,

The test was performed in the axial and right angle directions of the main valve and armature for both energized an de-energized conditions. 1 (P) 5 (R1) 3 (R2) 3-position exhaust center (A) 4 (B) 2 Specific Product Precautions 1 (P) 5 (R1) 3 (R2) 3-position pressure center (A) 4 (B) 2 Caution Internal Wiring Specifications 1 (P) 5 (R1) 3 (R2) M8 Connector: Wiring specifications (EVS1-02)

MGZ Series

(same side) D-Y59A (B), Y69A (B) Y7P (V) 20 1 pc., 2 pcs. (different sides) 70 2 pcs. (same side) D-Y7NW (V), Y7PW (V) Solid state switch Y7BW (V) 1 pc., 2 pcs. (different sides) 25 2 pcs. (same side) 70 D-Y7BAL 1pc., 2 pcs.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

12 V 100 V 200 V 110 V 220 V Part no.

,

5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil R Metal seal Double FJG Rubber seal 1 (P) 5 (R1) 3 (R2) Rated coil voltage (A) 4 (B) 2 Option 3 4 24VDC FIG 12VDC Nil None 1 (P) 5 (R1) 3 (R2) Voltage other than above (50VDC or less) Indicator light with surge voltage suppressor 9 Z A02 VS1 01

Stability of suction position,

Flat type with groove (UM) Bellows type with groove (BM) 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3EB-(T/Y)1JB10 V V V V V V ZP3EB (T/Y)1JB30 V V V V V V ZP3EB-(T/Y)1JB50 V V V V V V ZP3EB-(T/Y)2JB10 V V V V V V V V ZP3EB-(T/Y)2JB30 V V V V V V V V ZP3EB-(T/Y)2JB50 V V V V V V V V * Select "T" when selecting a T type buffer assembly.

VNC

Not required (Use turbine oil Class 1 ISO VG32, if lubricated.) 5 to 50C (Air operated type: 60C) PA AC (50/60 Hz) DC VNC1 VNC Applicable pressure range 100 V, 200 V, Other voltage (Option) Coil rated voltage (V) 2 4 PAX 24 V, Other voltage (Option) 15% to +10% of rated voltage Class B or equivalent (130C) 1 4 VNC Allowable voltage fluctuation Coil insulation type Pressure VNC2 PB External

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

How to Order Type 40 1(P) port Stations VV5Z3 05 40 2 M5 Rc 1/8 4(A), 2(B) port size 1(P), 3/5(R) port thread type 02 2 stations 3, 5(R) port M5 M5 x 0.8 Nil Rc 4(A), 2(B) port Rc 1/8 F G 20 20 stations M5 x 0.8 N NPT Z NPTE How to Order Type 41 VV5Z3 05 41 1 M5 Applicable solenoid valve Stations 4(A), 2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations G L M D G L M

Clean Rodless Cylinder Series CYP

P (port f)] WB WA R 4-J Depth JK Inner cover holding screw TA TA WB WA TB TB R W (mm) C ED A EK B F E G H HA HB HG HI HL HP HS HT J JK K Model +0.030 0 CYP15 5.4 9.5 8 4 9.5 12.5 4H9 6.5 45 19.5 8.5 8.5 23 38.6 44 27 19.5 M6 x 1 10 21 +0.030 0 CYP32 8.6 6H9 13 12 14 6 25 8.5 75 39 19 19 39 64.9 73.5 49.5 39 M10 x 1.5 12 20 LD LW MM M N L P PA PB Q QW R T TA TB W WA WB Y Z Model CYP15 5.6

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil R Metal seal Double FJG Rubber seal 1 (P) 5 (R1) 3 (R2) Rated coil voltage (A) 4 (B) 2 Option 3 4 24VDC FIG 12VDC Nil None 1 (P) 5 (R1) 3 (R2) Voltage other than above (50VDC or less) Indicator light with surge voltage suppressor 9 Z A02 VS1 01

SYJ300/500/700

S : : P R 20 20 stations A A + + + + P, R port thread type R port A port size A port M5 x 0.8, C4 P port R P 1/8 M5 M5 x 0.8 P port Nil Rc A 1/8 1/8 C4 4 One-touch fitting F G R port N3 5/32" One-touch fitting N A port M5 x 0.8, C4 NPT 1/8 T NPTF Note) For more than 8 stations, supply/exhaust air to/from both sides of P port and R port.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

