CEx-OMQ0013

NO YES NO YES YES NO NO NO YES P.10 9 YES YES NO 1? 14.5 ?

Regulator AR30 to 60

Accessory/ Optional specification combinations : Combination available : Combination not available : Varies depending on the model : Available only with NPT thread Combination Accessories Optional specifications Applicable regulators Symbol Accessory/ Optional specifications B E G P 1 N R Z AR30 to 60 With bracket (with set nut) B Optional specifications Accessories Square embedded type pressure

SY3000V-OMY0001

SY7000 16 No.SY3000V-0MY0001 2 2 2 2 3 // 3 3 3 SY3000 SY5000/ SY7000: /HNBR SY3000 SY5000 SY7000 P.145 17 No.SY3000V-0MY0001 (E) () () (PE) 18 No.SY3000V-OMY0001 No. 1(ISO VG 32) (R) 19 No.SY3000V-OMY0001 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to

VFR3000-OMJ0001

03-12 ( ( ( ( ) ) ) ) 0.1 2 () C-R () C-R DC 3% AC 125% 3 4 VFR3000-OMJ0001-A VFR3000 VFR3000 VFR3000 VFR3000 Series Series Series Series 5 5 5 5 / / / / / / / / (SSR (SSR (SSR (SSR )AC )AC )AC )AC 1) (C-R ) OFF 2)() 1.52 -10 Nm Rc 1/8 79 Rc 1/4 1214 Rc 3/8 2224 Rc 1/2 2830 5 VFR3000-OMJ0001-A VFR3000 VFR3000 VFR3000 VFR3000 Series Series Series Series 5 5 5 5 / / / / ( ( ( ( ) )

VFR5000-OMN0001

() C-R DC 3% AC 20% ( ) () () 3 3 EXH (VVFS5000-R-04-1,2) ( ) () 3 4 No.VFR5000-OMN0001 VFR5000 Series 5 / (SSR )AC 1) (C-R ) OFF 2)() 1 -10 1 1) M5 1/6~1/4 1~1.5Nm ) ( ) 2 Rc Nm Rc 1/8 7~9 Rc 3/8 22~24 Rc 1/2 28~30 Rc 3/4 28~30 5 No.VFR5000-OMN0001 VFR5000 Series 5 / ( ) 5m 1) 2)1 ()ISO VG32 (MSDS) 3) 2 ()ISO VG32 \ 6 No.VFR5000-OMN0001 VFR5000 Series 5 / ( ) 3 30 (

D series Pin Clamp Cylinder G G Series CKQ D/CLKQ D P P How to Order Built-in standard magnet D A 50 177 R A L KQG C P4DWSC With magnetic field resistant auto switch Built-in strong magnet D A 50 198 R A L KQP C P79WSE With magnetic field

Pin Clamp Cylinder D series Series CKQ D/CLKQ D G P G P How to Order Built-in standard magnet With magnetic field resistant auto switch D A 50 177 R A L P4DWSC KQG C Built-in strong magnet With magnetic field resistant auto switch D A 50 198 R A L P79WSE C KQP With lock on the clamp side Number of auto switches L Nil Without lock With lock S Nil 2 pcs. 1 pc.

Series LC7R Dedicated Regenerative Absorption Unit

ALM (P) Temperature control output terminal (positive) 5 Regenerative resistance + + P 2 ALM (N) Temperature control output terminal (negative) 6 Regenerative output Main circuit LC7R connection method LC1 side connctor pin no.

Rotary One-touch Fittings Manifold Series KM

D2 L1 L2 L3 P Q1 Q2 A MB MA tube O.D.

Series VQ1000 10- Base Mounted 21- Plug-in Unit

Note 1) 25P Note 1) 26P 20P Side entry Side entry Side entry Connector entry direction Connector entry direction Connector entry direction P. 523 P. 527 P. 531 P. 535 Top entry Side entry Top entry Top entry Side entry Side entry Without cable Without cable Without cable With cable (1.5 m) With cable (3 m) With cable (5 m) Without cable S0 S1 S2 S3 U0 U1 U2 U3 S0 S1 S2 S3 0 1 2 3 U0 U1 U2

VP300-OMP0001

Z DIN Z DIN 2 1 1 2 11 No.VP300-OMP0001 VP Series VP Series VP Series VP Series/ / / / VP KQ2HKQ2S 12 No.VP300-OMP0001 O [3(R)*] O *N . O. 1( P) () O PE ( AC 13 No.VP300-OMP0001 N o. 1ISO VG 32 [ 3(R)PE] N .

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3-Screen High Precision Dig Press Switch, PRESSURE SWITCH, ISE1-6, N59, 90 lb

VFR2000-OMM0001

01-1,2 VVFS2000-R-02-1,2) ( ) ( ) 3 1 DC 3 () -4No.VFR2000-OMM0001 5 5 5 5 0.1 2 C-R () C-R DC 3% AC 20% (SSR )AC 1) (C-R )OFF 2)() ZNR 1V -10 -5No.VFR2000-OMM0001 5 5 5 5 1.5~2 1) 2)1 ()ISO VG32 MSDS 3)2 ()ISO VG32 M5 1/61/4 1.5Nm Rc Rc1/8 79 Rc1/4 1214 -6No.VFR2000-OMM0001 5 5 5 5 ( ( ( ( ) ) ) ) 5m 3 30 () 1 VG32 2 ()ISO VG32 -7No.VFR2000-OMM0001 G : DC +(+)(-) E T D Y

05-hyc-e

Hygienic Design Cylinder/ISO Standard Type Series HYC 32, 40, 50, 63 Replacement Procedure is P.297 Hygienic Design Cylinder/ISO Standard Type Construction Hygienic Design Cylinder/ISO Standard Type Series HYC 32, 40, 50, 63 Series HYC 32, 40, 50, 63 Replacement Procedure is Replacement Procedure is !6 !5 !8 !7 !9 @1 P.297 P.297 Construction Construction !6 !5 !8 !7 !9 @1 !6 !5 !8 !7 !

05-hyg-e

Pressure Control Equipment Industrial Filters Replacement Procedure is P.301 20, 25, 32 40, 50, 63 !7 !5 !6 !8 P.301 Construction Construction Actuators Modular F.R.L. Pressure Control Equipment Air Preparation Equipment Industrial Filters Replacement Procedure Actuators Modular F.R.L. Pressure Control Equipment Industrial Filters !7 !5 !6 !8 Actuators Modular F.R.L.

Plug-in manifold for VQ1*0* valve, Individual lead wire type, P and R ports on one side for space savings, Maximum 8 stations available as standard, 16 port sizes available, Optional DIN rail mount, MFLD, PLUG-IN, VQ1000, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, UM, VV5Q* BUILT IN FITTING 1.67037 lb

Individual lead wire type, P and R ports on one side for space savings, Maximum 8 stations available as standard, 12 port sizes available, Optional DIN rail mount, MFLD, PLUG-IN, VQ2000, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, UM, VV5Q* BUILT IN FITTING 1.39625 lb

Plug-in manifold for VQ1*0* valve, Individual lead wire type, P and R ports on one side for space savings, Maximum 8 stations available as standard, 16 port sizes available, Optional DIN rail mount, MFLD, PLUG-IN, VQ1000, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, UM, VV5Q* BUILT IN FITTING .85034 lb

Individual lead wire type, P and R ports on one side for space savings, Maximum 8 stations available as standard, 12 port sizes available, Optional DIN rail mount, MFLD, PLUG-IN, VQ2000, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, UM, VV5Q* BUILT IN FITTING 1.98416 lb

AMP

P-80 (YG)

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90