Manifold Type: 5 (Base Mounted), Stations: 02, Port Size: M5 (M5 x 0.8)
g) Flow rate( /min (ANR))Effective area (mm2)Flow rate( /min (ANR))Effective area (mm2)AS1000-M3M3 x 0.5200.3200.32.5, 4, 64.7
)Weight (g) Flow rate( /min (ANR))Effective area (mm2)Flow rate( /min (ANR))Effective area (mm2)AS1000-M5M5 x 0.8901.4801.26, 10, 16, 20, 2533
rate( /min (ANR))Effective area (mm2)Flow rate( /min (ANR))Effective area (mm2)AS1000-M5M5 x 0.8901.4801.26, 10, 16, 20, 2533
Adapter Material: Brass, Standard, Pad Diameter: ø2, Pad Type: U (Flat), Pad Material: N (NBR), Mounting Thread Size: A6 (M6 x 0.75, Male Thread), Vacuum Inlet: 02 (øTubing)
Adapter Material: Brass, Pad Diameter: ø1.5, Pad Type: U (Flat), Pad Material: N (NBR), Mounting Thread Size: B3 (M3 x 0.5, Female Thread), Vacuum Inlet: 02 (ø2, One-touch Fitting)
Adapter Material: Brass, Pad Diameter: ø6, Pad Type: B (Bellows), Pad Material: GN (Conductive NBR), Mounting Thread Size: B5 (M5 x 0.8, Female Thread), Vacuum Inlet: 02 (ø2, One-touch Fitting)
Process Pump <Fluororesin Type> Series PA3000 Suction port 2 Series PA3000 How to Order PA 3 3 1 0 03 Assembly environment Standard Clean room Nil P Option Body material Nil Body only With foot With silencer (for automatic operation type only) 3 Fluororesin B N* Diaphragm material 1 PTFE * With silencer AN200-02 for AIR EXH. AN200-N02 for NPT.
Port size Body size Thread size Port thread Symbol N F Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 An interface part is required if a spacer or spacer with bracket shown in the table below is attached to a modular FRL.
Number of Ports: 3 Port, Piping Direct., Plunger Length: 3 (Bottom Ported, Short), Body Option: Side Mounting, Port Size: M5 (M5 x 0.8, Bottom Ported Only), Actuator Type: 02 (One Way Roller Lever), Suffix: S (Hard Steel Roller), Indicator: None
Number of Ports: 3 Port, Piping Direct., Plunger Length: 3 (Bottom Ported, Short), Body Option: Side Mounting, Port Size: M5 (M5 x 0.8, Bottom Ported Only), Actuator Type: 02 (One Way Roller Lever), Suffix: None, Indicator: None
Model: 10-SY3000, Stations: 02, A, B Port Size: M5 x 0.8, Thread: -
Manifold Type: Base Mounted, Stations: 02, Port Size: M5 x 0.8
Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Indicator Direction: None (0°), Thread: R, Port Size: U10/32 (U10-32UNF), Width Across Flats: 9mm, Tubing: 02 (ø2)
Number of Ports: 2 Port, Piping Direct., Plunger Length: 3 (Bottom Ported, Short), Body Option: Side Mounting, Port Size: M5 (M5 x 0.8, Bottom Ported Only), Actuator Type: 02 (One Way Roller Lever), Suffix: S (Hard Steel Roller), Indicator: None
Number of Ports: 2 Port, Piping Direct., Plunger Length: 3 (Bottom Ported, Short), Body Option: Side Mounting, Port Size: M5 (M5 x 0.8, Bottom Ported Only), Actuator Type: 02 (One Way Roller Lever), Suffix: None, Indicator: None
Valve Direction: Single Solenoid on Opposite Side of A and B Ports, Stations: 02, A, B Port Size: M5 (M5 x 0.8)
Valve Direction: Single Solenoid on Opposite Side of A and B Ports, Stations: 02, A, B Port Size: M5 x 0.8
.: 02 [ø2), Port Size Applicable Tube: 04A, X Option: -