Size: 3/4, Thread: M Thread, Rc(PT), Port Size: 3/4, Accessory: Round Pressure Gauge w/Color Ring, Attachment: Pressure Switch + T Spacer, Option 1: -, Option 2: -, Option 3: -
Size: 3/8, Thread: M Thread, Rc(PT), Port Size: 3/8, Accessory: Round Pressure Gauge, Attachment: Pressure Switch + T Spacer + Residual Pressure Relief 3 Port Valve, Option 1: Lubricator w/Drain Cock + Nylon Bowl, Option 2: -, Option 3: -
Size: 3/8, Thread: M Thread, Rc(PT), Port Size: 3/8, Accessory: None, Attachment: Pressure Switch + T Spacer + Residual Pressure Relief 3 Port Valve, Option 1: Lubricator w/Drain Cock + Nylon Bowl, Option 2: -, Option 3: -
Size: 1/8, Thread: M Thread, Rc(PT), Port Size: 1/4, Accessory: Digital Pressure Switch, Output: PNP; Electrical Entry: Top, Attachment: Check Valve + T Type Spacer + 3 Port Residual Pressure Release Valve, Option 1: Metal Bowl, Option 2: None, Option 3: Digital Pressure Switch w/Unit Change Function
Size: 3/4, Thread: NPT, Port Size: 3/4, Accessory: D+M, Attachment: T Spacer, Option 1: Metal Bowl + Lubricator w/Drain Cock, Option 2: None, Option 3: Name Plate, Caution Plate for Bowl, and Pressure Gauge: PSI, °F
Size: 1/4, Thread: NPT, Port Size: 1/4, Accessory: D+M, Attachment: T Spacer + 3 Port Residual Pressure Relief Shut-off Valve, Option 1: Metal Bowl w/Level Gauge, Option 2: None, Option 3: Name Plate, Caution Plate for Bowl, and Pressure Gauge: PSI, °F
Size: M5, Thread: M Thread, Rc(PT), Port Size: M5 x 0.8, Accessory: Float Style Auto Drain, N.C., Attachment: T Spacer, Option 1: Lubricator w/Drain Cock, Option 2: Non-relieving, Option 3: -
Size: M5, Thread: M Thread, Rc(PT), Port Size: M5 x 0.8, Accessory: C+G, Attachment: T Spacer, Option 1: Lubricator w/Drain Cock, Option 2: Non-relieving, Option 3: -
Size: M5, Thread: M Thread, Rc(PT), Port Size: M5 x 0.8, Accessory: Float Style Auto Drain, N.C., Attachment: T Spacer, Option 1: Lubricator w/Drain Cock, Option 2: -, Option 3: -
Size: M5, Thread: M Thread, Rc(PT), Port Size: M5 x 0.8, Accessory: Float Style Auto Drain, N.C., Attachment: T Spacer, Option 1: Lubricator w/Drain Cock, Option 2: Flow Direction: Right->Left, Option 3: Name Plate, Caution Plate for Bowl, and Pressure Gauge: PSI, °F
Size: 1/2, Thread: M Thread, Rc(PT), Port Size: 3/8, Accessory: Float Type Auto Drain, N.O., Attachment: T Spacer, Option 1: 0.2MPa + Metal Bowl + Lubricator w/Drain Cock, Option 2: -, Option 3: -
Size: M5, Thread: M Thread, Rc(PT), Port Size: M5 x 0.8, Accessory: None, Attachment: T Spacer, Option 1: 0.2MPa + Lubricator w/Drain Cock + Nylon Bowl, Option 2: Flow Direction: Right->Left, Option 3: Name Plate, Caution Plate for Bowl, and Pressure Gauge: PSI, °F
Size: 1, Thread: M Thread, Rc(PT), Port Size: 1, Accessory: Float Type Auto Drain, N.O., Attachment: T Spacer, Option 1: Lubricator w/Drain Cock, Option 2: Flow Direction: Right->Left, Option 3: -
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The product should be operated after thoroughly reading the manual and understanding its contents. 530 Slit Valve XGT Series Construction i u w q !2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
If the piping diameter is reduced, it may lead to insufficient flow of supply air, reduction of suction flow and reduction in the vacuum pressure. 1 The values indicating characteristics are representative values, and may vary depending on the atmospheric pressure (weather, altitude, etc.). 2 Supply pressure: 0.45 MPa Construction Model Selection Caution q t w r e y 1.
Body Size: 30, Thread: Rc, Port: 3/8, Option: M [Round type pressure gauge (with color zone)], Attachment: T-spacer, Semi-Standard 1: Standard, Semi-Standard 2: Drain Cock w/Barb Fitting for ø6 x ø4 Nylon Tube
Body Size: 30, Thread: Rc, Port: 3/8, Option: D + M, Attachment: T Spacer, Semi-Standard 1: Metal Bowl w/Level Gauge, Semi-Standard 2: Standard
Body Size: 25, Thread: NPT, Port: 1/4, Option: D + M, Attachment: T + V, Semi-Standard 1: Metal Bowl w/Level Gauge, Semi-Standard 2: Name Plate, Caution Plate for Bowl, and Pressure Gauge: psi, °F