Process Valve

The valve element of the C.O. type, which has no return spring, is in an arbitrary position when air is exhausted through the ports 12(P1) and 10(P2). When pressurized air enters the port 12(P1) (exhaust from the port 10(P2)), the valve element opens, and it closes when pressurized air enters the port 10(P2) (exhaust from the port 12(P1)). Component Parts No.

Air Pilot Operated Series NVSA

nlfti69: 4.0 3.5 o.24) 4,0 o.28) ao x5 3.5 t0.2al e0 o.a1) 8_0 (0.53) 0.5 {0.45J {0.45} &0 o.55) 1G12 (0.9) tGl2 o.6s) to12 10.09) tGl2 (0.6q) 10-12 {0.60 1(l'12 (0.69 tG121G12 0.6s) 1G12 (0.6) 16 t2 t0.681 1915 &10 1S15 1&15 (0.8s) 13.15 0.89) VSA 4204 Z To Bnn spool lully: 3. To relom spool wllh pre33!

Process Valve

Normally closed Normally open Double acting VNB0 VNB02 VNB03 7.7 7.8 1 4 40 12 (P1) 10 (P2) 12 (P1) 6.3 6.4 2 Air operated 11.4 11.5 50 1 2 1 2 1 2 Note) The flange should be JIS B 2210 10K (ordinary type) or its equivalent. 10 (P2) Specifications VNB1 VNB12 1 4 Fluid Water/Oil/Air/Vacuum, etc. 5 to 60C Note 1) VNBA, VNB1 Fluid temperature B C 12 (P1) 12 (P1) 5 to 99C Note 1) (Water, Oil

Ionizer

x 3.4 2 x 3.4 1500 3500 0.2 0.2 20 6.6 4.8 95 69 15 4.8 23 8 98 78 14.5 7.8 8.8 10.2 10.2 13 Detection part 60 7.7 12 71 6 1 5 14 2 x 6.6 depth of counterbore, depth 5.7 (Height of screw bearing surface: 8.8) Power supply cable/IZS31-CP Semi-stripped L 60 7 (Red) 1 12 L(mm) IZS31-CP IZS31-CPZ Model 3000 10 (6.2) 3 Cable Specifications No. of cable wire 12 0.14 mm2 (AWG26) 0.48 mm Nominal

Precision Cylinder Series MTS

5 10 12 4.5 34.5 Stud bolt part number: MT-S20 Rod end nut part number: NT-015A 11.5 Width across flats 14 With end lock 3 119.5 + Stroke 137.5 + Stroke Basic type With end lock Accessories SMTS20, #1 (#1 + #2) SMTS20, #2 (#2 + #4) SMTS20, #3 7 Precision Cylinder Series MTS Dimensions/25 MTS25 Basic type 12 10 53.5 51.5 2-cushion needle Width across flats 11 7.5 6 Rod cross section 7 6

3 Port Air Operated Valve Series SYJA300 1

284 272 2 88 62 3 114 88 4 140 114 5 166 140 6 192 166 7 218 192 8 244 218 9 270 244 10 296 270 Symbol L1 L2 Symbol L1 L2 Calculation formula: L1 = 26n + 24, L2 = 26n + 12 Calculation formula: L1 = 26n + 36, L2 = 26n + 10 5-5-7 4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

10 ISO Class 8 10 10 0 L/min (ANR) ISO Class 7 ISO Class 7 10 10 Particle concentration [particles/m3] Particle concentration [particles/m3] ISO Class 6 ISO Class 6 10 10 0 L/min (ANR) 50 L/min (ANR) ISO Class 5 ISO Class 5 10 10 1000 1000 20 L/min (ANR) ISO Class 4 ISO Class 4 100 100 70 L/min (ANR) 30 L/min (ANR) 10 10 1 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0.1 0.2 0.3 0.4 0.5 0.6 Particle diameter

KB

Rc(PT)1 4 KBZ1-04 KBZ1-06 4 6 KBZ2-08 8 KBZ3-10 10 KBZ3-12 12 KBZ4-12 Rc(PT)3 8 16 Bulkhead female connector: KBE Female connector union: KBH T Connecting thread Tube O.D. Part No. Part No.

