Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft type: K (mm) X W1 L1 max L3 max (mm) Shaft type L3 = Y W2 L2 max L4 max L1 = W1 = J K T J K T J K T J K T Size Size L2 1 4.5 to 14 10 10 X 3 Y 1 0.5 to 2 0.5 to 2 6.5 to 14 L1 1 L4 = L2 = Y = L2 1 5.5 to 18 15 15 X 4 Y 1.5 0.5 to 2.5 0.5 to 2.5 8 to 18 L1 1 L2 1 6 to 20 20 20 Y 1.5 X 4.5 0.5 to 3 0.5 to 3 9 to 20 L1 1 X = L2 2 8.5 to 22 30 30 Y 2 X 5 0.5 to 4 0.5 to 4 11.5

Electric Actuators

C depth 4 4H9 +0.030 0 L-M6 x 1 Depth 4 T-slot B Cross section C-C (mm) 10 4 5.5 D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model 5.8 LXSHAB50--X LXSHAB75--X LXSHAB-100--X LXSHAB-125--X LXSHAB-150--X 1 3 10.5 6.5 3.3 6.5 T-slot A dimension T-slot B dimension Note) The overall

2/3 Port Valve

P P Model Solenoid coilO Orifice size (mm) Model Port size Rc(PT) Coil: Class B, Class H VX311 0 2 4 1 8 1 4 , 1.5 VoltageO 2.2 VX312 0 2 4 AC Standard Option 100V, 200V 48V, 110V, 220V, 240V , 1 8 1 4 3 VX313 0 2 4 , 1 8 1 4 DC Standard Option 24V 12V 3 VX3234 2.2 VX3224 , 1 4 3 8 , 1 4 3 8 , 1 4 3 8 , 1 4 3 8 , 1 4 3 8 , 1 4 3 8 4 VX3244 MaterialO 2.2 VX3324 3 VX3334 Body Seal Brass, Stainless

NCA1

2 5/8 1 1/4 3/4 5/8 1 1/4 3/8-24 3.75 0 1/2 5/8 5/8 1.57 1.18 1 1/4 1 3/4 1 5/8 7 3/4 2.59 4 1/4 2.72 8 1/2 400 (4") 1 3/8 1-14 1 5/8 4.7 2 5/8 1 1/4 3/4 5/8 1 1/4 3/8-24 4.5 0 1/2 5/8 5/8 1.57 1.18 1 1/4 1 3/4 1 5/8 7 3/4 2.59 4 1/4 2.72 8 1/2 Oversized Rod-Double Single Detachable Head Side Clevis Style: NCA1C (XB5) P + Stroke Y 2-EE (NPTF) LR AA D across flats KK EA MM B CD A C FA G J

NCA1

(NPTF) CW CW LR C D across flats AA KK CD MM B CB G J WF L R LF + Stroke M E XD + Stroke ZD + Stroke A R Bore size (in) MM P ZD E EA EE F G J L LR M WF XD Y LF KK A AA B C CB CD CW D DD 150 (1.5") 5/8 2.36 6 1/4 1.43 7/16-20 3/4 2.02 1 1/8 3/8 3/4 1/2 1/2 9/16 1/4-28 2 0.3 3/8 3/8 1.26 1.1 3/4 5/8 1/2 1 5 3/4 1.71 3 5/8 200 (2") 5/8 2.4 6 1/4 1.84 7/16-20 3/4 2.6 1 1/8 3/8 3/4 1/2 1/2 9/16

PSxx-OMR0001CN

[ oFF] 57 -46No.PS-OMR0001CN-J 4 [F 0] M 2 [F 0] [Unit][] kPa Bar PSI 2 -47No.PS-OMR0001CN-J 4 [F 1] P_1 H_1 ISA3-F ON () OFF () () () ISA3-G ON () OFF () () () ISA3-H ON () OFF () () () ON() OFF() -48No.PS-OMR0001CN-J 4 2 [F 0] [F 1] [oUt1][HYS] P_1 H_1 ON ON OFF OFF 2 1 () -49No.PS-OMR0001CN-J 4 [F 2] -50No.PS-OMR0001CN-J 4 [F 6] 20R.D. 2 [F 0] [F 6] [FSt][

7

VXS 8A 1/2 10 10A 1/4 VXB 15A Stainless steel A N.O. 3/8 B Grommet 100 VAC With surge voltage suppressor 1/2 VXE C 110 VAC G H J K 3/8 D 200 VAC 4 10A C37 N.C. VXP 1/2 E 230 VAC 15 15A 3/8 Stainless steel B N.O. F VXR 24 VDC 1/2 G DIN terminal 24 VDC L M 5 20A C37 N.C. VXH With surge voltage suppressor 3/4 20 H 100 VAC C N.O. Stainless steel J 110 VAC VXF 6 25A N.C.

