Series: 350 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: Rc, Material: L (Stainless Steel Body, FKM Seal, Class B Coil)

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

Metric size Inch size Type Elbow Universal 2 3 1 8" 5 32" 23 01 3.2 4 6 8 10 12 04 06 08 10 12 03 05 07 09 11 13 3 16" 1 4" 5 16" Control type Meter-out Meter-in 0 1 3 8" 1 2" Use 1/8" tube.

VFS

EXH port M5 x 0.8 EVS 1 8 ( ): Rc VFN 3 position double check: VFS2600-F-01 02 2 position double: VFS2200-F-01 02 3 position closed center: VFS2300-F-01 02 3 position exhaust center: VFS2400-F-01 02 3 position pressure center: VFS2500-F-01 02 2-5 mounting hole Manual override 150.5 (3 position: 158) (Non-locking) 2-5 mounting hole Manual override (Non-locking) With light/surge voltage suppressor

Micro Mechanical Valve Series VM1000

OFF 45 Max. 6 ON 44 Symbol 3 port 24.5 38 (A) 2 (A) 2 12 12 1 (P) (78.5) 50.5 14.5 3 1.5 1.5 28 5 port (A) 2 (A) 2 12 12 3 (R) 3 (R) 1 (P) 14.5 47.8 37.2 17 R port (5 port only) 3 x 1/8 44 * 0.5 MPa supply F .O.F .* 20 N T.T. 45 6 A Series VM100 Series VM100/Side Ported With bracket VM120-01-A-B VM130-01-A-B VM121-01-A-B VM131-01-A-B With bottom mounting thread VM120U-01-A VM130U-01-A VM121U

VFR

closed center: VFR630 -F(Z) 3 position exhaust center: VFR640 -F(Z) 3 position pressure center: VFR650 -F(Z) 0 1 0 1 0 1 2 position double: VFR620 -F(Z) 263 3-2.3 146 93 (Electrical entry) 45 117 A B A B 72 90 108 PE EA EB PE P Manual override 170 186 4-9 (Mounting hole) (Non-locking) G 1/2 Light/Surge voltage suppressor (For FZ) Other dimensions are the same as the single type. 3-5-97

NCQ8

/8 3 3-1/4 3-1/2 3-3/4 4 4-1/2 5 5-1/2 6 1/4-20UNC -2-1/2 2-5/8 2-3/4 2-7/8 3 3-1/8 3-1/4 3-1/2 3-3/4 4 4-1/4 4-3/4 5-1/4 5-3/4 6-1/4 1-3/4 1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2-3/4 3 3-1/4 3-1/2 4 4-1/2 5 5-1/2 1-3/4 1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2-3/4 3 3-1/4 3-1/2 4 4-1/2 5 5-1/2 2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-3/4 2-7/8 3-1/8 3-3/8 3-5/8 3-7/8 4-3/8 4-7/8 5-3/8 5-7/8 2-1/8 2-1/4 2-3/8 2

5 Port Air Operated Valve Series SYA3000/5000/7000 1

exhaust center 3 position pressure center VFA3122-01-F VFA3130-01 2 1 8 3 VFA3430-01-X1 5 Body ported Base mounted VFA3122-02-F VFA3130-02 2 1 4 3 VFA3430-02-X1 5 1 8 VFA3140-02 2 1 4 (2) 3 VFA3440-02-X1 5 VFA3140-03 2 3 8 3 VFA3440-03-X1 5 Note 1) Port size of the exhaust ports on body ported type are all 1/8.

Dual Speed Controller with One-touch Fitting Series ASD 1

Metric size Inch size With One-touch fitting 04 06 08 10 12 01 03 05 07 09 11 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT AS N ASP Bore size ASN M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AQ ASV AK ASS Needle Valve/Flow Characteristics (Inlet Pressure: 0.5 MPa) ASR ASD230F ASD330F ASD430F ASF 100 200 400 1.5

Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 1 [250 (3 Port) ø1], Port Size: 01 [1/8 (6A)], Thread: Rc, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: Foot Bracket, CE Compliance: -

VM

01 VM1000-4N-01 Side ported 3 port 2 port T.T.

AZ1000

Other than above: 3%F.S.

