Regulator Unit Combination: [Other FRL Combination Devices] Soft Start Up Valve, Port Size: NPT1, Filter Rating: 5μm, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge

Regulator Unit Combination: [Other FRL Combination Devices] Soft Start Up Valve, Port Size: NPT1, Filter Rating: 5μm, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: Presence, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure

Regulator Unit Combination: [Other FRL Combination Devices] Soft Start Up Valve, Port Size: NPT1, Filter Rating: 5μm, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge

Regulator Unit Combination: [Other FRL Combination Devices] Soft Start Up Valve, Port Size: NPT1, Filter Rating: 5μm, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: Presence, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure

Regulator Unit Combination: [Other FRL Combination Devices] Soft Start Up Valve, Port Size: NPT1, Filter Rating: 5μm, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge

Body Size: Applicable to AC50/AC60, Handle Operation: Single Action, Thread Type: NPT, Port Size: 1, Mounting: w/Bracket, Silencer: w/Built-in Silencer, EXH Port, Handle Color: Red, Handle Material: Resin, Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: psi

Body Size: 60, Back Flow: K (w/Backflow Function), Thread: N (NPT), Port Size: 10 (1), Mounting: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Pressure Units: Z (Unit on Product Label: psi, °F, Pressure Gauge: MPa/psi Dual scale)

Body Size: 60 (1), Thread: N (NPT), Port Size: 10 (1), Mounting: w/o Mounting, Flow Direction: Left to Right, Pressure Unit: Z (Name Plate and Caution Plate for Bowl in Imperial Units: psi, °F)

Body Size: 5000, Thread: N (NPT), Port Size: 10 (1), Option: None, Voltage: 4 [220 VAC (230 VAC)], Lead Wire: D (Type D, DIN Terminal w/Connector), Surge Suppressor: Z (with Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Flow Direction/Pressure Unit: Z (Name Plate and Pressure Gauge in Imperial Units)

Pressure Gauge/Digital Pressure Switch: w/o Pressure Gauge, Attachment: V (Mounting Position: AF + AFM + AR + V), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type + Lubricator: Standard (Polycarbonate Bowl + Lubricator), Bowl Guard: None, Air Filter Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Z

Body Size: 5000, Port Thread: N (NPT), Port Size: 10 (1), Option: None, Voltage: 5 (24 VDC), Electrical Entry: D (Type D, DIN Terminal w/Connector), Surge Suppressor: None or Manual Override, Flow Direction, Pressure Unit: Z (Name Plate and Pressure Gauge in Imperial Units)

Body Size: 60, Thread: N (NPT), Port Size: 10 (1), Option: w/o Bracket; w/o Auto Drain, Semi-Standard 1: Standard, Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F), Made to Order: X2141 (w/Element Service Indicator)

Vacuum Equipment

Pad selection 1-A Theoretical lifting force 1-B Calculation method: Pad diameter 2.

HRX-OM-W069

Both ends of the communication connection (the end nodes) need to be connected to the higher level computer. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers.

VDW Series

(the value under the prescribed conditions) 0.8 0.7 0.6 Subsonic Critical pressure 0.5 0.4 0.45 0.45 Sonic 0.4 0.4 0.35 0.35 0.3 0.3 0.3 0.25 0.2 0.25 0.2 0.2 0.15 0.15 0.1 0.05 0.1 0.1 0.05 S = 0.54 VDW101 10 60 50 40 30 20 10 20 VDW 1.6 S = 1.2 125 100 75 50 S = 3.2 VDW202.3 350 300 250 200 150 100 50 S = 5.8 VDW203.2 600 500 400 300 200 100 S = 2.8 VDW302 300 250 200 150 100 50 VDW303

AZ1000

(ASME B40.1 Grade B or better) Accuracy psig/bar 4) (No code) ASME B40.1 level IV No oil Stainless steel Polycarbonate 316L SS 316L SS Cleanliness No oil Case Window Socket Bourdon tube Material S SH 1.14 (29) 2.28 (57.8) MPa MPA 2 (50.7) 1.94 (49.3) 0.73 (18.5) NPT 1/4 inch (mm) 1) If one prefers shipment with the pressure gauges installed on the regulator, the material of gasket to be used

PA3000/5000/PAX1000

FLUID OUT) Pump chamber B Pump chamber A Check valve Shaft Suction port (FLUID IN) Diaphragm B Diaphragm A Drive chamber A Drive chamber B Control unit 1.

Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

B-1 A-1 B-2 A-2 B-3 A-3 Connector C terminal no. Signal Cable color S Standard cable Brown Red Orange Yellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

CC

92 125 139 11/4 3/4 7 20 2 46 185 0 29 93 60 183 180 144 185 202.5 L dimension 600 700 800 Effective oil level stroke (mm) 50 100 200 300 400 500 CCT63-l 228.5 278.5 378.5 503.5 603.5 728.5 s s s CCT100-l 286 386 511 611 736 836 s s s CCT160-l 399 524 624 749 849 949 1049 s s * Hexagon socket head cap screw is used for mounting.

NCA1

AB AH AO AT B E EE LF+ P+ S SA+ WF XA+ 500 (5") 1.000 3/4-16 1.13 .63 2.75 .63 .19 1.500 5.50 1/2 NPT 4.50 2.88 4.25 7.88 1.38 7.25 600 (6") 1.375 1-14 1.63 .75 3.25 .63 .19 2.000 6.50 3/4 NPT 5.00 3.13 5.25 8.50 1.63 8.00 800 (8") 1.375 1-14 1.63 .75 4.25 .69 .25 2.000 8.50 3/4 NPT 5.13 3.25 7.13 8.75 1.63 8.56 MS2 Side lug style (S) LF + Stroke WF A P + Stroke 2-EE KK B MM LH ST TS SB