VQC

How to remove terminal block cover Loosen the 4 mounting screws (M4) and remove the terminal block cover. Mounting screw (M4) Terminal block cover M3 screw Gasket 6mm Electrical entry 2-G3/4 Step 3. How to replace the terminal block cover Securely tighten the screws to the torque shown in the table below, after confirming that the gasket is installed correctly.

MGP

X 0.7 10 12 13 15 M4 X 0.7 4.3 4.3 5.6 5.6 M5 X 0.8 6 8 10 12 58 64 83 93 8 8 9.5 9.5 13 M4 M4 M5 M5 4.5 4.5 5.5 5.5 8 8 8 10 10 13 15 18 21 18 13 15 18 21 5 5 6 6 18 22 24 30 12 16 20 25 26 30 36 42 10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200, 250 20, 30, 40, 50, 75, 100 125, 150, 175, 200 250, 300, 350, 400 46 33 11 M5 X 0.8 M5 X 0.8 M5 X 0.8 15 10 19 MGC 53 37 10.5 M5 X 0.8 M5 X 0.8

51

disassembly is required, please contact SMC.) 368 CG3 Series Air Cylinder Short Type Standard: Double Acting, Single Rod Dimensions Basic: CG3BN Bore size Stroke With rubber bumper 2 x P GA GB F Width across flats KA Female Rod End R0.5 (mm) CJ1 H1 Bore size (mm) Standard stroke A1 MM D H MM ZZ CJP 20 25 32 40 50 63 80 100 0 E 0.05 13 14 14 15 16 16 19 22 Up to 200 8 8 12 13 18 18 21 25 M4

Round Type Hydraulic Cylinder

10 10 7 5.5 5.5 6.5 M4 set screw (1 pc.) 30 10 16 22 60 46 30 12 M4 10 10 7 5.5 5.5 6.5 36 12 16 30 80 56 40 12 M5 12 13 7 9 7 10 M5 set screw (1 pc.) 44 12 24 30 88 64 43 16 M5 12 13 9 9 10 10 Y-type double knuckle joint Bracket pin 20: Y-020B 25: Y-032B 32: Y-04D 40: Y-04B 2 x D drill through RR1 RR1 C1 Chamfer NDH10 NDH10 MM C E1 E1 C1 Chamfer NZ NZ NX NX A1 A1 U1 L1 A B U1 L1 Material

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

12-CY3R6 12-CY3R10 12-CY3R15 12-CY3R20 12-CY3R25 12-CY3R32 12-CY3R40 12-CY3R50 12-CY3R63 L 34 38 53 62 70 76 90 110 118 W 20 20 25 40 40 50 60 60 70 X 10 15 18 22 28 35 40 50 60 LD 3.5 3.5 4.3 5.4 5.4 7 7 8.6 8.6 WP 9.5 13 16 19 21.5 27 32 41 47 Y 35.5 39.5 54.5 64 72 79 93 113 121 Z 66 76 94 107 117 130 148 176 188 M 3.5 4 5 5 6 7 8 10 10 MM M3 x 0.5 M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

port 6 x M4 x 0.7 thread depth 8 3 10-0.05 0 (A, B, C common view) 4-0.03 0 4-0.03 0 Open: 28, Closed: 16 18.5 18.5 2 x M4 x 0.7 thread depth 8 (Thread for mounting attachment) 7 7 5.5 5.5 With Auto Switch: MDHR2-20R 11221122MDHR2-20E port location 3 x M4 x 0.7 thread depth 8 B P.C.D.36 (Mounting thread) 57 54 60 120 120 A 45 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 13 25 25 Finger closing port

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

x 0.7 4.5 M4 x 0.7 8 3.4 3H9 3 1.5 M4 x 0.7 8 MHZ2-20D 22.4H9 12 23 M4 x 0.7 39.8 8.3 M5 x 0.8 8 M5 x 0.8 10 4.3 4H9 4 2 M5 x 0.8 10 MHZ2-25D 13 37 49.7 10.8 M6 x 1 10 M6 x 1 12 5.1 4H9 4 27.4H9 3 M6 x 1 12 M5 x 0.8 AM AL AN AP AQ AR AS AT AU AV AW AX AY AZ Model 1122112211221122+2.2 0 +0.5 +0.1 +0.5 +0.1 +0.5 +0.1 +0.5 +0.1 +0.5 0.2 +0.5 0.2 +0.5 0.2 +0.5 0.3 +2.2 0 +2.2 0 +2.2 0 +2.5 0

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(general purpose type) Dust-protected SI unit (L4) (L3) L2 (5.25) (12) 13 27 28 L1 Indicator light 63.5 23.5 10.5 (n-1) x 10.5 1.5 Manual override A A A B A B A B A B A FG + + 0V 24V SMC S E R I A L U N I T MODEL SC (SI No.EX120-STA1) 2 93.5 66 64 ERR T/R RUN (35) (5.5) 0 1 DIP SW. 4 x M4 mounting hole 61.5 4.5 Drawing shows a SC case.

Slider Type/Ball Bushing Bearing

24 40 M4 x 0.7 11 10.5 30 27 24 19 M8 x 1.0 6 40 20 3.5 16 60 17.5 85 103 77 1.0 0.5 12.5 30 60 M4 x 0.7 M8 x 1.0 8 68 26 4.3 20.5 80 PA dimensions are for split from center.

Aluminum High Vacuum Angle Valve

M4, L = 40 Note) A coating of vacuum grease (fluorinated grease: Y-VAC2) is applied to the shaft seal, scraper and O-ring o.

High Vacuum Angle Valve

M4, L = 40 Note) A coating of vacuum grease (fluorinated grease: Y-VAC2) is applied to the shaft seal, scraper and O-ring o.

RSH

Absorber Stopper ML1C REA Set screw (M4) REC RHC 3 MTS Rotatable stopper lever 4 Piping from 2 directions is possible.

RSH/RS1H

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 50 to 80 20, 32 Adjustment dial Shock absorber Stopper Stopper Set screw (M4) Set screw (M4) Set screw (M4) Adjustment dial Lever Shock absorber Stopper Lever 2.

Table of Contents

22 13 16 16 19 23 27 13 15 20 26 32 40 10 11 14 16 20 24 22 24 32 40 50 62 17 18 25 30 38 48 3 4 6 8 10 12 5 6 8 10 7 7 7 9 10 11 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 15 16.5 M3 x 0.5 depth 5 M3 x 0.5 depth 5 M4 x 0.7 depth 6 M5 x 0.8 depth 8 M5 x 0.8 depth 8 M6 x 1.0 depth 9 3.2 3.2 4.5 5.5 5.5 6.6 4 9 9 13.5 2 4.5 4.5 4.5 16.5 Note) 19 21.5 23 Without auto switch

MG

MGPM, MGPL Common Dimensions Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW 12 16 20 25 42 29 6 8 5 26 11 7.5 58 M4 13 13 18 M4 x 0.7 10 M4 x 0.7 4.3 8 4.5 M5 x 0.8 13 8 18 10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200, 250 20, 30, 40, 50, 75, 100 125, 150, 175, 200 250, 300, 350, 400 46 33 8 8 5 30 11 8 64 M4 15 15 22 M5 x 0.8 12 M5 x 0.8

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Motor LEKFS25E (102) 64 3H9 (+0.025 0 ) depth 3 Body mounting reference plane (B dimension range)1 4 x M5 x 0.8 thread depth 8.5 45 38 3.5 50 3H9 (+0.025 0 ) depth 3 [Origin]4 Origin3 (56) [54]4 Stroke 54 [(56)]4 (52) 10 A (Table traveling distance)2 52 (115.5) 65 L Cable length 250 Auto switch groove (1 row per side) 58 38 24 (4) [2]4 2 [(4)]4 (57.5) 6.5 24 Motor cable 6 48 38.5 (2.4) M4

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(general purpose type) Dust-protected SI unit (L4) (L3) L2 (5.25) (12) 13 27 28 L1 Indicator light 63.5 23.5 10.5 (n-1) x 10.5 1.5 Manual override A A A B A B A B A B A FG + + 0V 24V SMC S E R I A L U N I T MODEL SC (SI No.EX120-STA1) 2 93.5 66 64 ERR T/R RUN (35) (5.5) 0 1 DIP SW. 4 x M4 mounting hole 61.5 4.5 Drawing shows a SC case.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Tightening torque Model Thread size Be careful not to squeeze it in the wrong direction, as problems such as pin damage may occur. 10-SY3000 M2 0.8 Nm 0.16 Nm 10-SY5000 10-SY7000 10-SY9000 M3 1.4 Nm 0.8 Nm M4 M3 176 Series 10-SY Specific Product Precautions 8 Be sure to read this before handling.

Intrinsically Safe Valve

Caution Mounting screw tightening torques M3: 0.6 lbfft [0.8 Nm] M4: 1.0 lbfft [1.4 Nm] Warning When mounting a valve on the manifold base or sub-plate, etc., those mounting directions are predetermined. If mounted in the wrong direction, the equipment to be connected may malfunction.

EX600-SEN3_4_eng

(M4 x 20) Tightening torque: 0.7 to 0.8 Nm. The tightening torque at the valve side depends on the valve type. Refer to the operation manual of the corresponding valve manifold.