SMC Corporation of America
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22 Accessories (Options) Base Integrated with Transformer Dryer Transformer E F D C A Part No.

0 00 25 50 75 100 125 150 0 0 500 1000 1500 200 400 600 800 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) AR30(K)-B Rc3/8 AR40(K)-B Rc1/2 AR40(K)-06-B Rc3/4 0.6 0.6 0.6 0.5 0.5 0.5 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0 00 0 0 1000 2000 3000 4000 5000 0 1000 2000 3000 500 1000 1500 Flow rate L

': Switch specifications Model Outp ut ~pecific.atL oQ~ Analog output ZSE6B-D-26L ZSE6B-D -27,=NPN open collector 30V, BOmA Switch . 2 output ZSE6B-D-67L PNP open collector BOmA ISE6B-0-26L Analog output 1SV(S%F,S,) ISE6B-0-27L SWlich . 2 outpu! NPN open collector 30V, BOmA ISE6B-0-67L PNP open collector SOmA Standard S speciTIcarIons '.

0 E E ,o5 5 E 1 2 3 4 lnplrl signal VDC lrpul signa VDC 1 2 3 lnput slgna! VDC Pressure Characteristics Pressure Characteristics 1 i 6 _ 102 9 s 3 o t 5 o 1000 2000 3000 4000 5000 F ow rale f/min(ANBI 20 30 40 200 400 600 400 looo Fow rale i/m n(ANF) 1 3 1 102 e7 T3 d 7 3 58 a a a 29 1 5 1 5 o 4 8 1 2 1 6 2 A 2 4 2 8 400 800 1200 1.in 2004 2400 200 400 600 800 1000 Belief flo\i/ i.

I Linearity =1cro or less I Hysteresis 0.5olo or less I Shock and vibration resistant (At fullspan) I Monitor signal output Repeatability i0.5% ElectroPneumatic Regulator ITI 02000.4000 I o r4'7 {0.01 -o.5 M5, PT,PF, NPT,I/8 .71 -14 {0.05-1 O} PT, PF, NPT 'v4,3t4,12 4-wi(e 0-5VDC, 0-10vDC Max. 12VDC Max. current Input signal svmbor Voltage InFlt lmpedan K <{-_-l -f], lmpedance tl or less

A E F -20 -10 0 10 20 30 40 50 60 0 10 20 30 40 50 60 70 80 Intake air temperature (C) Pressure dew point (C) Example) To obtain the amount of condensed water when the inlet air of a compressor is pressurized to 0.7 MPa then cooled down to 25C.

73 psi [0.5 MPa] Peak clamping force position 112 [500] 90 [400] 0.3 MPa 44 psi [0.3 MPa] 67 [300] 45 [200] 22.5 [100] 0 0 0.5 1 1.5 2 2.5 3 3.5 4 4.5 5 Shim thickness [mm] 9 CKZT -X2797 -X2798 Be sure to read this before handling the products.

-0.05 0 -0.05 E AL TE 2-TC K F TA DL2 TF TG A S + Stroke H NA F ZZ + Stroke Section TA With non-locking type manual override (suffix N) With locking type manual override (suffix L) HN HR MO RF WL WL KA 0.1 C 8-J NA (mm) Stroke range Bore size (mm) A AL B1 C D DL2 E F GA GB H H1 HR HN (max.)

0 0 0 5 10 15 0 5 10 15 20 25 0 5 10 15 20 Vertical L7 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 600 600 600 Z 400 400 400 200 200 200 Mep m 0 0 0 0 5 10 15 0 5 10 15 20 25 0 5 10 15 20 L8 Work load [kg] Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting orientation 1.

0 CE2 Operating direction IN Operating direction OUT 2.0 2.0 Clean gas filter Operating direction IN Operating direction OUT 1 ML2B 60 Clean bench (Class 100) 40 Displacement waveform C J G5-S 0.1 Supply rate 28.3 l/min Exhausted by relief port Displacement waveform 20 20 20 sec. 20 sec. 0 CV 0 Laser dust monitor (intake rate 28.3 l/min) 0.01 0.01 0.1 1 10 Particle diameter (m) Time Time

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 196 100 196 Particle concentration (particles/cf) Pressure converter Regulator (IR2000) RHC 98 98 ITV (Electro-pneumatic regulator) 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 0 0.1 0.2 0.3 0.4 MK(2) 0.5 0.6 0.7 Laser dust monitor 1 Head side supply pressure

