CXT

. 10 10 25 to 5 20 15 5 1 pc. 10 10 25 CXTl25 5 15 10 10 2 pcs. 10 15 20 CXTl 32 40 5 15 10 5 1 pc. 10 10 20 (mm) D-F7lW D-J79W D-F9BAL D-F7NT D-F79F Auto switch model D-A7l D-A8l D-A73C D-A80C D-A7lH D-A80H D-F7l D-J79 D-F7lV D-J79C Applicable model D-F7lWV D-A79W D-F7LF Number of mountings 2 pcs. 5 10 15 15 20 20 25 CXTl 32 40 1 pc. 5 5 10 15 15 20 25 3.8-10 Platform Cylinder Series CXT

MB1

114 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 13 14 15.5 16.5 19 19 47 51 58 58 72 72 4 4 5 5 5 5 M6 x 1.0 M6 x 1.0 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 6 6 7 7 10 10 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 26.5 26.5 31 31 37.5 37.5 1/8 1/4 1/4 3/8 3/8 1/2 84 84 94 94 114 114 4 4 5 9 11.5 17 6.5 9 10.5 12 14 15 135 139 156 156 190

3 Port Solenoid Valve Rubber Seal Series SY100 1

For manifold type 30, 31 Large flow type (Cv: 0.012) 1 SY1 3 A 5 L M3 : Body ported Large flow type (Cv: 0.012) 5 SY1 4 A M 1 : Base mounted 3 port Rated voltage Port size 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC Nil: Without sub-plate M3: With sub-plate Sub-plate type For manifold type S41 Large flow type (With gasket and screws) Electrical entry Manual override 24 V, 12 V, 6 V, 5 V, 3

PFxx-OMP0001CN

(UP) (SET) (DOWN) LCD (OUT1)/ OUT1OUT2 ON ON/OFF (UP) (SET) ON/OFF (DOWN) -11No.PF-OMP0001CN-F F.S. () 15 V F.S.=5[V]1[V]4[V] 1F.S.4[V]10.04[V] 15 V 15 V 420 mA ON OFF () (0100)( ) 90 () (0100) ()90ON(OFF) () 10 L/min 10 L ON OFF ON ()OFF () 0 -12No.PF-OMP0001CN-F , ,2 5 10 L/min 5 ,51050 L ON-OFF () 1 L/min ,101112 1 L/min SI SI ON-OFF ON 0 ripple -13No.PF-OMP0001CN-F

FQ1

Filtration accuracy (m) 5 10 20 40 74 105 No.

Thermo-con/Rack Mount Type

Overcurrent protector 10 A 14 A Current consumption 5 A (100 V) to 2.5 A (240 V) 9 A (100 V) to 4 A (240 V) 10 A (100 V) to 4 A (240 V) 8 A (200 V) Power consumption 440 W*1 850 W*1 900 W*2 1500 W*2 Alarm Refer to Alarm.

LV50-OMQ0002

Analogue output 1 to 5 V Output impedance 1 K Max.28 V, 80 mA Internal voltage drop 1 V max.

Multistage Ejector Series ZL112/212 1

12 V 6 V 5 V 3 V 5 6 V S R Lead wire length 0.5 (2.9) m NPN output Analog output PNP output 27 26 67 Lead wire length 0.5 (2.9) m Lead wire length 0.5 (2.9) m Not required for Nil, vacuum adapter (GN) and vacuum pressure gauge (G).

PSxx-OMU0002CN

kPa -0.1001.000 MPa / 10.0-105.0 kPa -105.0105.0 kPa -0.1051.050 MPa / 0.1 kPa 0.001 MPa 500 kPa 1.5 MPa DC1224 V10 (p-p)10 35 mA 2F.S. 1digit(253 ) 0.2F.S.1 digit 2.5F.S.(253 ) 1F.S. 2%F.S.(25) NPN PNP 2 80 mA (NPN) 28 V () 1 V (80 mA ) 1 1.5 ms (20,100,500,1000,2000,5000 ms ) 0 2 15 V 0.65 V 1 k 420 mA 2.420 mA 12 V 300 24 V 600 50 0.4 V 5 ms -75No.PS-OMU0002CN-D

ZP

Pad material Symbol Pad diameter Symbol Material GS GC 04 06 08 10 15 Conductive silicone Conductive CR 4 6 8 10 15 Pad type Type Sponge Symbol S Dimensions: Pad Unit ZP2-04S ZP2-06S ZP2-08S 5 5 5 4 1.5 3 8 4 6 ZP2-10S ZP2-15S 5 5 10 6 15 10 Adapter Mounting Dimensions If an adapter will be made by the customer, design the adapter with the dimensions shown below.

Miniature Guide Rod Cylinder Series MGJ

14.5 17 20 63.2 15 38.4 55.6 10 33.0 48.0 5 27.3 40.6 6 10 Series Variations Standard stroke (mm) Cushion Auto switch Bore size (mm) Guide rod size (mm) Series 5 10 15 20 6 10 5 6 Rubber bumper (Both sides) D-F8 MGJ Miniature Guide Rod Cylinder 6, 10 Series MGJ How to Order 6 10 F8N MGJ Miniature Guide Rod Cylinder Miniature Guide Rod Cylinder Number of auto switches Nil S 2 pcs. 1 pc.

