Piping: Base Mounted, Stations & Port Location: 3 Stations Type 20, 21, 41 and 42, Port Size: NPTF1/8

Piping: Base Mounted, Stations & Port Location: 5 Stations Type 20, 21, 41 and 42, Port Size: One-touch Fitting for 5/16" Tube

Piping: Body Ported, Stations & Port Location: 6 Stations Type 20, 21, 41 and 42, Port Size: NPTF

Piping: Base Mounted, Stations & Port Location: 6 Stations Type 20, 21, 41 and 42, Port Size: One-touch Fitting for 1/4" Tube

Piping: Base Mounted, Stations & Port Location: 7 Stations Type 20, 21, 41 and 42, Port Size: One-touch Fitting for 5/16" Tube

Piping: Base Mounted, Stations & Port Location: 9 Stations Type 20, 21, 41 and 42, Port Size: One-touch Fitting for 5/16" Tube

Piping: Base Mounted, Stations & Port Location: 9 Stations Type 20, 21, 41 and 42, Port Size: NPTF1/8

Piping: Body Ported, Stations & Port Location: 6 Stations Type 20, 21, 41 and 42, Port Size: NPTF

Piping: Body Ported, Stations & Port Location: 5 Stations Type 20, 21, 41 and 42, Port Size: NPTF

Piping: Base Mounted, Stations & Port Location: 7 Stations Type 20, 21, 41 and 42, Port Size: One-touch Fitting for 1/4" Tube

Piping: Base Mounted, Stations & Port Location: 12 Stations (Type 20, 21, 41, 42), Port Size: One-touch Fitting for 1/4" Tube

Piping: Body Ported, Stations & Port Location: 3 Stations Type 20, 21, 41 and 42, Port Size: NPTF

Piping: Base Mounted, Stations & Port Location: 8 Stations Type 20, 21, 41 and 42, Port Size: NPTF1/8

240

Positioning repeatability: 0.05 mm Possible to set position, speed and force. (64 points) LEF LEJ LEL LEM Rod Type LEPY Series Page 374 Size: 6, 10 LEPY6-25 240 g Weight LEY LES LEPY LEPS LEPY LEPS LER LEH LEY -X5 30 mm 11LEFS 125.6 mm 11LEJS 20.5 mm 25ASlide Table Type LEPS Series Page 383 Size: 6, 10 LEC LEPS6-25 290 g Weight LEC S LEC SS-T LEC Y Linear guide integrated Motorless LAT 41

LMU100/200 Series Mist Spray Unit

T0604 (6 tube) applicable T0425 (4 tube) applicable T0806 (8 tube) applicable AIR OIL AIR BLOW Port size LMV110 How to Order LMV 0 1 1 20 Nozzle tubing length: L Air blow circuit Nozzle tubing construction 20 25 30 35 200 mm 250 mm 300 mm 350 mm LMV220 1 2 Flexible tubing Copper tubing Mixing valve 1 2 Available Not available Construction Dimensions LMV10/With air blow circuit LMV10L 45 41

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

loaded with a differential line driver method is used, it is 10 m or less. 102 Incremental Type Series LECSA Absolute Type Series LECSB Control Signal Wiring Example: LECSB LECSBLECSB Positioning unit 24 VDC Note 2) Note 4) QD75D (Manufactured by CN1 Mitsubishi Electric) Note 4) 21 DICOM CN1 Failure Note 3) DICOM 20 48 ALM RA1 CLEARCOM 14 46 DOCOM Zero speed detection 23 ZSP RA2 CLEAR 13 CR 41

08-ca2wh-e

.: GR-S-010 (10 g), GR-S-020 (20 g) 41

Precision Regulator

rInterface tInterface with bracket 225 173 130 97 129 169 30 eAFM20-A 41 wAF20-A eAFM30-A qIR100--X170 wAF30-A eAFM40-A 50 qIR20--X170 qIR30--X170 wAF40-A 820 Made to Order IR1000/2000/3000 Series With Digital Pressure Switch 7 Manifold Specifications (Except IR2120 and IR3000 series) 8 With digital pressure switch (model no: ISE30A-01--ML).

ITVH

M5 x 0.8 hole Built-in regulator EXH Built-in regulator EXH IRV Solenoid valve EXH 1/4 (Rc, NPT) Port 3 (Exhaust port) VEX 38.5 24 72 41 24 Port 3 (Exhaust port) 58 39 SRH Port 2 (Output port) Port 1 (Supply port) SRP 1/4, 3/8 (Rc, NPT) Port 1 (Supply port) SRF 1/4, 3/8 (Rc, NPT) Port 2 (Output port) ITV 36 IC 36 4 x M5 x 0.8 depth 11 Bracket mounting hole ITVH ITVH Do not block three EXH

48

Bore size Standard stroke A C D FA FB G GA GB GC GD H J JC K L MM ML NN Nil TN TF 20 (16 x 2) 20, 30, 50 100, 150 38 27.5 8 7.5 3 22 12.5 7.5 11 83 11 3 11 14 M4 x 0.7 10 M4 x 0.7 25 (20 x 2) 39.5 28 10 8.5 3 26 12 7.5 11 93 13 4.5 13 17 M5 x 0.8 12.5 M5 x 0.8 32 (25 x 2) 25, 50, 100 150, 200 44.5 30 12 11.5 3 32 15 7.5 13 109 16 8 16 21 M6 x 1 15 M6 x 1 40 (32 x 2) 54 37 16 13 4 41