0 100 200 300 400 500 600 700 800 900 1000 0 0 100 200 300 400 500 600 700 800 900 1000 Flow rate l/min(ANR) Flow rate l/min(ANR) ARX21-01 ARX21-02 0.35 0.35 0.30 0.30 Downstream pressure MPa Downstream pressure MPa 0.25 0.25 0.20 0.20 0.15 0.15 0.10 0.10 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 Flow rate l/min(ANR) Flow rate l/min(ANR

9 6 9 6 9 6 9 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 IN IN 0.15 0.1 0.05 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 0 MPa 0.2 Left Right Bracket Bracket Stations 3 2 1 Stations 1 2 3 IISA2CSL-3B5DLCE21 set (3 stations manifold part number) ISA2-HE41P 3 sets (Air catch sensor part number) IISA2VPR-3B5DLC1 set (3 stations manifold part number

F Catchers F Catchers Clamping force (when 0.5 MPa supplied) A A 30,000 Clamping force F (N) 25,000 T-type arms S-type arms 20,000 15,000 Generated position of clamping force F (mm) 10,000 Arm type A T200, T240, T270 S200, S240 107 5,000 0 0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 Distance H from clamp position (mm) 80 A Frame Clamp Cylinder WRF100 How to Order C T200 WRF100 Protective cover

0 +0.4 +0.2 0.2 0.4 +0.058 0 36 16 12 14 41.6 22 M14 x 1.5 +0.058 0 +0.5 +0.3 0.3 0.5 +0.058 0 44 20 16 20 50.6 28 M18 x 1.5 +0.070 0 +0.5 +0.3 0.3 0.5 +0.070 0 Knuckle pins and snap ring are included.

in the figure below. 40 Gripping force (N) Gripping force (N) 0.5 MPa 0.5 MPa 30 30 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 20 20 0.2 MPa 0.2 MPa 10 10 0 10 20 30 40 50 0 10 20 30 40 50 60 70 60 70 Gripping point L (mm) Gripping point L (mm) MHR2-30/MDHR2-30 MHR2-30/MDHR2-30 80 80 Pressure 0.6 MPa 0.6 MPa Pressure 70 70 F F 0.5 MPa 0.5 MPa Gripping force (N) Gripping force (N) 60 60 50 50 0.4 MPa

0 EX600-DX *F (16 points) 16 0 EX600-DY *B (8 points) 0 8 Digital output unit EX600-DY *E (16 points) 0 16 (EX600 Series) DY EX600-DY *F (16 points) 0 16 EX600-DM *E (8/8 points) 8 8 Digital I/O unit (EX600 Series) DM EX600-DM *F (8/8 points) 8 8 Analog input unit AX EX600-AXA*1 (2 points) 32 0 Analog output unit AY EX600-AYA*1 (2 points) 0 32 Analog I/O unit AM EX600-AMB*1 (2/2 points)

0 0 . 1 0 . 2 0 . 3 0 . 4 0 . 5 0 . 6 0 . 7 0 . 8 0 . 9 1 Differential pressure [MPa] Change in rotational torque with rotation speed Temperature rise with rotation speed 0.4 30 MQR4 MQR2 MQR1 Temperature rise [C] 0.3 Rotational torque [N.m] MQR12 MQR8 MQR8 20 MQR4 MQR2 MQR12 0.2 10 0.1 MQR1 0 0 0 1000 2000 3000 0 500 1000 1500 2000 2500 3000 Rotation speed [min-1 (r.p.m)] Rotation speed

Electro-Pneumatic Positioner How to Order Series IP8000/8100 IP8 0 0 0 000 Accessories Note 2) Type IP8000 has standard lever for stroke (10 to 85mm) Accessory for IP8000, 8100 small capacity actuator Nil A Note 3) None (Standard) 0.7 Output restriction with pilot valve 1.0 Output restriction with pilot valve Fork lever joint M Fork lever joint S For stroke 35 to 100mm with lever unit For

One-touch fitting for 1/4" One-touch fitting for 5/16" (For manifold type 20, 21) SYJ7 2 1 0 5 M 01 Body ported 2 5 0 M SYJ7 4 Base mounted Thread type Body option Nil F N T Rc G NPT NPTF Coil specifications 0: Pilot valve individual exhaust for the pilot valve Manual override Nil Standard With power saving circuit <24 V, 12 VDC only> Nil: Non-locking push type T Power saving circuit is not