Vacuum Unit Ejector / Vacuum Pump System

Replacement Parts 41 7.5. Replacement Parts for Manifold/How to Order 41 8. Maintenance 48 8.1. Maintenance 48 8.2. Replacement Procedure 50 9. Specifications 55 10. Port Layout 60 11. Exhaust/Flow Rate Characteristics 70 11.1. Ejector Exhaust Characteristics/Flow Rate Characteristics 70 11.2. Vacuum Pump System Flow Rate Characteristics 72 11.3.

Vacuum Unit Ejector / Vacuum Pump System

Maintenance 41 8.1. Maintenance 41 8.2. Replacement Procedure 42 9. Specifications 47 10. Port Layout 52 11. Exhaust/Flow Rate Characteristics 62 11.1. Ejector Exhaust Characteristics/Flow Rate Characteristics 62 11.2. Vacuum Pump Flow Rate Characteristics 64 11.3. Vacuum Release Flow Rate Characteristics 64 12. Limitations of Use 66 13. Troubleshooting 67 -1No.

DOC1020530

PA03 02: LEC-MR-RB-032 03: LEC-MR-RB-12 Set this parameter to enable the absolute position detection system. For details, refer to "LECSN-T Operation Manual, Chapter 12.

EXxx-OMA1018_Eng

Str Frunzei 29, Sector 2, Bucharest, Romania Caution SLOVAKIA (421) 41 321321 1 When handling the unit or assembling/replacing units: Do not touch the sharp metal parts of the connector or plug for connecting units. Take care not to hit your hand when disassembling the unit. The connecting portions of the unit are firmly joined with seals.

Air Fittings Fitting Series For Special Environment

N L1 L2 L3 L4 L5 L6 P Q1 Q2 M KRM12-06-02-10 KRM12-06-02-6 99 10 6 6 89 47 1 4 17 19.5 33.5 23.5 33 13.5 8.5 13 19 10 125 6 108 10 55 73 106 104 KRM12-08-03-10 KRM12-08-03-6 3 8 8 19 139 11.5 22.5 37.5 26 36.5 10 15.5 20.5 14.7 86 126 119

60

Under the New Measurement Law, products for overseas use only (SI unit type for use in Japan). 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 ) ) ) ) ) ) ) ) Options Symbol Description ) ) Nil 1 B With bracket Built-in silencer (EXH port) Handle / Bonnet material Symbol Material S A B Flame resistant PBT 3 Aluminum Built-in silencer A spacer or spacer with bracket is required if the valve is combined

MRHQ

18 6 21 9 5 5 23 34 Side A Side B 12-11-13 14 Series MRHQ Dimensions MRHQ16 A B 41 50 66.5 4-M5 x 0.8 depth 8 30 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0 -0.062 47h9 +2.2 -0.2 20.9 opened 0 -0.1 5 41 +0.03 0 3-4H9 depth 6 (one each on three sides) 4-M3 x

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange) E K (mm) Model A 86.7 114 128 163 193 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 66 84 95 121

Air Cylinder Series CA2

41 41 41 41 44 41 41.5 43 43 41 41 49 83.5 93.5 46.5 47 85.5 91 93.5 91 51.5 58.5 49 49.5 49 49.5 49 52.5 49 50 51 51 49.5 49 57.5 92 102 53.5 53.5 94 107 102 107 58.5 66 55.5 57.5 55.5 56.5 56 61 56 58.5 57.5 57.5 56.5 56 68 102.5 112.5 61.5 61 104 121 112 121 Note 2) D-A9/A9V types cannot be mounted on 50. 1104 Smooth Cylinder Series CA2Y Minimum Auto Switch Mounting Stroke (mm) 40 50

CA2

34 38.5 46.5 55 63 Hs 30 34 41 48.5 56 Ht 30.5 35 42.5 51 59 Hs 30 34 41 48.5 56 40 50 63 80 100 30 34 41 49.5 58.5 B 32 A Operating Range Bore size Auto switch model 40 8 50 7 63 9 80 9.5 100 10.5 D-Z7/Z80 D-A3/A44/A3C/A44C D-A5/A6 D-B5/B64 9 10 11 11 11 D-A59W D-B59W D-Y59/Y69/Y7P/Y7V/Y7W/Y7WV D-Y7BAL D-F5/J5/F5W/J59W/F5BAL/F5NTL D-F59F D-G5/K59/G5W/K59W/G5BAL/G5NTL/G59F D-G39/K39/G39C

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Example: M5 x 50l 4pcs.