ZP

x M5 x 10 (J) M18 x 1.5 Width across flat 21 (Hexagon) 4 x M4 x 8 (J) (J) Width across flat 21 (Hexagon) 70 I 45 I I H 28 H G H F G 3 x M3 x 8 G E F Y F E Y E Y 3 4 4 18 40 34 C A B D C A C A B D B D Dimensions Dimensions Dimensions Model A B C D E F Model A B C D E F Model A B C D E F ZPX40HB 25-A18 ZPX40HB 50-A18 ZPX40HB 75-A18 ZPX50HB 25-A18 ZPX50HB 50-A18 ZPX50HB 75-A18 ZPX63HB 25-A18

2 Phase Stepper Motor/Without Motor Brake Series LXS

N x P (52) 28 20 U N (M6 x 1) C (5.1) 1 0.2 5 T-slot A 36: T-slot pitch 39 36 28 Body mounting reference plane 4H9 +0.030 0 6.5 27.5 C Work piece mounting reference plane Refer to Cross section C-C. depth 4 4H9 +0.030 0 L-M6 x 1 Depth 4 T-slot B (mm) Cross section C-C 10 4 5.5 D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6

LX

T-slot A dimension T-slot B dimension 6.5 T-slot B 27.5 4H9 +0.030 0 depth 4 Cross section C-C D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model LXSH2BC-50 LXSH2BC-75 LXSH2BC-100 LXSH2BC-125 LXSH2BC-150 Refer to page 301 for mounting.

NCA1

/4 1 3/4 1 3/8 7 1/2 2.34 4 1/4 2.72 8 1/4 400 (4) 1 3/4-16 1 1/8 4.7 1 1/2 1/2 1 1/4 3/4 5/8 7/8 3/8-24 4.5 0 1/2 5/8 1.57 1.18 1 1/4 1 3/4 1 3/8 7 1/2 2.34 4 1/4 2.72 8 1/4 10 Medium Duty Air Cylinder Series NCA1 Head Trunnion Type NC A1J (MT2 Mounting Style) (in) TD 0.001 0 Bore (in) MM KK A AA B C D DD E EA EE G J R TL WF Y LF P ZB 150 (1.5) 5/8 7/16-20 3/4 2.02 1 1/8 3/8 9/16 1/4-28

5

x J N K B C Width across flats B1 A H F ZZ + Stroke S + Stroke Dimensions (mm) Bore size (mm) A AL B B1 C D E F G H H1 J K KA MA MB MM N P S V ZZ 32 22 19.5 46 17 32.5 12 30 13 13 47 6 M6 x 1 6 10 16 4 M10 x 1.25 26.5 1/8 84 4 135 40 30 27 52 22 38 16 35 13 14 51 8 M6 x 1 6 14 16 4 M14 x 1.5 26.5 1/4 84 4 139 50 35 32 65 27 46.5 20 40 14 15.5 58 11 M8 x 1.25 7 18 16 4 M18 x 1.5 31 1/4 94

MXS

#4+#9) SMXS25B, #1 SMXS25B, #2 SMXS25B, #3(#3+#7) (mm) Model Z K 35 45 55 65 75 100 125 150 175 J 47 47 47 57 70 90 114 155 180 I 12 12 12 12 12 33 50 67 82 NN 2 2 2 2 3 4 5 6 7 H 45 45 45 55 35 35 35 38 40 NA 2 2 2 2 2 2 4 4 4 G 22 22 22 22 20 26 32 40 30 KA N 4 4 4 4 6 6 6 8 8 HA 45 45 45 55 35 70 70 76 80 ZZ 108 108 108 118 131 172 213 271 311 F 50 50 50 60 35 60 70 75 80 FF 40 40 40 50

Smooth Cylinder/Low Speed Cylinder

(n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 2, 4, 6, 8) With 2 pcs. (Different surfaces, Same surface), With 1 pc. 15 105 110 115 D-M9 D-M9W 15 + 40(n 2) 2 105 + 40(n 4) 2 110 + 40(n 4) 2 115 + 40(n 4) 2 With n pcs. (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) With 2 pcs.

ZP

3.5 x 7, 4 x 10 Thin section series (10 to 16) 4 Nylon tube 4 Urethane tube 4 tube 6 tube Applicable tube dia.

MXS Series Air Slide Table

0 HA GA 5H9 4 deep +0.030 0 A B NN-M6 X 1 thread 12 deep 6 1 26 5.1 9.5 10.5 10.5 A B 24 10.5 24 10.5 H (NN-1) X H G Cross section AA Cross section BB (mm) Model F 35 35 35 40 30 55 65 70 GA 16 16 16 16 51 61 109 159 KA NA 2 2 2 2 2 4 4 4 N 4 4 4 4 6 6 6 8 HA 40 40 40 50 30 70 70 70 G 16 16 16 16 21 26 39 19 H 40 40 40 50 30 35 35 35 NN 2 2 2 2 3 4 5 7 I 10 10 10 10 15 40 55 68 J 40 40 40

High Vacuum Angle Valve

XLA XLFV/With solenoid valve J XL XL XLQ XM XY M N Port P D(Pressure port) XSA K L P R XVD XGT Port R (Exhaust port) CYV (mm) (mm) J J K L M N K L M N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 Model XLFV-63 XLFV-80 XLFV-100 XLFV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 49.7 12 4 2 67 21.7 12 4 2 128.5 58 12 4 2 Other dimensions

Possible to transfer a workpiece at low-speed.

XA39 XA40 XA41 XA45 K K K XA46 Y Y Y Y Y 20, 30, 40 Y J K K, T K, T K 10, 15, 20, 30, 40 K K K K, T K Z X X, Z J J J, Z Z J 20, 30, 40 Z J 10, 15, 20, 30, 40 T J Reversed shaft, Change of double shaft length X 20, 30, 40 Reversed shaft, Change of double shaft length Combination Chart of Made to Order Chart 4.

TABLE OF CONTENTS

H 364 H 364 H 364 J 116 H 364 V 564 H 364 K 332 J 116 J 116 J 116 V 564 J 116 K 332 V 564 V 564 V 564 K 332 K 332 K 332 Table B FLOW CONFIGURATION VALVE NO.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.