MXS Series Air Slide Table

200 160 120 80 40 200 0 0 100 150 200 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf 20 20 20 Lr=122mm 0.040 0.05 0.10 0.035 MXS20-125 MXS20-150 MXS20-100 MXS20-150 MXS20-75 MXS20-50 MXS20-40 MXS20-30 MXS20-20 MXS20-10 0.04 0.08 MXS20-125 MXS20-150 MXS20-100 MXS2075 MXS2050 MXS2040 MXS20-125 MXS20-100 0.030 Table deflection mm Table deflection mm Table deflection mm

CXWM/CXWL

Bore size/Stroke (mm) Data 10 25, 50, 75, 100 16 25, 50, 75, 100, 125, 150, 175, 200 End lock 20 25, 50, 75, 100, 125, 150, 175, 200 25 25, 50, 75, 100, 125, 150, 175, 200 R End lock 32 (25), 50, 75, 100, 125, 150, 175, 200 Nil None Note 1) For (25) stroke, the shock absorber is mounted on a single side of the plate.

Series SV

-01-06 AS2200-01 100 50 0 ANA1 -C08 T0604 200 CM2 32 150 Stroke mm AS2201F -01-06 AS2200-01 100 50 0 200 CM2 40 150 Stroke mm AS2201F -02-06 AS2200-02 100 50 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details regarding different conditions, make determinations after using the SMC

53

Page 150 Circulating Fluid Typical Physical Property Values ... Page 150 Options With Earth Leakage Breaker . Page 145 Specific Product Precautions . Page 151 With Automatic Fluid Fill Function . Page 145 Applicable to Deionized Water Piping . Page 145 Conforming to CE/UL Standards .

LEY-OM007

200 250 300 30 50 100 150 200 250 300 350 400 30 50 100 150 200 250 300 350 400 450 500 (kg) 0.580.62 0.73 0.87 0.98 1.09 1.20 1.181.25 1.42 1.68 1.86 2.03 2.21 2.382.56 2.09 2.20 2.49 2.77 3.17 3.46 3.74 4.03 4.32 4.60 4.89 LEY 16 D LEY 25 D LEY 32 D [mm] 1) 30 50 100 150 200 250 300 30 50 100 150 200 250 300 350 400 30 50 100 150 200 250 300 350 400 450 500 (kg) 0.580.62 0.73 0.87 0.98

Table of Contents

0.5 1.0 2.2 230 150 VXA3135-00 VXA3235-00 VXA3245-00 3 230 4 Note) Add the V type (VXA31) 80 g, (VXA32) 130 g Refer to Glossary on page 17-3-15 for details of max. operating pressure differential and max. system pressure.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Max. operating frequency (Hz) 5 Symbol 3 position 3 Non-locking push type Manual override Series 10-SV1000/2000/3000/4000 Push-turn locking slotted type Internal pilot Main/Pilot valve common exhaust Pilot exhaust method 2 position single External pilot Pilot valve individual exhaust (A)4 2(B) Lubrication Not required Mounting orientation Unrestricted Impact/Vibration resistance (m/s2) 150

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 200 to 1000 150 to 1000 150 to 700 150 to 700 866 Sine Cylinder 1011-REC 1011Rod flange (F): RECF 2 x P (Rc, NPT, G) H2 Width across flats B2 2 x NN G Relief port M5 x 0.8 G I Width across flats B1 H1 Standard port Relief port Eh8 D FY B MM AL K NA FT 4 x 7 A FX Mounting hole N Z N F FZ S + Stroke H ZZ + Stroke 40 Standard port Relief port (mm) H G FZ

0.4

Formula: L1 = 10.5n + 45, L2 = 10.5n + 93.5 n: Stations (Maximum 16 stations) n L 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 L2 L3 L4 55.5 66 76.5 87 97.5 108 118.5 129 139.5 150 160.5 171 181.5 192 202.5 213 104 114.5 125 135.5 146 156.5 167 177.5 188 198.5 209 219.5 230 240.5 251 261.5 125 137.5 150 162.5 175 187.5 187.5 200 212.5 225 237.5 250 250 262.5 275 287.5 135.5 148 160.5 173 185.5

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Switch (When equipped with switch) Internal Pilot Manifold L Dimension n: Stations External Pilot Manifold L Dimension n: Stations L n 4 160.5 150 129 16 L n 4 173 162.5 139.5 17 2 135.5 125 108 14 3 148 137.5 118.5 15 5 173 162.5 139.5 17 6 185.5 175 150 18 7 185.5 175 160.5 12.5 8 198 187.5 171 13.5 9 210.5 200 181.5 14.5 10 223 212.5 192 15.5 2 148 137.5 118.5 15 3 160.5 150 129 16 5 185.5

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Refer to pages 166 and 167 for external pilot specifications and built-in silencer. 150 Base Mounted 10-SY3000/5000 Type 45 Note) AC-type models that are CE-compliant have DIN terminals only.

Series AP500

psig (1.0 MPa) 100 0.69 80 0.55 Delivery pressure (MPa) Delivery pressure (psig) 60 0.41 40 0.28 20 0.14 0 0.00 0 50 100 150 200 250 300 350 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

MNB

50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 187.5 187.5 701 to 750 73 81 89 89 101 101 1 to 50 86 94 102 102 114 114 51 to 100 98 106 114 114 126 126 101 to 150 111 119 127 127 139 139 201 to 300 161 169 177 177 189 189 301 to 400 186 194 202 202 214 214 401 to 500 227 227 239 239 501

SV

01 AS2201F -02-08 AS2200-02 100 200 50 100 0 0 SV100 ANA1 -C08 T0604 SV200 ANA1 -C10 T0806 200 CM2 32 400 MB 50 300 150 Stroke (mm) Stroke (mm) AS2201F -01-06 AS2200-01 AS3201F -02-08 AS3000-02 200 100 100 50 0 0 200 CM2 40 400 MB 63 150 300 Stroke (mm) Stroke (mm) AS2201F -02-06 AS2200-02 100 AS4000-03 200 50 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer

Table of Contents

200 250 0 50 100 150 200 250 Supply pressure (kPa) Supply pressure (kPa) Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.5 Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.5 0.6 0.4 0.5 mm 0.25 mm 0.5 Detection distance (mm) Detection distance (mm) 0.3 0.4 0.3 0.2 0.15 mm 0.2 0.15 mm 0.1 0.1 0.03 mm 0.01 mm 0 0 0 50 100 150 200 250 0 50 100 150 200 250 Supply pressure

7

Note2) The standard strokes of CKG1 are 50, 75, 100, 125 and 150 mm.

ZP

8 14 40 33 20 52 7 17 150 250 155 40 4 x 14 4 x 9 88 4 x 16 4 x 10 34 Symbol/Type HB: Heavy-duty (Bellows) Heavy-duty Pad 32, 150 Pad diameter For heavy or large work pieces How to Order ZP2 32 HB N Pad unit Pad diameter Pad material Symbol Pad diameter 32 150 Symbol Material NBR Silicone rubber FKM CR 32 150 N S F C Note) Silicone rubber is only applicable to the 32 pad.

240

0.8 1 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 200 200 200 200 Me 150 150 150 150 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 100 100 100 100 Wall Y L5 50 50 50 50 0 0.2 0.4 0.6 0.8 1 0 0 0 0 0 0.2 0.4 0.6 0.8 1 0.0 0.4 0.8 1.2 1.6 2.0 Work load [kg] 0.0 0.4 0.8 1.2 1.6 2.0 Work load [kg] Work load [kg] Work load [kg] 200 200 200 200 160 160 160 160 L6 L6 [mm] L6 [mm] L6 [mm] L6

Environment

200 250 300 350 400 30 50 100 150 200 250 300 350 400 450 500 LC3F2 Product weight [kg] Step motor 1.45 1.52 1.69 1.95 2.13 2.30 2.48 2.65 2.83 2.48 2.59 2.88 3.35 3.64 3.91 4.21 4.49 4.76 5.04 5.32 Servo motor 1.41 1.48 1.65 1.91 2.09 2.26 2.44 2.61 2.79 Weight: In-line Motor Type Model LEY25D LEY32D Stroke [mm] 30 50 100 150 200 250 300 350 400 30 50 100 150 200 250 300 350 400 450 500

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Base mounted Series CJ2 Series CM2 Series CM2 Pressure: 0.5 MPa Load ratio: 50% Stroke: 300 mm Tube bore x Length TU0425 x 1 m VQD1151U Speed controller AS1201F-M5-04 AS2201F-02-04 Silencer AN120-M5 Average speed (mm/s) Series 6 10 16 20 25 32 40 400 450 500 Perpendicular, upward actuation Horizontal actuation 350 300 250 200 150