SMC Corporation of America
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Confirm that the internal tank has no leakage if using an external tank. 12 HEF Series Specific Product Precautions Be sure to read this before handling the products. Refer to the back cover for safety instructions.

Standard Products IDFAE Series Air flow capacity (m3/h [ANR]) Outlet air pressure dew point Rated inlet condition Page Model Refrigerant Port size 3C 7C 10C IDFA3E 12 15 17 Rc 3/8 IDFA4E 24 31 34 Rc 1/2 IDFA6E 36 46 50 P. 92 to 94 R134a (HFC) IDFA8E 65 83 91 Rc 3/4 IDFA11E 80 101 112 35C 0.7 MPa IDFA15E1 120 152 168 Rc 1 IDFA22E 182 231 254 R 1 IDFA37E R 11/2 273 347 382 P. 95 to 97 R407C

6 40 66 84 28 5 2.0 27 37 1/4,3/8 172 AMH250 178 1/2 8 12 6 40 66 84 28 5 2.0 27 37 3/8, 1/2 204 AMH350 3/4 210 8 14 7 50 80 100 34 5 2.3 32 37 8 14 7 50 80 100 34 5 2.3 32 37 10 14 9 55 88 110 50 9 3.2 37 37 10 14 9 55 88 110 50 9 3.2 37 37 10 16 9 65 102 130 60 10 4.5 39 37 15 20 11 85 136 180 76 12 4.5 55 37 1/2 3/4 225 AMH450 232 1 AMH550 3/4 1 259 AMH650 1 1 1/2 311 5 SeriesAMH (mm)

When the source pressure is 2300 psig (15.9 MPa), achievable delivery pressure is around 129 psig (0.89 MPa). 12 Series AP1400T Single Stage Regulator for Ultra High Purity Intermediate flow (Tied-diaphragm) AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators Option High inlet pressure Changes

1 8 AQ3000 AQ1510 45 33 25 4 21 15 25 8 11 4.3 56 50 12.5 56 , , 1 2 3 4 AQ5000 85 75 18 85 15-12-2

L dimension 11 148 12 160.5 13 173 14 185.5 15 198 16 210.5 17 223 18 235.5 19 248 20 260.5 No. L dimension 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 No.

Display + 12 to 24 VDC 2% F.S.1 digit (25C3C) Display accuracy Black OUT Light up when output is turned ON. (Green) Indicator light Load Enclosure IP40 Environment resistance Blue DC () 3.4 3-wire 25AWG 2 m Lead wire with connector 11

6 Body size If more than one option is required, write option part numbers in the order of K, N. 1 2 3 4 M5 standard 01, 02 standard 03 standard 04 standard Tube size (1) 4 6 8 10 12 04 06 08 10 12 Electroless nickel plated (3) Brass PBT PBT/Stainless steel NBR NBR NBR NBR NBR NBR NBR/Stainless steel Electroless nickel plated Elbow type Control method Meter-out Meter-in 0 With One-touch fitting

Bore size Applicable series 02 03 04 06 10 12 14 20 Note 1) AS800 is available as special.

gaskets/pkg), VQ1000/VQ20/VQ30 VALVE*** $7.22 + Add to Quote Add To Cart Add to Cart SMC VVQ2000-80A-2 gasket set (1=12 gaskets/pkg), VQ1000/VQ20/VQ30 VALVE*** $6.41 +

gaskets/pkg), VQ1000/VQ20/VQ30 VALVE*** $7.22 + Add to Quote Add To Cart Add to Cart SMC VVQ2000-80A-2 gasket set (1=12 gaskets/pkg), VQ1000/VQ20/VQ30 VALVE*** $6.41 +

gaskets/pkg), VQ1000/VQ20/VQ30 VALVE*** $7.22 + Add to Quote Add To Cart Add to Cart SMC VVQ2000-80A-2 gasket set (1=12 gaskets/pkg), VQ1000/VQ20/VQ30 VALVE*** $6.41 +

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gaskets/pkg), VQ1000/VQ20/VQ30 VALVE*** $7.22 + Add to Quote Add To Cart Add to Cart SMC VVQ2000-80A-2 gasket set (1=12 gaskets/pkg), VQ1000/VQ20/VQ30 VALVE*** $6.41 +

gaskets/pkg), VQ1000/VQ20/VQ30 VALVE*** $7.22 + Add to Quote Add To Cart Add to Cart SMC VVQ2000-80A-2 gasket set (1=12 gaskets/pkg), VQ1000/VQ20/VQ30 VALVE*** $6.41 +

gaskets/pkg), VQ1000/VQ20/VQ30 VALVE*** $7.22 + Add to Quote Add To Cart Add to Cart SMC VVQ2000-80A-2 gasket set (1=12 gaskets/pkg), VQ1000/VQ20/VQ30 VALVE*** $6.41 +

gaskets/pkg), VQ1000/VQ20/VQ30 VALVE*** $7.22 + Add to Quote Add To Cart Add to Cart SMC VVQ2000-80A-2 gasket set (1=12 gaskets/pkg), VQ1000/VQ20/VQ30 VALVE*** $6.41 +

gaskets/pkg), VQ1000/VQ20/VQ30 VALVE*** $7.22 + Add to Quote Add To Cart Add to Cart SMC VVQ2000-80A-2 gasket set (1=12 gaskets/pkg), VQ1000/VQ20/VQ30 VALVE*** $6.41 +

gaskets/pkg), VQ1000/VQ20/VQ30 VALVE*** $7.22 + Add to Quote Add To Cart Add to Cart SMC VVQ2000-80A-2 gasket set (1=12 gaskets/pkg), VQ1000/VQ20/VQ30 VALVE*** $6.41 +

gaskets/pkg), VQ1000/VQ20/VQ30 VALVE*** $7.22 + Add to Quote Add To Cart Add to Cart SMC VVQ2000-80A-2 gasket set (1=12 gaskets/pkg), VQ1000/VQ20/VQ30 VALVE*** $6.41 +