Vacuum System Peripherals:

300 , 1 4 3 8 Base mounted 3 port solenoid valve Series VK Compact size: Width 18 mm Possible to use with vacuum Model Piping specifications Solenoid valve Port size Effective area (mm2) (Cv) Flow characteristics C (dm3/(sbar)) VK332 M5 x 0.8 0.47 Body ported For vacuum: VK332V M5 x 0.8 0.47 VK334 1 8 0.85 Base mounted (With sub-plate) For vacuum: VK334V 1 8 0.85 Vacuum specification:

42

C kit (Plug lead type) 6.

KJ

M5 x 0.8 M-5ALHN-6 M-5ALHU-6 Width across flats 7 M5 x 0.8 Hose Nipple: M-5H-4/-6 Effective area (mm2) Weight (g) A B C D E H Model M-5H-4 M-5H-6 7 8 2.1 4.0 2.7 3.9 15.5 16.5 8.5 9.5 7 8 1.8 2.5 6.5 8.5 M5 x 0.8 Width across flats 7 15-2-57 5 Series M Series M5 Hose Elbow: M-5HL-4/-6 Weight (g) 4.4 5.2 Effective area (mm2) 1.4 2.4 Model F E D C B A M-5HL-4 M-5HL-6 6.5 8.5 1.8 2.5 7 8 8.5

MGP

MGPM, MGPL Common dimensions (mm) Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL CV P PA PB PW Q 25, 50, 75, 100 71 58 1.5 1.5 11 8 8.5 9 M5 x 0.8 12 13 15 M5 x 0.8 4.3 5.6 5.6 M5 x 0.8 Rc 1/8 Rc 1/8 40 10 16 18 26 64 83 93 8 9.5 9.5 19 8 10 12 M4 M5 M5 4.5 5.5 5.5 8 10 10 15 18 21 5 6 6 15 18 21 30 36 42 22 24 30 16 20 25 78 62 10.5 M5 x 0.8 M5 x 0.8

Rotary Actuator

Flange Flange Rotary actuator Rotary actuator Assembly Part No.: P211060-2 (for C;RB2F;;20) Assembly Part No.: P211080-2 (for C;RB2F;;30) 6 x countersunk head screw 6 x countersunk head screw for M5 conical seat and through-hole for M4 conical seat and through-hole x x M4 countersunk head screw (3 pcs.) M5 countersunk head screw (3 pcs.)

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

B B Dimensions Dimensions (mm) (mm) D Y F A B C E A B C D E N F Model Model ZPR10F-0-B5 ZPR20F-0-B5 M5 x 0.8 1.5 39.5 12.5 10 12 10 23.4 20 22 ZPR13F-0-B5 ZPR20F-0-B8 M8 x 1.25 13 15 2 40 23.9 13 10.5 12.5 15.5 29.3 46.5 ZPR16F-0-B5 ZPR25F-0-B5 M5 x 0.8 16 18 25 28 ZPR25F-0-B8 M8 x 1.25 Dimensions by Tubing Diameter ZPR32F-0-B5 M5 x 0.8 (mm) 13 16 29.8 47 32 35 ZPR32F-0-B8 M8 x 1.25 Q: 4

Air Slide Table Series MXQ

8 (L) B 7 8 22 3 9 7.5 14.6 7 9.8 MXQ 8 (L) 15 M6 x 1 M3 x 8 M3 x 10 29.5 MXQ-AS 8( L)-X11 F 25 39.5 MXQ-AS 8 (L)-X12 E 5 23.5 G MXQ-AS12 (L) MXQ12 (L) M8 x 1 M4 x 12 M4 x 12 9.5 12 29 4 14 11 18.5 10.5 12.7 15 33.5 MXQ-AS12 (L)-X11 C 25 MXQ-AS12 (L)-X12 43.5 5 24.5 MXQ-AS16 (L) Table mounting section MXQ16 (L) M10 x 1 11 14 36 5 17 M5 x 16 M5 x 16 15 13.5 21 13 15 34.5 MXQ-AS16 (L)-X11

Air Cylinder Series CM2

CD-S02 CD-S03 20, 25 32, 40 8 19.5 0.9 1.6 24.5 7.6 Type C 8 for axis B 10 29 1.15 1.35 34 9.6 Type C 10 for axis C D d Applicable bore size d H C B D Part no.

SZ3000

sectional area mm (Cv value) PA/B 3.7(0.21) C6 A/BR 3.9(0.22) PA/B 3.4(0.19) M5 A/BR 3.2(0.18) Flat cable connector Socket: 26 pin MIL type with strain relief Complies with MIL-C-83503 Flat cable connector Socket: 20 pin MIL type with strain relief Complies with MIL-C-83503 Flat cable connector Socket: 10 pin MIL type with strain relief Complies with MIL-C-83503 D-sub connector Complies

Electric Actuator/Slider Type

5 A-A t y @2 C B e @1 !0 C B r w C-C B-B !4 !2 Body Table !3 Component Parts No. Description Material Note No.

VQC

N.O. 4-position dual 3-port valve (C) 4 2 1 5 3 N.C.