BP1000

Other than above: 3%F.S.

PSxx-OMM0006CN

<> [F 2] [OFF] [Err] 3 -31No.PS-OMM0006CN-E 24 [P_2] [n_2] "P""n" [P_2] [P2L][P2H] [F 2] OUT2 1 2 2 3Err[F 2]Er23Err 4OUT2OFFOFF -32No.PS-OMM0006CN-E [F 3] <> [F 3] [F 3] -33No.PS-OMM0006CN-E [F 4] <> [F 4] [F 4] -34No.PS-OMM0006CN-E OUT1 AP1 (OUT1AP1 1 AP2) OUT1 OUT1 OUT1 A1L A1H (A1L 1AP2) OUT2 P_1H_1(n_1H_1)AP2 (OUT2AP2 1) OUT2 OUT2OUT1OUT2 A2LA2H (A2L 1) P_2H_2

VM

Roller Lever/VM1000-4N-01, VM1000-4NU-01 VM1100-4N-01, VM1100-4NU-01 JIS Symbol/2 port 3 port 0.5MPa supply Applicable tube T0425 TU0425, T0403, TS0425 VM1100-4N-01 VM1000-4N-01 Side piping 3 ports 2 ports VM1100-4NU-01 VM1000-4NU-01 6N F.O.F. 2.5mm P.T. 2mm O.T. 4.5mm T.T.

Flow Control Equipment

How to Order 2 1 01 06 2 AS 1 F E S K Hexagonal lock nut Body size 2 3 4 1/8, 1/4 3/8 1/2 Sealant Applicable tube O.D.

VQZ1000/2000/3000

4 5 6 7 8 9 11 15 10 12 46 68 310 332 376 90 112 134 156 178 200 222 266 L1 L2 L3 354 244 288 75 87.5 337.5 362.5 400 137.5 162.5 175 200 225 250 287.5 112.5 375 262.5 312.5 85.5 98 348 373 410.5 123 148 173 185.5 210.5 235.5 260.5 298 385.5 273 323 How to Order Double check block 2 position 3 position/exhaust center Option VQ2000-FPG 01 01 F 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (

4/5 Port Air Operated Valve SYJA3000 Series

VGA Port size Symbol Body ported Thread type VPA Type of actuation Nil Rc G NPT NPTF Without sub-plate Nil 4 3 2 position double 2 position single 2 1 2 position single 2 position double 1/8 With sub-plate 01 F N T VPA3 2(B) (A)4 2(B) (A)4 3 position closed center 3 position exhaust center (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) 5 3 position pressure center 3 position closed center 3 position

4/5 Port Air Operated Valve Series SYJA3000 1

single 2 1 1/8 With sub-plate 01 F N T JIS Symbol Body ported 3 position closed center 1/4 With sub-plate 02 3 position exhaust center 2 position single 2 position double 5 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 How to Order Manifold Base 1 (P) 5 (R1) 3 (R2) 1 (P

E-P HYREG

k 1 0 to 10V Note 2) Not conforming to ISO1179-1. 24 V 2 4 to 20 mA 120 3 0 to 20 mA 5 1 to 5 V 67 k 10 k 6 0 to 10 V 12 V 7 4 to 20 mA 120 8 0 to 20 mA Symbol Symbol B (Bracket) F (Foot) G (Pressure gauge) N (Silencer) Body size Port size Rc Option Applicable pilot valve (4) Mounting Port 1(P), 2(A) Port 3(R) 00 M5 00 M5 01 00 01 02 00 02 03 04 M5 01 02 02 03 04 04 06 10 10 12 14 20 Without

E-P HYREG ® Series VY1 1

Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5 M5 2 1 4 R 2 1 0.11 0.16 Weight (kg) (1) 0.19 0.25 0.35 0.55 0.75 1.5 2 4 Hysteresis (2) 1% F.S. 2.5% F .S. 3% F .S. 5% F .S.