Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

SET button decreases the value. 2 Copy setting Refer to B Copy setting function on page 14 for details.

Self-seal Fittings Series KC

28 12 6.2 6.2 14 8 34.1 15.2 14 13.0 10.5 31.1 17 33.9 35.9 40.3 43.2 10 17 38 17 18.5 24 19.5 16.5 12 40.7 20.9 20.9 22 25.5 45.7 24.8 21.3 Reference dimensions after R(PT) installation.

Series LQ3 High Purity Fluororesin Fitting

W M L H E W M 10 14 18 22 30 36 14 20 25 29 37 49 46.5 57 79 88 103 122 11 16 21 24 32 41 10 17 22.5 24.5 27 30 1/8" 1/4" 3/8" 1/2" 3/4" 1" LQ3U1A LQ3U2A LQ3U3A LQ3U4A LQ3U5A LQ3U6A 1/4 (E) (E) L

PSxx-OMV0003CN

No.7 No.8 No.8 No.9 No.10 No.11 No.12 No.13 No.14 -74No.PS-OMV0003CN-G No.

4/5 Port Air Operated Valve SYJA3000 Series

14 15 (Bracket) 2 position double: SYJA3220-M3(-F) 2 position double: SYJA3240-M5 10 9 36 7.1 2 x M3 x 0.5 (Pilot port) 10 1.8 4 A B (For mounting) 2 x 3.2 1.5 1.5 22 7 8.2 2.5 (For manifold mounting) 2 x 1.8 2 x M3 x 0.5 (Pilot port) A B 11 1.5 17.5 (For mounting) 2 x 3.2 equivalent (18.5) A B Manual override 14 36 (18.5) (21) Manual override 41.6 13.5 15 41.6 28.5 21 R2 P R1 13 R P R (

PSE200

SET button decreases the value. 2 Copy setting Refer to B Copy setting function on page 14 for details.

ZX

Combination PS ZQ Philips screw Vacuum switch ZSE3, ZSP1 Vacuum switch ZSE2 M2.5 x 63 M2.5 x 61 P3270148-39 (M2.5 x 39) PV M2.5 x 14 ZF Filter unit ZX1-F Plate A P3200150 ZP ZCU Ejector assembly AMJ 1(PV PS PD) PD PE Misc.

The VM series is a mechanical, poppet valve. Their compact size requires little mounting space. The VM series offers a wide variety of actuator styles and flow capacity up to 1.0 Cv.Fluid: air, Operating pressure: -100kPa to 1.0MPa, Effective area (Cv): 6mm 2 (0.33), Ambient and fluid temperature: -5 to 60 C (no freezing), Port size (nominal size): Rc(PT) 1/8 (6A), MECH (LIMIT) VALVE,

The VM series is a mechanical, poppet valve. Their compact size requires little mounting space. The VM series offers a wide variety of actuator styles and flow capacity up to 1.0 Cv.Fluid: air, Operating pressure: -100kPa to 1.0MPa, Effective area (Cv): 6mm 2 (0.33), Ambient and fluid temperature: -5 to 60 C (no freezing), Port size (nominal size): Rc(PT) 1/8 (6A), MECH (LIMIT) VALVE,

The VM series is a mechanical, poppet valve. Their compact size requires little mounting space. The VM series offers a wide variety of actuator styles and flow capacity up to 1.0 Cv.Fluid: air, Operating pressure: -100kPa to 1.0MPa, Effective area (Cv): 6mm 2 (0.33), Ambient and fluid temperature: -5 to 60 C (no freezing), Port size (nominal size): Rc(PT) 1/8 (6A), MECH (LIMIT) VALVE,

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Refer to Replacement Actuator (Cylinder) on page 8-16-14 about how to order . 2.

Slider Type/Ball Bushing Bearing

C Q + Stroke CY1S Shock absorber Shock absorber CY1L CY1L CY1H (mm) A B d C D EA EB FA FB G H Model CY1L15 CY1L20 CY1L25 CY1L32 CY1L40 HG HI J JK L LD GP HA HB HO HP HS HT CY1F 7.5 9.5 12 5 16.6 6 13 3 6 6.5 40 16 14 M6 x 1.0 9.5 75 5.6 65 6.5 4 38 39 25 16 9.5 9.5 16 5.2 21.6 8.5 46 18 16 M6 x 1.0 10 86 5.6 80 9 10 44 45 31 20 CYP 9.5 11 16 6.5 26.4 8 14 4 7 8.5 54 23 21 M8 x 1.25 10 86

E-P HYREG

sub-plate ITVH 02 14 03 38 04 12 4 ITVX A M5 M5 (3) (3) 1 01 18 (3) (3) 02 14 PVQ 3 02 14 03 38 04 12 VY1 VY1 VBA VBAT Body ported 5 04 12 VY1B0-X39 (5) 06 34 10 1 AP100 7 10 1 1 14 12 1 14 9 14 1 12 2 20 2 Note 3) Only bracket or foot may be mounted.

Heatless Air Dryer Series ID 1

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 14-14-6 to 14-148 for Precautions on every series. Please use the adsorbent set (refer to page 14-19-1 for Accessory/Replacement Parts) when replacing the adsorbent. HA 2.

Rotary Cylinder Series MRQ Size: 32, 40 1

(Clamp lock) MA12 x 26 ETP-K-12 CLH-12 x 18 MA14 x 28 ETP-K-14 CLH-14 x 23 Please consult with manufacturers concerning further information on specifications. Backlash Precautions The rotary motion part has a double-rack construction. The pinion gear has a hexagonal hole, and a slight clearance exists between this hole and the hexagonal flats of the piston rod.

CQM

46 10 5 69 67.5 5 33 23.3 7 40 5.5 9 7 66 35 10 M5 x 0.8 10-32UNF M6 x 1.0 1/4-20UNC 14 58 12 6 86 84.5 7 42 29.7 8 50 6.6 11 8 80 41 14 M6 x 1.0 1/4-20UNC M8 x 1.25 5/16-18UNC 19 7-5-8 9 Series CQM Compact Cylinder: Guide Rod Type Double Acting, Single Rod Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height Reed switch D-A9 Solid state switch D-M9 D-F9BAL

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Refer to Replacement Actuator (Cylinder) on page 8-16-14 about how to order . 2.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

base side B D M Stroke: S 1 5 J Z 2.4 Piping port 2-M3 x 0.5 (mm) Z S M J H F Model MXPJ6-5 44 5 37 27 38 25 MXPJ6-10 59 10 47 42 53 35 8-8-14 14 Precision Air Slide Table Series MXP Dimensions: MXP6 Piping port 2-M3 x 0.5 (Plug: M-3P) AA 42 MX 7 4 H 2.3 11.2 3 MTS 1 MY 1 0.05 D B 9.5 3.5 CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office

30

bore size Model Nominal size Pitch Center of sphere R M A B D E F G H Weight kg 20 25 32 32, 40 40 32, 40 50 50, 63 44 49.5 49.5 60 60 60 71.5 71.5 17.5 19.5 19.5 20 20 20 22 22 21 24 24 31 31 31 41 41 4.5 5 5 6 6 6 7.5 7.5 7 8 8 11 11 11 14 14 7 8 8 11 11 11 13.5 13.5 13 17 17 22 22 22 27 27 30.5 34 34 38 38 38 44.5 44.5 8 9 9 13 13 13 15 15 0.5 0.5 0.5 0.75 0.75 0.75 1 1 300 800 800 1250

Thermo-chiller

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 https://www.smcworld.com 2022 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. D-G