PSxx-OMU0008CN

DC1224 V10% DC1224 V 10 DC(+) DC(-) 8 DC1224 V10% DC1224 V 10% DC(+) DC(-) 9 ( ) 10 11 -73No.PS-OMU0008CN-D No. / 5m / 12 1015 10 SI (kPaMPa) ( ) 13 SI kPa,MPa 14 15 16 FUNC 17 -74No.PS-OMU0008CN-D No. 4 m 4 m FUNC (Er13) 18 10 10 () 19 () / ( ) () -75No.PS-OMU0008CN-D 80 mA 7 F.S.(3.5F.S.) 1 1F.S. 1 -76No.PS-OMU0008CN-D ZSE20C ZSE20CF ISE20C ISE20CH () () () () SUS630SUS304

MHF2

ON: Red light emitting diode Indicator light Auto Switch Weight Table Unit: g D-F9N(V) D-F9P(V) D-F9B(V) Model Auto Switch Internal Circuits 0.5 7 7 6 lead wire length (m) D-F9N, F9NV 3 37 37 31 5 61 61 51 DC (+) Brown Main circuit switch Main circuit switch OUT Black Auto Switch Dimensions D-F9 Switch mounting screw M2.5 x 4l Slotted set screw DC () Blue 2 Indicator light D-F9P, F9PV 2.7

PFxx-OMS0001CN

DC(+) (OUT) 2 OUT2// 3 DC(-) 4 OUT1 (IN) M8 M8 IN OUT (UP) (SET) (DOWN) () OUT1OUT2 ON (1 ) (UP) ON/OFF (SET) (DOWN) ON/OFF -11No.PF-OMS0001CN-A F.S. ( 15 V F.S.=5[V]1[V]4[V] 1F.S.4[V]10.04[V] 15 V 15 V 420 mA ON OFF () (0100)() 90 () (0100) ()90ON(OFF) 0 1 atm()[nor] () 10 L/min 10 L ON OFF ON OFF 0 -12No.PF-OMS0001CN-A , , 2 5 10 L/min 5 ,51050 L ON-OFF () 1 L

Vacuum Pad

5 5 5 Width across flat 14 Width across flat 14 Width across flat 14 2 2 18 18 15 10 18 M12 x 1 M12 x 1 M12 x 1 Width across flat 14 Width across flat 14 Width across flat 14 33 Barb fitting 33 33 5 5 5 15 10 15 10 2 2 1.8 1.8 1.8 14 13 8.4 11 10 6 11.4 17 16 Vacuum Inlet Dimensions ZP3-T10B;-A12-U2 ZP3-T13B;-A12-U2 ZP3-T16B;-A12-U2 ZP3-T10B;-A12-U4 ZP3-T13B;-A12-U4 ZP3-T16B;-A12-U4 ZP3-T10B

C95Series

-(10-28 VDG) (4.5-28 voq Currenlconaump~on lOrnA .or less 12mA or less -Load vottaae 28 VOC --24 VOC (10-28 VDe) 24 v o e (1028 VDC) Max. load current or load current range 80mA SOmA 5-40 mA 5-40 mA I' Response time 1 mS or less 1 mS or less 1 mS or less I mS or less Output response -OffDefay lime -Internal voltage d~ 0.8 V or less 0.8 V or less 4 V or less 4 V or less Leak current 24 YDC

F

24 34.5 15.5 14.7 18.5 22 9 KM11-08-12-10 10 116 86 62 L5 FB N L1 L2 L3 L4 L6 P Q1 Q2 MA MB FA B Port Min Weight Model Inside Dia (g) (Inch Size) 19.5 6 10.6 5/16 65 10 18 29.5 27 40 12 16 18.5 5/32 6 22 KM11-03-09-6 19.5 5/16 10 86 10 18 29.5 27 10.6 61.5 12 16 18.5 5/32 6 30 KM11-03-09-10 21.5 3/8 6 77.8 10 19.5 31.5 30.5 13.3 48 13 17 21 1/4 7 32 KM11-07-11-6 21.5 10 13.3 3/8 104 10 19.5

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

(Output) Special functions 0.5 (Nil) 3 (L) 5 (Z) Applicable load Indicator light Type Electrical entry direction DC AC Perpendicular In-line IC circuit Z76 5 V 3-wire Grommet Yes Reed switch Z73 24 V 12 V 100 V Relay PLC 2-wire 5 V 12 V 100 V or less IC circuit Z80 No 3-wire (NPN) IC circuit 3-wire (PNP) Y7PV Y7P Y59A Y69A 5 V 12 V Lead wire length symbols: 0.5 m Nil (Ex.)

PSxx-OML0002CN

MPa 500 kPa 500 kPa 1.5 MPa 0.1 kPa 0.1 kPa 0.001 MPa DC1224 V 10(P-P)10() 40 mA NPN PNP 1 NPN PNP 2 80 mA 28 V(NPN ) 1 V (80 mA ) 2.5 ms (2010050010002000 ms ) 0.2F.S. 1 digit 0 1 () 15 V2.5F.S. 0.65 V2.5F.S. 2 1F.S. 1 k () 420 mA2.5F.S. 2.420 mA2.5F.S. 1F.S. 12 V 300 24 V 600 50 3 4 7 LCD 2 (/) 2 F.S.1 digit(253 ) ON OUT1 OUT2 IP40 050 -1060 () 3585RH

5 Port Solenoid Valve, Series VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing