3

For the analog output type, when ON the output will be 5 V or 20 mA, and when OFF, it will be 1 V or 4 mA.

SY3000/5000/7000/9000 Series (Pilot Valve:V100)

Applied voltage When connecting fittings to valves, tighten as indicated below. 1) M3, M5 types 1. When using SMC fitting, follow the guidelines below. After tightening by hand, tighten an additional 1/4 (M3), 1/6 (M5) turn with a tightening tool. However, if miniature fittings are used, tighten an additional 1/4 turn with a tightening tool after tightening by hand.

Flow Sensor Series PFMV

IF Analog Output 1 to 5 VDC 4 to 20 mADC 5 20 Analog output [mA] Analog output [V] 1 4 0 0 0 5.00 1.00 5.00 0 1.00 Monitor display Monitor display 957 Series PFMV3 Internal Circuits PFMV300 NPN open collector output: 2 outputs Max. 30 V, 80 mA, residual voltage 1 V or less Analog output: 1 to 5 V Output impedance: Approx. 1 k PFMV303 PNP open collector output: 2 outputs Max. 80 mA, residual

AKH/AKB Series Check Valve with One-touch Fitting

Port size NPT Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" From one-touch fitting to male thread B Bushing Type AKB 01 A 01 S With sealant (standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction

MXH Series Compact Slide

Roll moment Mr(Nm) 1 N m = 0.7375 ft lb 31 MXH Series Compact Slide Construction MXH6 (6) MXH10 (10) 20 6 21 17 2 1 19 5 18 8 10 20 6 21 16 2 1 19 5 18 10 8 3 24 13 9 7 22 14 4 11 15 12 3 24 13 23 22 7 4 11 MXH16, 20 (16, 20) 20 6 21 17 2 1 19 5 18 18 8 10 4 7 22 23 13 24 3 12 11 Parts list Parts list Description Material Note Description Material No.

VK300

4 95 84 3 76 65 2 57 46 1 38 27 L1 L2 VQZ VZ VS VFN 4-5-7 8 Series VK300 Type 40 Manifold Base Mounted (Bottom ported) VV3K3-40Stations -01 Grommet: G DIN terminal: D Applicable cable O.D: 3.5 to 7 Manual override Manual override 300 (Non-locking) 4-Rc 1/8 (Lead wire length) 4-Rc 1/8 (P , R port) (P , R port) (Mounting hole) (Pitch) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

Digital Flow Monitor

Description 1 DC(+) 2 N.C. 3 DC(-) 4 IN : 1 to 5 V or 4 to 20 mA Sensor connector (Part No: ZS-28-CA-4) PIN No. Description 1 DC(+) 2 N.C. 3 DC(-) 4 IN : 1 to 5 V or 4 to 20 mA -83No.PF-OMU0007-D Panel cut-out dimensions Mounting individually More than 2 pcs. (n pcs.) Close mounting -84No.PF-OMU0007-D Revision history A: Contents are added.

PSxx-OML0002CN

3 ISE30A -0.11 MPa Y ZSE30A 0-101 kPa ZSE30AF -100100 kPa K T 2 01 R1/8(M5) N01 NPT1/8 (M5) A1 A C4H 4mm5/32 inch C6H 6mm A2 B NH7 1/4 inch N7H A3 C C4L 4mm5/32 inch C6L 6mm B N7L 1/4 inch D + N NPN1 P PNP1 A NPN2 B PNP2 C NPN1+ D NPN1+ E PNP1+ F PNP1+ 1 L (2 m) 1 (2 m 1 G 1 M SI2 P (psi)1 1NP3 4 1 2kPaMPa -8No.PS-OML0002CN-G / A ZS-38-A1 (M35 L 2 ) B ZS-38-A2 (M35 L

240

0.25 0.3 0.35 0.4 0.45 60 50 40 60 50 40 Displacement (mm) 0.5 0.4 25,30 25,30 15,20 5,10 0.3 15,20 5,10 0.2 0.1 0 0 1 2 3 4 5 6 0 1 2 3 4 5 6 Pitch moment Mp (Nm) Yaw moment My (Nm) Design Caution D1.

