Table of Contents

AS321FE AS331FE AS421FE AS431FE Model 8 10 6 8 10 12 12 10 6 8 10 Tubing O.D.

VQ4000

A A 215 15 P = 25 44 L1 L2 B 2 A 4 5 B 2 A 4 5 L1 L2 B 2 A 4 26.5 38 50.5 P = 25 4 26.5 38 50.5 P = 25 B 2 A 4 4 B B Indicator light B B B 2 A 4 3 B 2 A 4 3 P = 25 B 2 A 4 2 B 2 A 4 2 B 2 A 4 1 B 2 A 4 1 44 Stations X Indicator light Manual override Stations U side D side U side D side 12 16.5 43.5 12 16.5 43.5 D side entry (LD) AMC610-10 Exhaust cleaner 29 215 AMC610-10 Exhaust cleaner

LG1H

Bottom Mount LG1H20/ Without coupling LG1H21/ With coupling 95() 95(160) A() B() 95() 95(170) A() B() 10 95(140) 95(150) 10 30 30 A A B B A B B A Stroke Stroke Stroke Stroke 700 570 700 580 655 100 645 100 800 670 800 680 155 755 200 80 745 145 200 70 900 770 900 780 855 255 300 180 245 845 300 170 1000 870 1000 880 355 955 400 280 945 345 400 270 1200 1070 1200 1080 1155 455 500 380

High Purity Fluoropolymer

Class Size combination Applicable tubing size (mm) 4 x 3 3 x 2 6 x 4 4 x 3 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 12 x 10 10 x 8 19 x 16 12 x 10 19 x 16 12 x 10 25 x 22 19 x 16 25 x 22 19 x 16 Connection threads Symbol 1 2 2 2 2 2 2 3 3 3 3 4 4 4 4 5 5 5 5 6 6 6 6 Connection threads A A B C D E F A B C D A B C D A B C D A B C D Applicable tubing size (inch) No.

VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

Series VQ Base Mounted Metal Seal/Rubber Seal

B) for respective stations of the manifold. The optional specification permits mixture of single and double wiring. See p.1. 10-160 for details. (+) () 9A 9 stations (+) () 9B Hook groove b on shaft a and close the cover.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

material Seal material Port size Thread type Rated voltage Electrical entry Oil-free option Bracket option JSXD61 C N 10 R 1 CS None None S F N 2 D B E F 3 4 5 6 7 8 B J JSXD61 Series/Valve type Body material Seal material Port size Thread type Rated voltage Electrical entry Oil-free option JSXD71 B N 12 R 1 CS None F N 2 D E F 3 4 5 6 7 8 B J JSXD71 49 Table of UL-compliant Products

Refrigerated Air Dryers

Applicable air dryer Capacity Type Inlet voltage Outlet voltage A B C D E F Weight IDF-TR500-3 IDF1E-10 to 8E-10 IDU3E-10, 4E-10, 8E-10 500 VA 380, 400, 415 VAC (50 Hz) 380 to 420 VAC (60 Hz) 100 VAC (50 Hz) 110 VAC (60 Hz) 15 kg IDF-TR1000-3 IDF11E-10, 15E1-10 IDU6E-10, 11E-10, 15E1-10 1 kVA Singlephase Singleturn 230 207 190 210 160 9 IDF-TR500-4 IDF1E-10 to 8E-10 IDU3E-10, 4E-10, 8E-10

Intrinsically Safe Valve

Class I, II, III Division 1 Groups A, B, C, D, E, F, G Class I Division 1 Groups A, B, C, D Hazardous Locations Warning Note) Do not install in Zone 0 (as defined in IEC 60079-10-1: 2008) or Zone 20 (as defined in IEC 60079-10-2: 2009) (Refer to page 40 for details) Note) Based on dynamic performance test, JIS B 8375-1981.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

screw 103.3 (131.5) A 4 SMC 37.6 53.6 B 2 18.5 12 12 e d i s U e d i s D Stations 1 2 3 4 5 6 7 8 n One-touch fitting [3(R), 1(P) port] Applicable tubing O.D.: 10 10 Lead wire length: L0, 0.6 m L1, 1.5 m L2, 3.0 m For top ported R 3 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 62.1 41.7 25.7 39.4 (58) 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 20.9 P 1 P=17.5 48.8 30 7.5 One-touch fitting [4(A), 2(B) port] Applicable