C10 M5 02 One-touch fitting for 3.2 v v v v Configuration One-touch fitting for 4 2 position single One-touch fitting for 6 (A) 4 (B) 2 One-touch fitting for 8 1 One-touch fitting for 10 M5 thread Rc(PT)1/4 5 (R1) 1 (P) 3 (R2) 2 position double (A) 4 (B) 2 (A) 4 (B) 2 Note 1) Refer to p.1.12-27 for inch size and One-touch fitting. 2 5 (R1) Metal Rubber 5 (R1) 1 (P) 3 (R2) 1 (P) 3 (R2)

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Nil M5 x 0.8 R1, R2 port 20 20 stations + + + + + + + Nil Rc Applicable solenoid valve 10-SYJ343-(-Q) Single solenoid pilot valve is on same side as the A, B port. P P P S F G A, B port M5 x 0.8, C4 P port 1/8 P port 1/8 A A A, B port size B B B A, B port M5 x 0.8, C4 A N NPT Applicable blanking plate assembly M5 M5 x 0.8 T NPTF C4 4 One-touch fitting Refer to page 302.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

(Inch) M5 1/8 1/4 M5x0.8 VQZ1000 V V V V V Cylinder port VQZ2000 V V V V V VQZ3000 V V V V V Note 1) Mixing One-touch fittings and thread types is impossible.

Filter Regulator AW30, 40

Accessory/ Optional specification combinations : Combination available : Combination not available : Varies depending on the model : Available only with NPT thread Optional specifications Applicable filter regulator AW30, 40 Accessories Symbol Accessory/ Optional specifications Combination B C D E G P 1 2 6 8 C J N R W Z With bracket (with set nut) Float type auto drain (N.C.)

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

surge voltage suppressor. 602 3 Port Solenoid Valve 10-SYJ300/500/700 Manifold Variations A port size With One-touch fitting Valve series A port location P, R ports size M3 M5 1/8 Applicable tubing O.D. 6 4 N3 N7 N9 8 10-SYJ300 Note) Top M5 x 0.8 Body ported Base mounted P.609 10-SYJ500 Top 1/8 P.620 Note) 1/8 10-SYJ700 Top 1/4 P.632 Note) M5 x 0.8 10-SYJ300 Side 1/8 P.609 Bottom 10-SYJ500

EXxx-OMV0017-D

/ V.2.0 V.2.0 Available i) Time Information j) Synchronization time a) Pairing Normal / pairing modes Normal mode Available Allocation and registration of the Wireless Remote unit to the wireless channel.

ZX

Pitch = 21 Individual vacuum supply port Individual vacuum supply port PV Adapter D Adapter D M5 x 0.8 (or M6) Vacuum pad connection port (V port) M5 x 0.8 (or M6) Pitch = 21 M5 x 0.8 (or M6) Vacuum pad connection port (V port) Adsorption nozzle piping port 13-2-57 57 Series ZX Vacuum pad connection V port Vacuum pad connection V port Vacuum Pump System Manifold: Type K1 Common EXH Common

SYJ3000/5000/7000

-www.stevenengineering.com 20 20 stations R port 1/8 Applicable individual EXH spacer assembly A, B port M5 x 0.8 M5 M5 x 0.8 A, B port size Applicable individual SUP spacer assembly ARBYJ5000-00-P How to Order Type 41 (5 Port/Base mounted) SS5YJ5 41 05 M5 Stations 02 2 stations P, R port thread type -+ -+ R port 1/8 : : R P Nil F N T Rc G NPT NPTF 20 20 stations A, B port M5 x 0.8 M5 M5

7.4

S0700 S0700 M5 V V Rc1/8 V V 2 V 1(P), 3(R) 4 V Piping specifications 1/8" V 5/32" V Port size M3 V M5 V V 2 V V V Note 1) V 4(A), 2(B) 3.2 V V Note 1) 4 V V V Note 1) V 1/8" V V V 5/32" V V V Type of wiring C Kit: Connector C Kit: Connector S Kit: Serial transmission (EX510) C Kit: Connector Connector kit Connector kit Direct EXH outlet with built-in silencer V Page 755 Blanking plate

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Nil : : P R 20 20 stations A A S + + + + P, R port thread type R port A port size R P A port M5 x 0.8, C4 P port 1/8 Nil Rc M5 M5 x 0.8 P port F G A 1/8 1/8 C4 One-touch fitting for 4 N NPT R port N3 One-touch fitting for 5/32" A port M5 x 0.8, C4 1/8 T NPTF Note) For more than 8 stations, supply air to both sides of P port and exhaust air from both sides of R port. 667 Manifold specifications