10S (Side-Ported, Serial Interface), SI Unit Specification: EA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Output Polarity: N (PNP), Valve Stations: 12 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: C4 (ø4 One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate, w/o Station Number), DIN Rail Option: 13

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: DA (EtherCAT - 32 Outputs - Connector M12), SI Unit Output Polarity: N (PNP), Valve Stations: 13 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: C4 (ø4 One-touch Fitting)

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: FA (PROFINET - 32 Outputs - Connector M12), SI Unit Output Polarity: Positive Common, NPN or w/o SI Unit, Valve Stations: 13 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: N7 (ø1/4" One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate

Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: QA (DeviceNetâ„¢ - 32 Outputs - Connector M12), SI Unit Output Polarity: N (PNP), Valve Stations: 12 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: N7 (ø1/4" One-touch Fitting), Mounting: A (DIN Rail Mounting, Name Plate, w/Station Number), DIN Rail Option: 13

Stations: 13, A,B Port: N7 (ø1/4" One-touch Fitting, Inch), Thread: T (NPTF)

Direction: -, Drain Cock: -, Bowl Material: -, Bowl Guard: -, Size of Body: -, Accessory: -, O-Ring, Gasket Material: -, Custom-made Specifications: -, Case Material: -, Connection tube diameter on IN side: -, Connection tube diameter on OUT side: -, Element length: L250, Element type: HEPO II Element EJ101S, Element materials: PET, Element seal materials: NBR, Nominal filtration accuracy: 13

Direction: -, Drain Cock: -, Bowl Material: -, Bowl Guard: -, Size of Body: -, Accessory: -, O-Ring, Gasket Material: -, Custom-made Specifications: -, Case Material: -, Connection tube diameter on IN side: -, Connection tube diameter on OUT side: -, Element length: L250, Element type: HEPO II Element EJ102S, Element materials: P.P, Element seal materials: NBR, Nominal filtration accuracy: 13

Type: [Related Components (Replacement Parts)] Related Components (Replacement Elements), Element materials: -, Element seal materials: PTFE, Nominal filtration accuracy: 13 μm, Element Size: For FGH300

Type: [Related Components (Replacement Parts)] Related Components (Replacement Elements), Element seal materials: PTFE, Nominal filtration accuracy: 13 μm, Element Size: For FGH100

Type: [Related Components (Replacement Parts)] Related Components (Replacement Elements), Element seal materials: PTFE, Nominal filtration accuracy: 13 μm, Element Size: For FGH200

Type: [Related Components (Replacement Parts)] Related Components (Replacement Elements), Element seal materials: PTFE, Nominal filtration accuracy: 13 μm, Element Size: For FGH300

Body: 5 (Base Mounted), Stations: 13 Stations, Port Size: C4 [ø4 One-touch Fitting (Base Mount Type Only)]

A vacuum/release module that does not require a restrictor circuit for release air.Features · Response speed 13 msec (at 500 mm*).· 18.5 msec (at 1,000 mm*).

. · Lightweight: Reduced by 5 to 13% (compared to conventional CQ2 Series) · With auto switch.

. · Lightweight: Reduced by 5 to 13% (compared to conventional CQ2 Series) · Compact large bore size. · With auto switch.

. · Weight reduced by 5 to 13% (compared to conventional CQ2 Series).

.· Lightweight: Reduced by 5 to 13% (compared to conventional CQ2 Series).

[12/13-Series, Clean Series]· Compatible with a clean environment.· Prevents generation of dust in cleanrooms.

. · Lightweight: Reduced by 5 to 13% (compared to conventional CQ2 Series) Part numbers are set for products shipped together with mounting bolts and for those including rod-end brackets. · With auto switch.

. · Lightweight: Reduced by 5 to 13% (compared to conventional CQ2 Series) · With auto switch.