2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Back cover 8 2-Color Display Digital Flow Switch RoHS PF2M7 Series How to Order PF2M7 10 C6 A M Integrated display q r t y u i w e q Rated flow range e Port size Piping variations 01 0.01 to 1 L/min 02 0.02 to 2 L/min 05 0.05 to 5 L/min 10 0.1 to 10 L/min 25 0.2 to 25 L/min 50 0.5 to 50 L/min 11 1 to 100 L/min 21 2 to 200 L/min With One-touch fitting Female thread C4*2, C6, C8, N7 01, 02,

VK300

Note Bracket VK300-43-2A With screw Body ported VK332 1 G M5 1 G 01 VK334 Base mounted Port size 01 Rc (With sub-plate) Nil Without sub-plate 1 8 Valve option Nil V Standard type For vacuum Light/Surge voltage suppressor Y For low wattage For vacuum/low power consumption Continuous duty type Nil None S With surge voltage suppressor W Z With light/surge voltage suppressor (Type D only) E For

ARJ1020F

ARJF310F-01 y e !

VQC

D-side w How to order applicable valves VQC 4 0 5 E B 0 Y 1 Series VQC4000 F E D A C B Stations are numbered in ascending order from the D-side.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

, % NPTF Side Ports sPo 1s1 -31 Non Flug-in type o Subplate ass y t sPFo191-s Plug-in type with terminalblock sPFo193-3; sPo193-31 1/8NPTF side & 1/4NPTF bottom Ports @ rExlernal pilot tvpe ordet SPFol9lB-ole) AB ports: 01 i1 /8NPF); 02 (1/4NPIF) 5 Port Pilot Type/Rubber Seal Series NVFR3000 Plug-in Type, Non Plug.in Type Plug-in Type Non Plug-in Type (Addiliona, fqnction achieved by ustng

-fl Seies

, % NPTF Side Ports sPo 1s1 -31 Non Flug-in type o Subplate ass y t sPFo191-s Plug-in type with terminalblock sPFo193-3; sPo193-31 1/8NPTF side & 1/4NPTF bottom Ports @ rExlernal pilot tvpe ordet SPFol9lB-ole) AB ports: 01 i1 /8NPF); 02 (1/4NPIF) 5 Port Pilot Type/Rubber Seal Series NVFR3000 Plug-in Type, Non Plug.in Type Plug-in Type Non Plug-in Type (Addiliona, fqnction achieved by ustng

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

: VQZ2 2(R)Y -N3T, N7T, M5T Indicator light 87 MAX.10 300 (Lead wire length) 83 Applicable cord O.D.

5 Port Solenoid Valve SY Series

SY3120-C6 SY3140-01 T0604 x 1 m T0806 x 1 m AS3001F-06 T0604 x 1 m T0806 x 1 m AS3001F-08 AS3001F-06 SY5120-01 SY5140-02 AS3001F-08 AN101-01 AN101-01 T1075 x 1 m T0604 x 1 m T0604 x 1 m T1209 x 1 m T1075 x 1 m AS4001F-10 SY7120-02 SY7140-03 AS3001F-06 AS4001F-10 AS3001F-06 AN110-01 AN200-02 T0604 x 1 m T1075 x 1 m T1209 x 1 m T0604 x 1 m T1075 x 1 m T1209 x 1 m AS3001F-06 AS4001F-10 AS4001F

Fieldbus System

Connector for unit (Plug) 6 y t y t EX600-DXlB EX600-DYlB EX600-DXlCl q w q w e q w er e y t y t y t EX600-DXlD EX600-DXlE EX600-DYlE EX600-DMlE EX600-DXlF EX600-DYlF EX600-DMlF Analog Unit q w e q w e No.

0.4

VVQ2000-3A-1 y U-side end plate assembly no.

VQ4000

Function Standard type (1 W) Low wattage type (0.5 W) External pilot Nil Y R Seal (1) (2) Metal seal Rubber seal 0 1 1 2 3 Stations U side Note 1) Applicable to DC specifications. Note 2) For external pilot specifications, refer to page 2-5-39. Combination of the external pilot and perfect interface is not possible.

PF2A/PF2W

Z directions for 2 hrs. each 490 m/s2 in X, Y, Z directions 3 times each 1000 Vp-p, Pulse width 1 s, Rise time 1 ns Resistance Note 1) In the case of PF2W711, 3% of F .S. or less (15C to 35C, based on 25C).

VZ100/300/500

Mounting Screw Tightening Torques M3: 0.8 Nm 4-6-34 35 3 Port Solenoid Valve Rubber Seal, Body Ported/Base Mounted Series VZ500 Manifold for Internal Pilot How to Order Applicable solenoid valve VZ512--01 VZ512M--01 VZ522--01 Z522M--01 Applicable blanking plate assembly DXT201-15-4A Type 20/21 VV3Z5 20 05 1 A port A port P/R port thread type Manifold P port Stations 20 21 Type 20 Type 21

5 Port Solenoid Valve, Series VQC

D-side How to order applicable valves VQC 4 0 5 E B 0 Y 1 Series VQC4000 F E D A C B Stations are numbered in ascending order from the D-side.

Digital Flow Switches, Series PF2A, Series PF2W

Z directions for 2 hrs. each 490m/s2 in X, Y, Z directions 3 times each 1000Vp-p, Pulse width 1s, Rise time 1ns Resistance Note 1) In the case of PF2W711, 3% of F.S. or less (15C to 35C, based on 25C).

Digital Flow Switches

Z directions for 2 hrs. each 490m/s2 in X, Y, Z directions 3 times each 1000Vp-p, Pulse width 1s, Rise time 1ns Resistance Note 1) In the case of PF2W711, 3% of F.S. or less (15C to 35C, based on 25C).

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

KPGH04-02 KPGH06-M5 KPGH06-01 KPGH06-02 KPGH08-01 KPGH08-02 KPGH10-02 KPGH10-03 KPGH12-03 KPGH12-04 KPQH04-M5 KPQH04-01 KPQH04-02 KPQH06-M5 KPQH06-01 KPQH06-02 KPQH08-01 KPQH08-02 KPQH10-02 KPQH10-03 KPQH12-03 KPQH12-04 24.4 24.9 23.5 21.4 25.3 25.8 23.7 24.6 30.7 29.1 36.1 30.9 32 32.2 8 M5 x 0.8 21.5 10 4 M A L 17 4 4 4 10 14 18.5 16 1/8 1/4 7 12 H Connection threads 8 22 12 5 M5

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

How to Order EX500 ACY00 S Relay output module and Y type connector wiring example Y type connector Relay output module 2 2 4 Coil 4 Output A 1 Coil Output B 2 3 4 260 Manifold Option 10-SV Manifold Option Blanking plate assembly Used in situations where valves will be added in the future.

Information

y u u q w e r t q w e r t i i o o !

Digital Flow Switches Series PF2A

Cable wire color Terminal 1 Brown DC+ q 2 Not used N.C. w 3 Blue DC e 4 White IN: 1 to 5 V r Power supply / Output connector (8P) Power supply / Output connector (accessory) i u y t r e w q Pin no. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.