3 Port Solenoid Valve/

M12 connector pin number X X VP544(R)/744(R)-X538 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) 1(P) 1(P) 1(P) X X VP544(R)/744(R)-X555 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r 3(R) w q e 3(R) w q e w q e

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Series PSE digital pressure switches allow pressure to be controlled from a remote location.  Series PSE510 is compact and lightweight, allowing the sensor to be mounted where needed. The use of stainless steel for all wetted parts (SUS630 for diaphragm, SUS304 for fitting) allows the PSE520 pressure sensor to be used in a wide variety of gas and fluid applications. Pressure sensor controller

ITV_D-E

U se D C pow er suppl y w i t h suf f i ci ent capaci t y and a l ow ri ppl e. Turn of f t he pow er suppl y t o rem ove and i nsert t he connect or.

Electric Actuator Triple Axis P&P Unit

Weight of body without motor (kg) Stroke (mm) Y / Z axis in-line mount Y / Z axis side mount 100 4.2 4.7 150 4.6 5.1 200 5.0 5.5 250 5.4 5.9 300 5.8 6.3 350 6.2 6.7 400 6.6 7.1 450 7.0 7.5 500 7.4 7.9 550 7.8 8.3 Stroke (mm) Y / Z axis in-line mount Y / Z axis side mount 600 8.2 8.7 650 8.6 9.1 700 9.0 9.5 750 9.4 9.9 800 9.8 10.3 850 10.2 10.7 900 10.6 11.1 950 11.0 11.5 1000 11.4 11.9 4

3 Port Solenoid Valve/

M12 connector pin number X X VP544(R)/744(R)-X538 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) 1(P) 1(P) 1(P) X X VP544(R)/744(R)-X555 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r 3(R) w q e 3(R) w q e w q e

ZPT/ZPX

Vacuum Entry with Buffer Construction Series ZPT Series ZPX y o t y o ZX Component Parts r e i No.

e

Coordinates and moments Load mass and static moment Horizontal mounting Wall mounting Ceiling mounting z M1 M3: Yawing M2 M3 M1 M2 M2 y m1 x g X x z Y y m2 x g m3 x g x X x X Z Y M1: Pitching Horizontal mounting Ceiling mounting Wall mounting m1 m2 m3 Mounting orientation y Static load (m) x M2: Rolling m1 x g x X m1 x g x Y m2 x g x X m2 x g x Y M1 m3 x g x Z m3 x g x X g: Gravitational

CA2

7 i q r e y @2 t !8 !9 !6 !1 !2 !4 !5 !0 !

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

After placing the tubing y in the holder assembly i, push it onto the insert bushing t until it stops and clamp it with the hook o. 3 o Hook e Base Caution y Tubing When the tubing y is curved, straighten it out before using it. t Insert bushing q Lever pin The tubing y may slip if there is oil or dust, etc., on the holder assembly i.

MY1

X m3 x g m2 x g Vertical mounting Mounting orientation Horizontal mounting Ceiling mounting Wall mounting Vertical mounting M3 Static load (m) m1 m2 m3 m4 Note) M1 Static moment M1 m1 x g x X m2 x g x X m4 x g x Z z y M2 m1 x g x Y m2 x g x Y m3 x g x Z Y Z M3 m3 x g x X m4 x g x Y m4 x g Note) m4 is a mass movable by thrust.

CV/MVGQ

Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

CV/MVGQ

Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

g Vertical mounting Mounting orientation Horizontal mounting Ceiling mounting Wall mounting Vertical mounting m1 m2 m3 m4 Note) M3 Static load (m) M1 M1 m1 x g x X m2 x g x X m4 x g x Z Static moment z y Y M2 m1 x g x Y m2 x g x Y m3 x g x Z Z M3 m3 x g x X m4 x g x Y m4 x g Note) m4 is a weight movable by thrust.

Air Cylinder Series CA2

3 y e q w !7 r !4 !8 !6 !2 t u !5 o !1 !

LVQ

u PA PA y SMC A B SMC A B A B A B Description No.

Environment

How to Order S 2 B P H S4 200 LEY 63 A2 w y !0 i o e r t q u !1 !2 !3 !

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

x Y m2 x g x Y m3 x g x Z Z M3 m3 x g x X m4 x g x Y m4 x g Note) m4 is a weight movable by thrust.

Actuator Position Sensor

3 1 R/W 0x003C BDC1 2 R/W SetPoint2 bit(0) 16 bit 3 Y 3 (60) Logic bit(24) 8 bit 0 Y 4 1 R/W 0x003D 2 R/W Mode bit(16) 8 bit 0 Y 5 BDC1 (61) 3 R/W Hysteresis bit(0) 16 bit 10 Y 1 to 400 SetPoint1 bit(16) 16 bit 3 Y 3 1 R/W 0x003E BDC2 2 R/W SetPoint2 bit(0) 16 bit 3 Y 3 (62) Logic bit(24) 8 bit 0 Y 4 1 R/W 0x003F 2 R/W Mode bit(16) 8 bit 0 Y 5 BDC2 (63) 3 R/W Hysteresis bit(0) 16 bit 10 Y

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) D Model B d H C SNJ-015A Y M10 x 1 3 14 16.2 E SN-015A M14 x 1 5 19 21.9 SNJ-010A M8 x 1 3 12 13.9 C A B Ball joint type: 40, 50 D E Y C A B (mm) D E Y ZP10F Model B A C 1.5 6.5 10 12 ZP13F 13 15 3 8.2 2 7 ZP16F 16 18 ZP20F 20 22 8.5 ZP25F 3 25 28 4 10.2 ZP32F 9 32 35 ZP40F 5 13 40 43 10 28 ZP50F 6 14 50 53 8 13-11-101 6 Vacuum Pad: Ball Joint Type Vertical Vacuum Entry Without Buffer