VQC

VQ4 VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Connector wiring diagram (mixed wiring) VQZ 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 VQD 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2

AC Servo Motor Driver (Pulse input type)

(Parameter initial configuration Set the recommended parameter value Operation start) *3 The travel distance of the actuator per 1 pulse should be 10 [m/pulse]. 26 - Recommended Parameter Values [LEY] LEY25/ LEY25D/ LEY32/ LEY32D/ LEYG25 LEYG25D LEYG32 LEYG32D Series Lead symbol A B C A B C A B C A B C Lead 12 6 3 12 6 3 20 10 5 16 8 4 Parameter *1,*2 Para.

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

S and Z types 24 VDC: 7% to +10% 12 VDC: 4% to +10% T type 24 VDC: 8% to +10% 12 VDC: 6% to +10% Select the DC standard type or the power saving circuit type when the valve is continuously energized for long periods of time.

Guide Cylinder Series MGG

M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13

Shock Absorbers and Rate Controls

DA L4ode s w I functian at 10% of their maximum rated energ)/ per cyc]e. t less than 1o%, a smaller rnode should lre specifed 2. Prolide a Dosit ve stop 12 in. before end of stroke in tens on and compresslon to prelent internal bottoming 3.

AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

10 units.

e-Rodless Actuator

Yes 5 V A93V A93 Grommet 12 V 100 V Relay PLC 24 V 2-wire IC circuit A90V A90 5 V,12 V 100 V or less M9NV M9N 3-wire (NPN) IC circuit 5 V 12 V M9PV M9P 3-wire (PNP) M9BV M9B 12 V 2-wire Relay PLC Yes Grommet 24 V F9NWV F9NW 3-wire (NPN) Diagnostic indication 2-color display IC circuit 5 V 12 V F9PWV F9PW 3-wire (PNP) F9BWV F9BW 2-wire 12 V . . .

Electric Actuator Triple Axis P&P Unit

Dimensions (reference drawing for assembling) 12 6 (26) 14 2-M5 x 0.8 Effective screw length 10 130 80 4-M6 x 1depth14 4-M8 x 1.25depth18 31 4H10depth5 92 5 4H10depth5 D (Stroke+145) 25 21 Stroke+191 D section detail (S=2/1) L Stroke+214 26 10 10 (92) 14 2-M5 x 0.8 Effective screw length 10 61 60 57 31 12 6 Reference plane 63.5 62.5 3 3 130 4-M5 x 0.8depth10 F-M5 x 0.8depth10 3-4H10depth5

ZQ-OM01401

ZQ 05 1U A-K15L B-EA M G -3 3-N (1) (2) (3) (4) (5) (6) (7) (8) (9) (10)(11)(12) (1) (7) 05 0.5 5) 07 0.7 M SI (kPa) 10 1.0 5) (:psi) P 5) (99 10 ) (2) (8) 1U 3M G (2m) (9) (10) (V ) 6) (3) 0 (M5x0.8) 7) K1 N.C. N.C. K 1 3.2 () K2 N.O. N.C. 6) 2 4 () J1 N.C. 3 6 () J2 N.O. 4 3.2 () 1) ()(N.C.)

Digital Flow Switches Series PF2A

set unit Note 1) Accumulated pulse flow rate exchange value (Pulse width: 50 ms) Note 1) 0.1 l/pulse 0.5 l/pulse 1 l/pulse 2 l/pulse 5 l/pulse l/min, CFM x 10-2 l, ft3 x 10-2 l/min, CFM x 10-1 l, ft3 x 10-1 Display units Real-time flow rate Accumulated flow Note 1, 2) 0 to 9 l, 0 to 9 ft3 x 10-2 0 to 9 l, 0 to 9 ft3 x 10-1 Accumulated flow range Note 1) Power supply voltage Current consumption

VP300/500/700

Select a fitting with an I.D. greater than 8 for the VP344 and the VP342; more than 10 for the VP544 and VP542, and more than 12 for VP744 and VP742 when piping length is less than 3 meters. Use an external pilot when there is a small flow outlet of the valve.