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Q Width across flats 12 N M5 x 0.8 Width across flats 10 8 3 5 Y R R F F Width across flats 12 Width across flats 3 Width across flats 10 Width across flats 2 E E D C D C 2 2 A A B B Dimensions A Dimensions A (mm) (mm) B B C D E F Y C D E F N Model Model ZPR10F-0-B5 ZPR20F-0-B5 10 12 10 12.5 23.4 39.5 1.5 M5 x 0.8 20 22 ZPR13F-0-B5 ZPR20F-0-B8 13 15 M8 x 1.25 23.9 10.5 13 40 2 12.5 15.5 29.3

Applicable Tubing: ø 2 Connection Thread: M3, M5 Made to Order (Refer to page 193 for details.) Miniature Fittings M Series

4/-6 Weight (g) Effective area (mm2) 1.4 4.5 6.6 2.4 Width across flats 7 Model A B C D E F G H I M M 12 13.5 8.5 9.5 7 8 1.8 2.5 6.5 8.5 5.5 6 15 16 7 8 5 6 15.5 17.5 M-5HLH-4 M-5HLH-6 M5 x 0.8 Elbow: M-5L Tee: M-5T M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Weight: 3.5 g Weight: 4.2 g Universal Elbow: M-5UL Universal Tee: M-5UT Width across flats 7 2 x M5 x 0.8 Width across flats 7 M5

CJ5-S

Applicable bore size (mm) A1 L NDd9 MM B C d H B C d H CEP1 0.030 0.060 0.030 0.060 Y-J010SUS 10 SNJ-016SUS 10 NTJ-010SUS 10 3.3 7 8 15.2 21 M4 x 0.7 16.2 M10 x 1.0 4 8.1 M4 x 0.7 3.2 Y-J016SUS SNKJ-016SUS NTJ-015SUS 16 16 16 5 17 8 11 16.6 21 M5 x 0.8 19.6 M12 x 1.0 4 9.2 M5 x 0.8 4 CE1 NDH10 U1 NX R1 Part no.

CJ5-S

Applicable bore size (mm) A1 L NDd9 MM B C d H B C d H CEP1 0.030 0.060 0.030 0.060 Y-J010SUS 10 SNJ-016SUS 10 NTJ-010SUS 10 3.3 7 8 15.2 21 M4 x 0.7 16.2 M10 x 1.0 4 8.1 M4 x 0.7 3.2 Y-J016SUS NTJ-015SUS SNKJ-016SUS 16 16 16 5 17 8 11 16.6 21 M5 x 0.8 19.6 M12 x 1.0 4 9.2 M5 x 0.8 4 CE1 NDH10 U1 NX R1 Part no.

Possible to transfer a workpiece at low-speed.

Applicable shaft type: W L1 (3 x P) Q1 = M C2 = C Y = DC1 = C C2 Y = L2 = L2 (3 x P) C2 = C L2 = Q2 = M L1 = X = D2 = (mm) (mm) (mm) Y 1 to 9 1 to 10 L2 max Y Y D2 L1 max X 2 X 2 L2 max Y Y Q1 M3, M4 M3, M4, M5 Q2 M3, M4 M3, M4, M5 Y 6 to 9 7.5 to 10 X 8 to 18 9.5 to 20 Size 10 15 Size 10 15 Size 10 15 3.5 to 4.9 3.5 to 5.9 319 CRQ2X Series (Size: 10, 15, 20, 30, 40) Simple Specials: -

Rotary Actuator/Vane Style Series CRB2

(mm) R F (h9) E (g6) A B C D G K L M N P Q Y Model 90 180 270 CDRB2BW10-S CDRB2BW15-S CDRB2BW20-S CDRB2BW30-S 9 12 14 16 4 5 6 8 29 34 42 50 15 20 29 40 29 29 30 31 14 18 20 22 3 4 4.5 5 9 10 10 12 0.5 0.5 0.5 1 10 15 20 30 25 25 25 25 24 29 36 43 18.5 18.5 25 25 M5 x 0.8 M5 x 0.8 M3 x 0.5 M3 x 0.5 M3 x 0.5 depth 5 M3 x 0.5 depth 5 M5 x 0.8 M5 x 0.8 M4 x 0.7 depth 7 M5 x 0.8 depth 10 60 Series

Rotary Table/Rack & Pinion Style Series MSQ

Positioning pin hole Counter-clockwise 5 Adjustment bolt A 5 (For counter-clockwise rotation end adjustment) 9 22 e B port .5 g Adjustment bolt B n ra (For clockwise rotation end adjustment) nt e e m is st w u k dj c lo a e is -c d w C A port B port n k er c lo o e l Clockwise C a nt c n dj k u o w o 0 u ti is C st ta e 19 m ro ro ta e ti o d n n e nt e ra ng n g e 5 9 ra With adjust bolt

Vacuum Pad: Ball Joint Type

thread) M10 x 1 M5 x 0.8 Hexagon width across flats 14 M5 x 0.8 M8 x 1 5 Hexagon width across flats 12 3 20 D 3 5 Y Hexagon width across flats 16 15 D 3 3 F Hexagon width across flats 12 Hexagon width across flats 12 Hexagon width across flats 10 Hexagon width across flats 2 F Hexagon width across flats 3 3 C C 2 2 A A B B Dimensions Dimensions (mm) (mm) A B C D F Y A B C D F Model Model

Electric Actuator with Integrated Guide

Yasukawa Electric Corporation M4 x 0.7 8 4 75 C (Thread size) M5 x 0.8 10 4 70 When mounting a coupling on the motor, mount it within the dimensional range shown on the left.