25 D D Standard port Width across flats KA 45 45 1.5 A AL K Relief port (10-, 21-) H + Stroke A AL K 1.5 Vacuum port (11-, 22-) ZZ + 2 x Stroke S + Stroke F H F (mm) Female Rod End Female rod end 2 x M5 x 0.8 Relief port (10-) Vacuum port (11-) A1 20 20 20 21 H M4 x 0.7 M5 x 0.8 M6 x 1 M8 x

VZ100/300/500

VQ 2 VKF Port size M5 M5 x 0.8 VQZ Regarding VZ120, R port is a supply port.

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

/Male Thread) ZPT 20/25/32 F-B5-A10 (Without Buffer/Male Thread) M10 x 1 M5 x 0.8 Width across flats 14 Width across flats 12 M5 x 0.8 M8 x 1 5 3 20 D 3 5 Y Width across flats 16 15 D 3 3 F Width across flats 12 Width across flats 12 F Width across flats 10 Width across flats 2 Width across flats 3 3 C C 2 2 A A B B Dimensions A Dimensions A (mm) (mm) B C D F Y B C D F Model Model ZPT10F-B5

Vacuum Pad: Ball Joint Type

thread) M10 x 1 M5 x 0.8 Hexagon width across flats 14 M5 x 0.8 M8 x 1 5 Hexagon width across flats 12 3 20 D 3 5 Y Hexagon width across flats 16 15 D 3 3 F Hexagon width across flats 12 Hexagon width across flats 12 Hexagon width across flats 10 Hexagon width across flats 2 F Hexagon width across flats 3 3 C C 2 2 A A B B Dimensions Dimensions (mm) (mm) A B C D F Y A B C D F Model Model

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

) 5 9 5 1 15 (With stroke adjuster at extension end) 2.5 (With stroke adjuster at retraction end) 20 47 50 28 38 16 F 4H9 ( ) depth 3.5 +0.030 0 2 x M5 x 0.8 thread depth 8 N 35 1 x F 2 4 x M4 x 0.7 thread depth 6 4H9 ( ) depth 3.5 +0.030 0 27 M 0.5 30 32 Z ZZ (NN 1) x H G 8.5 18.5 8.5 18.5 H B A 4.2 8.5 9 9 20 1 4H9 ( ) depth 3.5 +0.030 0 5 B A NN x M5 x 0.8 thread depth 10 4H9 ( ) depth

REA/REB

CB CR A B C D F G GP GW H HA HC HR HS HT J x E Model REAR10 2 0.5 10.5 6.5 3.2 12 6.5 6 27 25.5 26 24 25 24 5 14 M4 x 0.7 x 6 REAR15 2 0.5 12 8 4.2 17 8 7 33 31.5 32 30 31 30 8.5 17 M5 x 0.8 x 7 Max.

CL

BP BP lock-up port, Unlocked when pressurized A BP BP lock-up port B With rod boot S + Stroke Long stroke 2-Rc P EA D e 4-LD Plug cap 2 positions Plug cap 2 positions Plug cap 2 positions Width across flats KA l LS + Stroke ZZ + Stroke h + l ZZ + l + Stroke Bore size (mm) Stroke range (mm) F FA GA GB GC H1 K KA LD LH J A AL B B1 BX BY C D EA EB BP Without rod boot With rod boot Up to 500

Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(, SOLENOID VALVE, 3 PORT SOLENOID VALVE, 5 lb

SMC

4.75 Vacuum suction port M5 x 0.8 5 NA-M4 x 0.7 thread depth 5 8 10 5 9.5 11 I 5.5 J 8 Maximum 11 (With stroke adjuster at retraction end) 9.5 2 Operating port 2-M5 x 0.8 4H9 depth 3.5 +0.030 0 2-M4 x 0.7 thread depth 5 HA GA 4H9 depth 3.5 +0.030 0 NN-M5 x 0.8 thread depth 10 B A 5 1 20 9 9 8.5 4.2 B A 8.5 18.5 8.5 18.5 H (NN1) x H G Section AA Section BB (mm) Model F 35 35 35 50 35 55 65