Size: 02 (Size 02), Passage Symbol: FG (2 Position Double), Number of Solenoids: S (Single), Rated Voltage: 3 (24 VDC), Light/Surge Voltage Suppressor: None, Sealing Type: Metal Seal, Port Size: w/o Sub-plate, Thread: Rc

Size: 02 (Size 02), Passage Symbol: FG (2 Position Double), Number of Solenoids: S (Single), Rated Voltage: 3 (24 VDC), Light/Surge Voltage Suppressor: Z (Light/Surge Voltage Suppressor), Sealing Type: Metal Seal, Port Size: A01 (Side Ported, 1/8), Thread: F (G)

Number of Ports: 3 Port, Body Option: Side Mounting, Port Size: 02 (R 1/4), Actuator Type: 02 (One Way Roller Lever), Suffix: S (Hard Steel Roller)

Number of Ports: 3 Port, Body Option: Side Mounting, Port Size: 02 (R 1/4), Actuator Type: 02 (One Way Roller Lever), Suffix: None

Number of Ports: 3 Port, Body Option: Side Mounting, Port Size: 02 (R 1/4), Actuator Type: 02 (One Way Roller Lever), Suffix: None, Bracket: B (w/Bracket)

Number of Ports: 3 Port, Body Option: U (w/Bottom Mouinting Thread), Port Size: 02 (R 1/4), Actuator Type: 02 (One Way Roller Lever), Suffix: None

Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12, FLOW CTRL METAL BODY W/FITTING, AIRLINE EQUIPMENT, AS FLOW CONTROL, EB, AS 3/8INCH STANDARD (PT), .23851 lb

Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12, FLOW CONTROL, AIRLINE EQUIPMENT, AS FLOW CONTROL, EB, AS 3/8INCH STANDARD (PT), 0.19663 lb

Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12, FLOW CTRL METAL BODY W/FITTING, AIRLINE EQUIPMENT, AS FLOW CONTROL, EB, AS 3/8INCH STANDARD (PT), .18108 lb

Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12, SPD CNTRL METAL BODY W/FITTING, AIRLINE EQUIPMENT, AS FLOW CONTROL, EB, AS 3/8INCH STANDARD (PT), .23368 lb

Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12, SPEED CONTROLLER W/ONE TCH FTG, AIRLINE EQUIPMENT, AS FLOW CONTROL, ED, AS 3/8INCH STANDARD (NPT), .20472 lb

Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12, SPEED CONTROLLER W/ONE TCH FTG, AIRLINE EQUIPMENT, AS FLOW CONTROL, EB, AS 3/8INCH STANDARD (PT), .64998 lb

NCA1

5 1/8 2 7/8 6 1 3/8 1-14 1 5/8 2 1/4 7/8 2 13/16 5 3/4 3 1/8 6 1 3/4 1 1/4-12 2 2.375 3/8 1 1/8 3 1/16 5 3/4 3 1/8 6 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 3/16 5 3/4 3 1/8 BORE E EE(NPT) F FB G J K R TF UF 1 1/2 2 3/8 3/8 5/16 2 1 1/4 1.43 2 3/4 3 3/8 2 2 1/2 3/8 3/8 3/8 2 1 5/16 1.84 3 3/8 4 1/8 2 1/2 3 3/8 3/8 3/8 2 1 1/8 5/16 2.19 3 7/8 4 5/8 3 1/4 3 3/4 1/2 5/8 7/16 2 1/4 1 1/4 3/8 2.76

Air Cylinder NCA1 Series

/16 5 1/8 2 7/8 6 1 3/8 1-14 1 5/8 2 1/4 7/8 2 13/16 5 3/4 3 1/8 6 1 3/4 1 1/4-12 2 2.375 3/8 1 1/8 3 1/16 5 3/4 3 1/8 6 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 3/16 5 3/4 3 1/8 BORE E EE(NPT) F FB G J K R TF UF 1 1/2 2 3/8 3/8 5/16 2 1 1/4 1.43 2 3/4 3 3/8 2 2 1/2 3/8 3/8 3/8 2 1 5/16 1.84 3 3/8 4 1/8 2 1/2 3 3/8 3/8 3/8 2 1 1/8 5/16 2.19 3 7/8 4 5/8 3 1/4 3 3/4 1/2 5/8 7/16 2 1/4 1 1/4 3/8 2.76

Electric Actuator/Slider Type

3 !

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

3 !

CQ2

3 !

One-touch Fittings Series KQ2

1 S 2 0 3 1 T 2 Q K 7 1 7 . 1 2 7 1 8 2 5 . 1 3 5 . 6 3 2 2 9 4 3 2 / 1 8 / 3 S 3 0 3 1 T 2 Q K 5 . 3 3 5 . 8 3 6 . 9 3 4 2 / 1 S 4 0 3 1 T 2 Q K 2 2 5 . 7 3 0 4 9 6 32 Series KQ2 One-touch Fittings Union tee: KQ2T Inch e l b a c i l p p A .

Table of Contents

SOL. location A B A B A B A B () A B () () 0 1 2 3 4 5 6 Double Double Single SI unit A side B side 3 position A B A B B A B A B A VQC Double Double Single SI unit A side B side 3 position Stations 1 2 3 4 5 SQ The places of asterisk are not used. 3 position uses two stations for wiring.

HRX-OM-W069

Chapter 3 Serial communication . 3-1 3.1 Precautions wiring communication . 3-1 3.2 Connected explanation . 3-1 3.3 Communication specification . 3-2 3.4 MODBUS communication function . 3-3 3.5 Precautions for communication . 3-4 3.5.1 Precautions after wiring and before communication . 3-4 3.5.2 Precautions for communicating . 3-4 3.6 Setting method . 3-5 3.7 Communication sequence . 3-