Body Option: 0 (Standard), Thread: Rc(PT), Style: 00 (Basic Style)

Body Option: 1 (External Pilot), Thread: Rc(PT), Style: 00 (Basic Style)

Body Option: 0 (Standard), Thread: Rc(PT), Style: 00 (Basic Style)

VPA4

VPA4154-00 3 pcs. VPA4254-00 2 pcs. XT038N-4A 1 pc.

VFR3000-OMJ0001

00 00 00) ) ) ) ( ( ( (VFR3 VFR3 VFR3 VFR3 10 10 10 10) ) ) ) ( ( ( (VFR3 VFR3 VFR3 VFR3 40) 40) 40) 40) VFR3 VFR3 VFR3 VFR3 00,VFR3 00,VFR3 00,VFR3 00,VFR3 10 10 10 10 VFR3 VFR3 VFR3 VFR3 40 40 40 40 (N.C.)N.O.3 3 B A N.C.

2/3 Port Valve

P1 P2 P1 Air operated B A B A B A Pilot Solenoid Valve Specifications VX P2 Port size Pilot solenoid valve 6A to 25A 32A to 50A VO301-00 Grommet, Conduit, DIN connector Others(Option) VNA11 VNA12 SF4--23 VN P1 P1 Grommet, Grommet terminal Conduit terminal DIN connector External pilot solenoid Electrical entry VQ B A B A AC(50/60Hz) 100V, 200V, Others(Option) 24V, Others(Option) 15% to +10%

Electric Actuator/Slider Type

Overhang: L1[mm] 1,500 Mep 1000 mm/s2 m 3000 mm/s2 1,000 L1 500 5000 mm/s2 00 5 10 15 20 Work load [kg] Based on the above calculation result, the LEFS25RA-200 is selected.

VY511, VYU5

VY1200-00-N VEX3222-5M Description E-P HYREG valve 3 position valve No. q w VE VY Exclusive controller VYU5-D G Rotary switch, Trimmer container 4-4.5 AL STOP START SEL. SW RESET RUN2 RUN1 OV SET UP 68 0.2 SET UP 7 31 BALANCE CONTROLLER VYU5-D 80 56 ERR.

Series AP3100

Manually operated type (For high pressure and high flow) Diaphragm Valve for Ultra High Purity Series AP3100 Suitable for UHP gas supply line Body material: 316L SS secondary remelt High pressure type: 20.7 MPa and 9 MPa Designed for bulk specialty gas (BSGS) delivery LOTO standard with AP3157, optional AP3125 How to Order (Inlet) (Outlet) AP31 00 2PW MV8 MV8 S Model Ports Code Maximum operating

EX600-WEN_WSV.eng

Parameter Setting Hardware Configuration (EDS file) I/O Map SWEDEN (46) 8 603 12 00 Ekhagsvgen 2931, SE-141 71 Segeltorp, Sweden (7) Set the Ethernet port Refer to the SMC website (URL https://www.smcworld.com) to obtain more detailed information about these setting above.

EXxx-OMV0028.eng

Parameter Setting Hardware Configuration (GSDML file) I/O Map SWEDEN (46) 8 603 12 00 Ekhagsvgen 2931, SE-141 71 Segeltorp, Sweden Refer to the SMC website (URL https://www.smcworld.com) to obtain more detailed information about these setting above.

ø2 One-touch Fittings Series KJ

(mm) Applicable fitting size Model KJY02-M3 KJY02-M5 2 M3 x 0.5 M5 x 0.8 KJR02-04 4 2 KJU02-00 2 KJU02-23 KJU02-04 2 Bulkhead union KJE Plug KJP Applicable tubing O.D. (mm) Model Applicable fitting size Model KJE02-00 2 KJP-02 2 2 Polyurethane tubing Series TU 2 Miniature fittings Series M

•

Detecting rod assembly . 0.025 (8S-2) 18(Exclusive plug) 88-1 0.74+ 0.10 X 1 00/ 25 +0.28+0.4 + 0.025 = 1,845kgf Conc :litIOOS OUTside, supply pressure 5kgf/ cm ~, No-load (!)

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

VO325-00(-Q) Specifications Type of actuation Direct operated type 2 position single solenoid VT325-D Air Fluid Operating pressure range 0 to 1.0 MPa 5 to 50C Ambient and fluid temperature Max. operating frequency 5 Hz Response time (1) 30 ms or less (at the pressure of 0.5 MPa) Not required (Use turbine oil Class 1 ISO VG32, if lubricated.)

CEx-OMG0106

ML2B / W1 ML2B / M1 0 0 0 0 Momentum Nm 0 0 Load N 0 Piston Speed m/s Piston Speed m/s ML2B / W2 ML2B / M2 Momentum Nm Load N Piston Speed m/s Piston Speed m/s ML2B / W3 ML2B / M3 20 10 Momentum Nm 5 Load N 3 2 1 Piston Speed m/s Piston Speed m/s ML2B / W4 Allowable Kinetic Energy 00 H or izontal M ounting 100 5 00 Ver tical M ounting 50 Load N 0 0 1 00 Load N 0 50 5 Piston Speed

LEY-OM007

/ / INC()/ / b c 2mm d e f / P.41 7.2 / P.43 7.2 g INP ON INP INP ON / P.41 7.2 h / P.41 7.2 / P.42 7.2 i 100 % 150 % LEY16A 200 % LEY25A / P.42 7.2 j 12AREA ON 12 INC ABS() No.1 148 250 AREA k INP No.0 50+20 = 70 -24- 1 -IN INPAREA a b c d e f g h i j k No. 1 2 mm/s mm mm/s^2 mm/s^2 % % mm/s % mm mm mm 0 ABS 100 100.00 3000 3000 0 0 0 100 80.00 90.00 0.50 No.00

VT325

VO325-00 VQZ VT325-T Specifications VZ Type of actuation Direct operated type 2 position single solenoid VS Air Fluid Operating pressure range 0 to 1.0 MPa 10 to 50C (No freezing. Refer to page 4-18-4.)

SMC Basic Pneumatics

l 250 225.5 305 256.7 428 323.5 21775 1089 100 340.2 390.5 390.8 352 476.2 669.2 505.s 34020 l70l Table. 6.17 Mass in kg tor cylinders trom 25 to |00 mm Dia. for a Load Ratto ot 85olo wilh 5 bar working pressure. P E E D C O N T R O L The speed of a cylinder is delined by the extra force behind the piston, above the torce opposed by the load.

Multistage Ejector (N)ZL Series

(full span) Class 3 Port exhaust 0 to 50C (32 to 122F) Housing: Polycarbonate/ABS resin Symbol Standard P V 5 Series (N)ZL Multistage Ejector Option Specifications Digital vacuum pressure switch specifications With digital vacuum pressure switch (ZSE4) ZSE4-00--X105 ZSE4B-00--X105 ZSE4E-00--X105 Part number Display Pressure setting range Maximum operating pressure LCD LED LCD with back light

PC Wiring System Series PCW

PLC Dimentions Can be directly mounted on PLC. 0 0 18.2 0 0 00 000 00 000 00 70.1 (5.2) 23.1 16.5 27.4 Models E-con type 16 point output unit can be used for mixed connection of branch output unit and PCW-EC series. Connecting branch input unit to PCW-EC is not possible. Refer to the page 58 for details.