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Connections AK3 AK4 4T 1/4 inch compression 4BR Rc 1/4 4BRN R 1/4 4 NPT 1/4 female 4N NPT 1/4 male 6T 3/8 inch compression Material Code Body material S 316 SS 6BR Rc 3/8 6BRN R 3/8 6 NPT 3/8 female 6N NPT 3/8 male Ports Code Ports 2P 2 ports Note) Only available with same type ttings inlet and outlet.

FQ1

point) Port size Rc 1/2, 3/4 3/4, 1 1/2, 3/4, 1 Material Housing/Seal SUS304/NBR or FPM Element Note) Cotton, PP, SUS304, SUS316, etc.

3 Port Solenoid Valve Series SYJ300/500/700

Features 1 Series SYJ300/500/700 Manifold Variations A port size With one-touch fitting Valve series A port location P, R ports size M3 M5 1/8 Applicable tubing O.D. 6 4 N3 N7 N9 8 Note 1) M5 x 0.8 SYJ300 Top Note 2) Body ported Base mounted 1/8 SYJ500 Top 1/8 Note 1) 1/8 SYJ700 Top 1/4 Note 1) M5 x 0.8 SYJ300 Side 1/8 Bottom SYJ500 1/8 Side Note 1) 1/8 Bottom SYJ700 1/4 Side 1/4 Note 1)

MXH

1 r !4 @2 u o !3 @4 e !5 !1 r u @2 @3 !3 @4 e !2 MXH16/20 (16, 20) @0 y @1 !7 w q!9 t !8 i !0 !1 r u @2 @3 !3 @4 e !2 Component Parts Description Material Note Description Material No. q w No. !2 !3 !4 !5 !

VPA4

, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4n-Rc 1/2, 3/4 Port size (Rc 3/4, 1) ( ) for VVPA460 Individual EXH: VVPA450Station 2Port size VVPA460Station 2Port size 2-Rc 3/4 Port size (Rc 1) 2-Rc 1/8 2-Rc 1/8 Pilot port Pilot port Mounting hole Rc 1/8 Pilot port 4n-Rc 1/2, 3/4 2n-Rc 3/4 Port size (Rc 1) Port size (Rc 3/4, 1) L Dimension

VT307

) 3 Individual 1 8 1 4 , 1 4 1 8 VZ Note) For more than 6 stations, supply air both sides of P port.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

4, Piping in the backward direction Nil None TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

SUP A B A B IN OUT IN OUT 2 1 3 EXH. EXH. H 28 30 36 44 54 E 22 21 26 F 45 55 58 65 76 G 33 42 44 50 61 D 34 46 63 67 78 A 59 78 107 110 134 B 20 29 39 42 53 C 40 53 70 75 90 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1938 Series VHS20/30/40/50 Specific Product Precautions Be sure to read before handling.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

(same side) n = 2, 4, 6, 8 n = 4, 8,1 2, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 15 100 1 pc. 100 110 120 1 or 2 pcs. 15 120 120 130 140 D-F5W, D-J59W D-F5BA D-F5F D-F5NT (different sides/same side) (n 4) 2 140 + 55 (n 4) 2 (n 2) 2 (n 4) 2 (n 4) 2 15 + 55 120 + 55 120 + 55 130 + 55 "n" pcs.

Compact Slide Series MXH

0 @0 @0 y @1 !6 w q !9 t !8 !0 i !1 r !4 @2 u o !3 @4 e !5 !1 r u @2 @3 !3 @4 e !2 MXH16/20 (16, 20) @0 y @1 !7 w q!9 t !8 i !0 !1 r u @2 @3 !3 @4 e !2 Component Parts Component Parts Description Material Note Note Description Material No.

PSxx-OMM0002CN

6 33 () () 10m DC(-)() * ( ) () CE -7No.PS-OMM0002CN-F 0~50(5) SUS630() SUS304() ( ) * 10~15 15 /1% 1941 LCD * -8No.PS-OMM0002CN-F ISE80 02 N 3 ISE80 -0.11MPa ZSE80 0-101KPa ZSE80F -100100KPa ISE80H -0.12MPa Y K + T + 2 02 R1/4 N02 NPT1/4 F02* G1/4 G01 Rc1/8 A2 URJ1/4 B2 TSJ1/4 A (ZS-24-A/ZS-35-A) B *(ZS-24-D) C D + F02 ISO228-1 1 *1 L M SI*2 P (psi)*1 1 2 ISE80H: MPa