VER2000/4000

VER2000 02 Series VER2000 AV AU 03 0 VER400 Series VER4000 AF Nil Thread type Pilot type Internal pilot External pilot 0 1 AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Rc Nil Port size F N G NPT T IR Without sub-plate 03 04 06 3 8 1 2 3 4 NPTF VEX AMR ITV Note

Drain Separator for Vacuum Series AMJ 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Drain cock Nil Metal bowl 2 ZL Thread type Port size Nylon bowl 6 Drain guide (Rc 1/4) 02 1/4 Nil J Rc ZY 03 3/8 F Flow: Right Left R G 04 1/2 N If ordering two options or more, indicate symbols numerically and alphabetically.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Example) ARP30K-03BE-1RY Symbol 20 30 40 Body size Description Nil K Without backflow function With backflow function With backflow function + Nil N F Rc NPT G Thread type + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) a Without mounting option With bracket With set nut (For panel mount) Mounting H + Note 1) Nil E G E1 Note 3) Without pressure gauge Square embedded type pressure

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Example) 10-ARP30K-03BE-1RY Clean room compliant, copperfree, fluorine-free, silicon-free Clean room compliant Copper-free, fluorine-free Symbol 20 30 40 Body size Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without

AMPSeries

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

AMP

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model Maximum flow capacity l/min (ANR) 1000 200 500 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 0.43 0.68 Weight kg Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less Ambient and fluid temperature 5 to 50C Filtration degree

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

N.C. 2-3-10 11 Plug-in Unit Series SQ1000 Manifold Specifications Porting specifications (4) 1 station weight (g) (4) (3) 5 station weight (g) Applicable solenoid valve Type of connection (1) Applicable station Port size Base model 1(P), 3(R) 4(A), 2(B) Port location Port size F kit: D-sub connector 1 to 12 stations 420 20 C3 (For 3.2) C4 (For 4) C6 (For 6) M5 (M5 thread) 1 to 12 stations

VHS20/30/40/50

Port size Body size Thread size Thread type Symbol N F Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 An interface part is required if a spacer or spacer with bracket shown in the table below is attached to a modular FRL.

Exhaust Cleaner for Clean Rooms AMP Series

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

Regulator AR30 to 60

AR30 Option Thread type Port size Symbol Nil B E G P Applicable models AR30 to 60 AR30 to 60 AR30 to 60 AR30 to 40 Contents With bracket With square embedded type pressure gauge (with limit indicator) Round pressure gauge (with limit indicator) Panel mount (with set nut) Metric thread (M5) Rc NPT G Nil Note 1) 1 4 02 03 04 06 10 N F 3 8 Note 2) 1 2 3 4 1 Note 1) Bracket assembly is not

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Nil C 0.4 to 4 l/min 1.8 to 20 l/min 4 to 40 l/min 04 20 40 The cable and connector are shipped unassembled.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

. 30 10, 20, 30, 40, 50, 75, 100 40 10, 20, 30, 40, 50, 75, 100 Bore size Strokes are available in 1 mm increments by installing spacers in standard stroke cylinders. 10 16 20 25 30 40 10 mm 16 mm 20 mm 25 mm 30 mm 40 mm Port thread type M thread Rc NPT G 10 to 20 Nil 25 to 40 TN TF Series MQQ is not auto switch capable.

Filter Regulator AW30, 40

04 06 1 4 3 8 Note 2) 1 2 3 4 Note 1) Bracket assembly is not mounted at the time of shipment, but rather packaged together with the filter regulator for shipment.

Compact Electric Actuator Series LG1

How to Order G LG1 05 1 Cable length 05 5m Compatible models G R Y Matsushita Electric Industrial Co., LTD Mitsubishi Electric Corporation Yaskawa Electric Corporation Cable compatibility table Model Manufacturer's No.

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

Port size Body size Thread size Port thread Symbol N F Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 An interface part is required if a spacer or spacer with bracket shown in the table below is attached to a modular FRL.

IDX-OM-W023

2805 2905 35010 Rc3/4 Rc1 10mm 1 2 kg 44 47 71 kW 7.5 11 15 1ANR 2065% 2 3 30mA 4() IDU Series 6-1 6 1 IDX-OM-W023 6 IDU8E-23 IDU11E-23 IDU15E1-23 50Hz 1.1 1.5 2.6 3/min (ANR)1 m 60Hz 1.2 1.7 2.8 0.7MPa 55 32 10 580 0.151.0MPa 240 (85%) AC100/100110V10%(4) AC200/200220V 10%(4) (2) A 1.7 3.0 3.2 (2) W 260 425 450 (3) 5A 10A R134a(HFC) AC100V/200V g 2805 2905 35010 Rc3/

PF2D

Supersonic cleaning Drying Double-packing Sensor Clean room class 1000 Shipment 381 For Deionized Water and Chemical Liquids Digital Flow Switch PF2D Series RoHS How to Order Remote Type Sensor Unit PF2D5 13 20 1 C Flow rate range Option (Refer to page 391.) 04 20 40 None e-con connector x 1 pc.

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

(Excludes power supply and output cable) Weight Power supply/Output cable 60 g e-CON (1 pc.) 2 g IO-Link type Device IO-Link version V1.1 Communication speed COM2 (38.4 kbps) Configuration file IODD file9 Communication (IO-Link mode) Minimum cycle time 4.8 ms Process data length Input data: 10 bytes, Output data: 0 bytes On request data communication Yes Data storage function Yes Event function