ARM10/11

block gauge pressure supply block L side L side switch block Nil A B C D E F G H J K L M N O P Q R F.R.L.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

X Z Y m3 x g x X x m2 x g Vertical mounting Mounting orientation Horizontal mounting Ceiling mounting Wall mounting Vertical mounting m1 m2 m3 m4 Note) M3 Static load (m) M1 M1 m1 x g x X m2 x g x X m4 x g x Z Static moment z y Y M2 m1 x g x Y m2 x g x Y m3 x g x Z Z M3 m3 x g x X m4 x g x Y m4 x g Note) m4 is a weight movable by thrust.

IDG

HA AT (G) (B) (D) ID (H) AMG Purge air for dehumidification AFF AM Misc.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

NPT1/8 15 14 14 8 7.5 J 12 Maximum 14.5 (With stroke adjuster at retraction end) I 15 Operating port 2 x Rc, G, NPT1/8 13 3 5H9 ( ) depth 5 +0.030 0 2 x M6 x 1 thread depth 6.5 5H9 ( ) depth 5 +0.030 0 HA GA NN x M6 x 1 thread depth 12 6 B A 9.5 11 11 1.5 30 5.1 B A 11.5 29 11.5 29 H G (NN 1) x H Section AA Section BB (mm) Model F 50 50 50 60 35 60 70 70 80 ZZ 121 121 121 131 146 185 238

RLQ

Thread Nut Rod end male thread Foot style (including mounting bolt) Front flange style (including mounting bolt) Rear flange style (including mounting bolt) Double clevis style (including pin, snap ring, bolt and flat washer) With bypass piping Calculation (example) RLQD32-20M-B Basic weight: RLQA32-20. 531 g Additional weight: Magnet . 11 g Rod end male thread . 43 g Double clevis . 145

HRX-OM-W002

G4 [ ] 18AWG G/Y G G4 [ ] 4 18AWG G/Y 18AWG G/Y 4 Inverter IV L2/N W W 2 2 [ ] 3 18AWG BK 18AWG BK BK 3 W V M V [ ] 2 18AWG BK WH 8 8 2 V G 3 L1/L U U 1 1 [ ] 1 18AWG BK 18AWG BK RD 9 9 1 U PM PUMP 5 5 (CN3) 7 7 6 6 4 4 3 3 PM PUMP 2 2 PM PUMP 1 1 16AWG G/Y G4 [ ] 2/2 G V (CN1) PM 16AWG G/Y G4 [ ] G U Standard BL BL DC Power Supply Condenser DCPS [ ] 18AWG G/Y G2 5 5 C3 18AWG BK 1 1 3 3 3

CQS

except "A", and "B".)

AR20-B to AR60-B

Set pressure range [MPa] 0.1 to 1.7 Ambient and fluid temperature [C] 5 to 60 (with no freezing) Applicable Model Applicable Model Model AR25-B AR30-B AR40-B AR40-06-B AR50-B AR60-B Model AR20-B AR25-B AR30-B AR40-B AR40-06-B AR50-B AR60-B Port size 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 r BG AR B B X430 30 03 BG q 30 AR

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

A B !

Cylinder with Lock Series CNS

Ht 56 56 34 A B 30 (33) 36 Approx. Hs Approx. Hs Auto switch Numbers in ( ) are for type D-F5LF. D-A4 D-A5/A6 G(PF)1/2 Auto switch 34.5 (compatible cable O.D. 6.8-11.5) Approx. Ht Approx. Ht A B B Approx. Hs 33 36 Auto switch A Approx.

MGP

+ Stroke A + Stroke WA Z JB 6H7 depth 10 FA FB S K E G 6H7 depth 10 With front lock 7 6 HN 10 5 6H7 DM 23 b a Section XX detail e c d End lock mechanism (Locking type manual release) T-slot dimensions (mm) 30 Bore size (mm) a b c d e With rear lock 13.3 20.3 12 8 22.5 80 15.3 23.3 13.5 10 30 100 (mm) Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA J JA JB K L 80 146.5 106.5

Compact Cylinder with Air Cushion and Lock Series RLQ

(Rail mounting) Basic weight: Mounting hole through (Type B) Unit: (g) Bore size (mm) Mounting bracket Part No.

MXW

24 84 (Plug: M-5P) Operating direction (B) (A) 7 10 13 10 13 6.5 A 14.8 30 7 24 A 15.8 Z 3 Cross section AA (N-1) x H G H 6 depth 4.5 5H9 +0.030 Bottom through-hole 3.3 NN-M4 x 0.7 thread depth 8 0 5H9 +0.030 depth 4.5 0 F E (mm) Model Z E F G H N J MXW8-25 157 55 48 47 32 3 64 MXW8-50 182 53 76 46 30 4 71 Note) Adjuster bolt (Y) shown in the section above is attached only on B type (with

MVGQ

9 to @2 20Solenoid valve with adapter assembly SYJ3 3-M VZ5 4 -M VF3 4 -M VZ3 4 -M A B A B A B A B @3 Data Note 1) Seal kit includes !9 to @2. Order the seal kit, based on each bore size.

CM2

T E BZ B L F G C D U F Screw-in Built-in One-touch fitting Boss-cut front flange FZ Cylinder stroke (mm) Boss-cut front trunnion UZ Refer to p.1.4-34 for Standard Stroke Table.

SMC Pneumatic Clean Series

Nil TN TF D With auto switch (Built-in magnet) 10 C D G 1 B N 40 150 H7B 21 C D G 1 B N 40 150 H7B Cylinder stroke (mm) Number of auto switches Mounting style Basic style Axial foot style Rod side flange style Head side flange style B L F G Reed switch Type of auto switch C73, B54 2 pcs. 1 pc.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

REC

Rear flange NN H2 2-Rc(PT)P Width across flatsB2 4-7 H1 G G Standard port Mounting hole Relieving port M5 X 0.8 Width across flats B1 I Relieving port Eh8 D FY B AL MM lNA K A FX FZ N N F S+Stroke H FT 40 Z+Stroke ZZ+Stroke Mounting hole 2-7 Standard port Relieving port B (mm) Bore size FT FX FY FZ B1 D A AL B B2 F G H E Stroke range 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 4 60 75 13 8 18

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...