SMC Pneumatic Clean Series

Bore size NTJ-010A NTJ-006A 8 6 M3 x 0.5 2.4 5.5 6.4 5.5 6.5 M3 x 0.5 6 12.5 M4 x 0.7 3.2 7 8.1 7 8.5 M4 x 0.7 8 14.5 NTJ-015A 10 M5 x 0.8 4 8 9.2 10.5 M5 x 0.8 16.5 10 9 (mm) Standard C D E F B A J K L M N O P G H I Bore size 8 6 M2.5 x 0.45 13 7 7 10 9 19 3 5 4 9 3.5 8 7 5.3 24 M3 x 0.5 13 7 8 11 10 21 3 6 5 11 4.5 10 8 5.3 25 10 13.5 M3 x 0.5 7 8.5 11.5 10.5 22 3.2 6 6 12 5 11 8.5 5.6

CM2

B H C D d NT-02 NT-03 NT-04 M8 X 1.25 13 5 15.0 12.5 CJP M10 X 1.25 17 6 19.6 16.5 M14 X 1.5 22 8 25.4 21.0 CJ2 Mounting Nut (mm) CM2 Material: Carbon steel C85 Applicable pin part No. Part No.

Large Type Vacuum Unit Series ZR

SMC PRESSURE SWITCH PD PV 57 1 67 1 32.4 109 Approx. 300 Ejector RESET SET Supply valve Release valve V 21.2 Manual override Suction filter 1 2-4.6 (mounting hole) 1 5.6 1 8 1 10.2 123 1 4.6 1 8 SOL. c SOL. a Silencer SOL. b Interface A Light Suction filter Manual override Interface B Digital vacuum pressure switch M5 port PE (pilot valve exhaust port) M5 port PD (vacuum breaking pressure

Safety Instructions

Leakage voltage Particularly when using a resistor in parallel with a switching element and using a C-R element (surge voltage suppressor) to protect the switching element, take note that leakage current will flow through the resistor and C-R element, etc., creating a danger that the valve may not shut OFF.

Pressure Range: 0.0 to -101.0kPa, Piping Specifications: N01 (NPT1/8 Piping Adapter, Side Ported), Output Specifications: C (NPN Open Collector 1 Output+Analog Voltage)

Pressure Range: 0.0 to -101.0kPa, Piping Specifications: M5R (M5 Female Thread/Rear Piping Port), Output Specifications: C (NPN Open Collector 1 Output+Analog Voltage)

Pressure Range: 0.0 to -101.0kPa, Piping Specifications: 01 (R1/8 Piping Adapter, Side Ported), Output Specifications: C (NPN Open Collector 1 Output+Analog Voltage)

Pressure Range: 0.0 to -101.0kPa, Piping Specifications: NPT1/8 Piping Adapter, Side Ported, Output Specifications: NPN Open Collector 1 Output+Analog Voltage, Unit Specifications: -, Lead Wire: -, Adapter: -, Calibration Certificate: -

Pressure Range: 0.0 to -101.0kPa, Piping Specifications: M5 Female Thread/Rear Piping Port, Output Specifications: NPN Open Collector 1 Output+Analog Voltage, Unit Specifications: -, Lead Wire: -, Adapter: -, Calibration Certificate: -

Pressure Range: 0.0 to -101.0kPa, Piping Specifications: R1/8 Piping Adapter, Side Ported, Output Specifications: NPN Open Collector 1 Output+Analog Voltage, Unit Specifications: -, Lead Wire: -, Adapter: -, Calibration Certificate: -

ITVH

AP100 Port size B 2 1/4 3 3/8 Note) EXH port: 1/4 Built-in regulator EXH port: M5 Solenoid valve EXH port: M5 L-bracket C * Bracket is included. 957 ITVH2000 Series Standard Specifications Model ITVH2000 Minimum supply pressure Whichever is higher: 0.5 MPa or the set pressure + 0.2 MPa Maximum supply pressure 3.0 MPa Set pressure range Note 1) 0.2 to 2.0 MPa Power supply Voltage 24 VDC 10%