5 Port Air Operated Valve Series SYA3000/5000/7000 1

B 11 17.5 1 (Bleed port) VA 1.5 A B M3 x 0.5 (Piping port) 1.5 1.5 33 36 SA Manual override B P R R (35) 7 7 36 (2) VA 7 (13.5) 28.5 15 A 1 (Bleed port) 21 R2 P R1 13 VM Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4 8.2 15 10 10 10 M5 x 0.8 (Piping port) 11 14

Prevents Micro-Bubbles

VDW Symbol Port B (OUT) different dia. size Symbol 2 3 4 Body class 2 3 4 Orifice dia. 4 8 10 Metric sizes Symbol Nil Application Ports A & B same size VQ 04 06 08 10 12 4 6 8 10 12 Different diameter tubings can be selected within the same body class.

Plug-in Unit

) A B A B A B A B A A A B 143 9 9 10 143 (32) (98.8) 10 163 101 Mounting hole for 2-M5, with input block only Input block SI unit n 1 2 3 4 5 6 7 Stations D-side 8 U-side Formulas: L1 = 25n + 106, L2 = 25n + 241 (For 1 input block.

5 Port Solenoid Valve, Series VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

VQ5000

A void A void A void A void A void A B A B A B A B A B A A A B A B A B A A A A 6 7 8 9 10 11 12 13 14 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 15 0 0 1 2 3 4 5 SC type OMRON SYSBUS wire system compatible SD type Sharp Satellite I/O link system compatible Terminal block (LED) nomenclature ADDRESS NO. STATION NO.

IDG

30 40 0 40 80 120 160 100 0 200 300 Outlet air flow rate (l/min (ANR)) Outlet air flow rate (l/min (ANR)) IDG30H (Type B products group) IDG50H (Type B products group) P1 = 0.3 MPa 0 P1 = 0.3 MPa 0 Outlet air atmospheric pressure dew point (C) Outlet air atmospheric pressure dew point (C) P1 = 0.5 MPa P1 = 0.5 MPa 10 10 P1 = 0.7 MPa P1 = 0.7 MPa 20 20 HA 30 30 AT 40 40 ID 50 50 600 0 200

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

A void A void A void A void A void A B A B A B A B A B A A A B A B A B A A A A 6 7 8 9 10 11 12 13 14 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 15 0 0 1 2 3 4 5 SC type OMRON SYSBUS wire system compatible SD type Sharp Satellite I/O link system compatible Terminal block (LED) nomenclature ADDRESS NO. STATION NO.

T

The value at temperature of 20C. 15-6-18 1 Clean Series Tubing Series 10Polyurethane Tubing: Series 10-TU For details, refer to Pneumatic Clean Series catalog. 20 TU0425 10 BU Model/Specifications 20 m roll Tubing size Metric size (Series TU) K Color 10-TU1208 10-TU1065 10-TU0805 10-TU0604 10-TU0425 Tubing O.D. (mm) Model Clean series M B Black 8 10 5 6.5 12 8 2.5 6 4 4 Tubing I.D.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

SMC SMC B A 3 1 5 Cover diameter 1.6 Cross section 0.34mm2 Manual override 42 36 3 M5 X 0.8 External pilot port (Only external pilot style(R)) (47.5) 46.5 40.5 A, B port R1 R2 20 14.6 12 10 10 P 7.2 M5 X 0.8 (Not applicable to standard model.) 5-Rc(PT)1/8 (P, A, B, R1, R2 port) 2-PE port 1.1 13.4 13.4 0 1 0 1 L plug connector (L): VQZ125 (R)lLl01 M plug connector (M): VQZ125 (R)lMl01 Indicator

Series IDG

(G) B D Purge air discharge tubing port for dehumidification Applicable tube O.D.: J (NPT thread: K inch) Purge air for dehumidification Purge air for dehumidification (Maintenance space 100mm or more) Option: P Port size L A B C D E Model F G J H K 97 224 8 119 [126] 5/16 114 249 10 147 [154] 3/8 83 187 53 165 62 113 212 54 190 82 IDG10, IDG10H IDG20, IDG20H Values inside [ ] are for NPT