Compact Guide Cylinder

175, 200 50.5 75.5 50.5 52.5 39 41 10 10 0 25 23 9 2.5 25 50.5 77 50.5 53.5 37.5 40.5 10 14 0 26.5 23.5 10 3 Bore size [mm] G GA GB GC H HA J K L MM ML NN OA OB OL P PA PB PW Q 100 st or less Over 100 st Nil TN TF 12 25 10 6 7 10 54 M5 12.5 12.5 17 M4 x 0.7 10 M4 x 0.7 4.3 8 4.5 M5 x 0.8 11.5 8 16 14 16 29 12.5 5.5 7.5 11.5 59 M3.5 14.5 14.5 20 M5 x 0.8 11 M5 x 0.8 4.3 8 4.5 M5 x 0.8 11.5

SMC Pneumatic Clean Series

14 C 130 121 119 114 ZZ 14 10 8 6 KA 78 79 77 77 S 16 12 10 8 D 25 18 14 12 E 2 2 2 2 F 40 32 25 20 30 22 22 18 23 0<23> 0 0 10 0 0 0 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M14 x 1.5 M6 x 1 depth 12 12 12 1/4 1/4 3/8 1/2 58 58 27 27 32 41 14<12> 14<12> 10 10 10 10 23 20 20 20 11 11 58 72 20<17> 20<17> 16 16 71 71 13 16 89 110 7 7 10 10 55 69 80 100 10 10 10 10 32 38 50 60 150 150 182 182 18

Rotary Table Series MSU

2-5.5 through Angle adjustment bolt 6 Adjustment: Max.10.2 2-M5 x 0.8 1.5 7 +0.030 0 3-4H9 long groove depth 3 ( A , B , C ) 4-M5 x 0.8 depth 10 B port A port 0.5 6g6 0.004 0.012 14h9 0 0.043 42 0 0.062 48h9 41 7 Rotary Table High Precision Type Series MSUA These drawings indicate the condition when the B port is pressurized.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

15 H1 M5 x 0.8 M6 x 1.0 L1 14 15.5 18.5 22.5 X 10.5 12 14 17.5 M8 x 1.25 M10 x 1.25 Basic Style (mm) Without auto switch With auto switch Bore size (mm) Stroke range (mm) A 25.5 25.5 29 32.5 C D E F H I K L M N OA OB Q RA RB T B 22 22 24.5 27.5 A 30.5 30.5 39 42.5 B 27 27 34.5 37.5 12 16 20 25 5 to 30 5 to 30 5 to 50 5 to 50 6 8 7 12 6 8 10 12 25 29 36 40 5 5 5.5 5.5 M3 x 0.5 M4 x 0.7 M5

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

D M E T Plain washer K B + Stroke L M A + Stroke E 20, 25 Rod end male thread H1 Rod end nut Note 2) C1 X L1 Rod End Male Thread Bore size (mm) 12 16 20 25 (mm) C1 9 10 12 15 H1 M5 x 0.8 M6 x 1.0 L1 14 15.5 18.5 22.5 X 10.5 12 14 17.5 M8 x 1.25 M10 x 1.25 Basic Style (mm) Without auto switch With auto switch Bore size (mm) Stroke range (mm) A 25.5 25.5 29 32.5 C D E F H I K L M N OA OB Q

XM, XY

flange) (mm) Model A 75.8 102.5 119 B 48 66 79 C 1 2 2 D 23.5 38 53 E 40 55 75 Fn 26 41 52 G 40.5 57 70 H 21.5 30 35 J XYH-25 XYH-40 XYH-50 100.2 130 178 494 XMH, XYH Series Glossary 2 Shaft Sealing Method 1 Seal Materials Bellows Bellows offer cleaner sealing with reduced particle generation and less outgassing.

Compact Type

2 2-8 counterbore with depth 4.3 2 2-5.5 through 2 2-9.5 counterbore with depth 5.3 2 2-6.5 through 2 2-11 counterbore with depth 6.3 2 2-6.5 through 2 2-11 counterbore with depth 6.3 2-M4 0.7 with depth 6 15 2-M5 0.8 54 19 70 52 17 8.5 42 25 5 10 2.5 20 8 9.5 38 57.5 9 2-M4 0.7 with depth 6 20 2-M5 0.8 62 24 84 60 22 11 50 29 6 12 4.5 25 10 12 45 67.5 9 2-M5 0.8 with depth 7.5

Compact Type Dual-Rod Cylinder Series CXSJ

2 2-8 counterbore with depth 4.3 2 2-5.5 through 2 2-9.5 counterbore with depth 5.3 2 2-6.5 through 2 2-11 counterbore with depth 6.3 2 2-6.5 through 2 2-11 counterbore with depth 6.3 2-M4 0.7 with depth 6 15 2-M5 0.8 54 19 70 52 17 8.5 42 25 5 10 2.5 20 8 9.5 38 57.5 9 2-M4 0.7 with depth 6 20 2-M5 0.8 62 24 84 60 22 11 50 29 6 12 4.5 25 10 12 45 67.5 9 2-M5 0.8 with depth 7.5

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 12-CY3B6 12-CY3B10 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 12-CY3B50 12-CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d C H B H 4 4 8 8 10 B 8 14 26 32 41 C 9.2 16.2