AN

valve Measurement distance: 1m R(PT) R(PT) M3 M5 1 8 1 8 Port size Fluid Noise reduction dB(A) 16 21 13 18 Compressed air Max. operating press Ambient and fluid temperature 1.0MPa 5 to 50C Effective area (mm2) Weight (g) Dimensions (mm) 20 35 1 5 9.5 20 1 3.3 22.5 38 9 17 11 A B 13 6 8 Note) NPT thread for AN101 and AN110 is alsoavailable.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Orifice conductance In the case of a A (cm2) hole in an ultra-thin plate, the conductance C results from V the average velocity of the gas, R the gas constant, M the molecular weight and T the absolute temperature. From the formula C=VA/4=(RT/2M)0.5A, the conductance for 1cm2 is C=11.6A l/sec, at an air temperature of 20C.

NAMUR Interface 3 Port Solenoid Valve VFN200N Series [Option]

A 24 M5 thread, depth 8 With or without insert depending on base material. 32 A' Coding stud M5 x 10 DIN913-45H 12 2 8 M5 Drive flange face G1/4 DIN/ISO228/1 19.5 5.5 Solenoid valve flange face O-ring 16 x 2 1.5 IP 3 IW 1301 AW The solenoid valve can be attached with 2 mounting bolts.

Clean Rodless Cylinder Series CYP

d e f g Nil Reed switch L R Solid state switch S h Nil L R S Operating direction Left Right a b h g d c f e Note) Lead wire length symbols 0.5m .

Two Hand Control Valve

0 P1(11) port u R(4) Exhaust port r !5 o !7 A(2) port P2(12) port w !2 !6 !4 !

Process Pump Series PA3000/5000/PAX1000 Series PB1000

rate l/min (ANR) (SCFM) Note 3) 12 (0.42) 25 (0.88) 50 (1.8) 75 (2.6) 125 (44) Inlet air pressure MPa (psi) 0.7 (101) Inlet air temperature C (F) 25 (77) 25 (77) 25 (77) 1l/min (ANR) (0.03SCFM) {inlet air pressure at 0.7MPa} (101psi) Inlet air saturation temperature C (F) Ambient temperature C (F) Dew point indicator purge air flow rate Port size (nominal size B) 1/4, 3/8 1/8, 1/4 Weight

Process Pump Series PA3000/5000/PAX1000 Series PB1000

C Ambient temperature C Dew point indicator purge air flow rate Port size (nominal size B) 1/4, 3/8 1/8, 1/4 Weight kg (with bracket) 0.25 (0.31) 0.43 (0.51) 0.66 (0.76) 0.74 (0.87) 0.77 (0.90) Note 1) With no freezing Note 2) ANR indicates the flow rate converted to the value for 20C at atmospheric pressure.

MXF

Dimensions: Stroke Adjusting Bolt (mm) Applicable size Model Stroke adjustable range (mm) A B C M M C MXF-A827 MXF-A827-X11 MXF-A1227 MXF-A1227-X11 MXF-A1627 MXF-A1627-X11 MXF-A1627-X12 MXF-A2027 MXF-A2027-X11 MXF-A2027-X12 5 15 5 15 5 15 25 5 15 25 17 27 23.5 33.5 26.5 36.5 46.5 30 40 50 MXF8 M4 x 0.7 6 2 MXF12 M5 x 0.8 7 2.5 MXF16 M6 x 1 8 3 A B MXF20 M8 x 1 12 4 8-6-9 10 Series MXF Dimensions

MXH

1 r !4 @2 u o !3 @4 e !5 !1 r u @2 @3 !3 @4 e !2 MXH16/20 (16, 20) @0 y @1 !7 w q!9 t !8 i !0 !1 r u @2 @3 !3 @4 e !2 Component Parts Description Material Note Description Material No. q w No. !2 !3 !4 !5 !