Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Fittings & Tubing Air Cylinders Rotary Actuators ARP20(K) 1021 ARP20(K) 1021 Rc1/4 0.50 0.25 0.45 0.40 Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point 0.30 0.20 0.25 0.20 0.15 0.10 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 50 100 150 200 250 300 Flow rate (L/min (ANR)) Inlet pressure (MPa) 1021 1021 ARP30(K) ARP30(K) Rc3/8 0.50 0.25 0.45 Air Preparation Equipment 0.40

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

Effective thread length T (R) D X Mounting nut Width across flats C F N ZZ + Stroke S + Stroke W K N F I NA TT 6 T Model MM L K J I H G F E D C B A S NN NA 34 N R 12-REA25 12-REA32 12-REA40 8 46 32 26.4 2 13 7.5 20.5 8 10 70 15 M5 x 0.8 18.5 30 M26 x 1.5 111 10 8 60 32 33.6 2 16 8 22 8 15 80 18 M6 x 1 20 40 36 M26 x 1.5 124 13 10 70 41 41.6 3 16 11 29 10 16 92 23 M6 x 1 26 50 46 M32 x 2 150

Process Valve

6 to 8 (D, DZ) Pg9 Pilot port 12 (P1), 10 (P2) Port size: refer to table below Manual override (Non-locking push type) E P2 P1 C I (Grommet: G) J (DIN terminal: D, DZ) VNA H H VNB VNB D B (Air operated) 4 x 2 x 18 mounting hole SGC SGH B A VNC G F VNH VND A VCC Applicable flange 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H I J Model TQ VNB5-32F VNB6-40F VNB7-50F 1 8 1 4 1 4 130 150

Steam Valve

26.5 30 37 121.5 138 161 20 24 24 130.5 148 171 8 10 12 55 63 74 Port size/Flange: 32F, 40F, 50F J (Valve open) Indicator (Option) Pilot port E 12(P1), 10(P2) Port size: refer to table below P1 P2 H H D B A 32 B C G F 4 x 2 x 18 mounting hole A Applicable flange 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H J Model VND50D-32F VND60D-40F VND70D-50F 8 10 12 50 40 32 1 8 1 4 1 4 130 150

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

Standard 0.2 to 0.7 High-pressure type 0.2 to 1 Ambient and fluid temperature [C] 10 to 50 (No freezing) Maximum operating frequency [Hz] 5 Manual override (Manual operation) Non-locking push type Push-turn locking type (Manual) Non-locking push type (Manual) Pilot exhaust method Individual exhaust Lubrication Not required Mounting orientation Unrestricted Impact/Vibration resistance [m/s2] *1 150

3 Port Air Operated Valve

Nil F N T RC G NPT NPTF Nil V Standard For vacuum Manifold Specifications Piping specifications Applicable stations Note) Manifold base Weight: W [g] Stations: n Applicable valve Series Base model 1P (SUP) port type 3R (EXH) port type Port size VV3PA3-41 Common VPA300 2 to 20 stations W = 110n + 90 1/4 VPA344 VV3PA3-42 Individual VV3PA5-41 Common VPA500 Common 2 to 20 stations W = 190n + 150

3 Port Air Operated Valve VPA3145/3165/3185 Series

Specifications Fluid Air Type of actuation N.C. only (N.O. only for vacuum) For ordinary pressure 0.2 to 0.8 MPa For vacuum and low pressure 101.2 kPa to 0.2 MPa Operating pressure range Pilot pressure range Ambient and fluid temperature (C) Refer to the graph of pilot pressure. 0 (No freezing) to 60 Lubrication Required (Turbine oil, Class 1 lSO VG32 equivalent) Mounting orientation Free 150

Plug-in Unit

position 0.15 MPa Max. operating pressure Note 3) 1.0 MPa (0.7 MPa) VQ0 Single 0.15 MPa 0.2 MPa Min. operating pressure VQ4 0.15 MPa Double 3 position 0.15 MPa 0.2 MPa VQ5 1.5 MPa Proof pressure Ambient and fluid temperature VQZ 10 to 50C Note 1) Lubrication Not required VQD Push type/Locking type (tool required)/Locking type (Manual override) Note 5)/Slide locking type Note 5) Manual override 150

VS 8-2/VS 8-4

MPa 0.15 MPa 5 to 60C Note 1) Single Double 3-position 4-position (A) 4 (B) 2 Minimum operating pressure 10 to 60C Note 1) Ambient and fluid temperature Lubrication Manual override Impact/Vibration resistance Enclosure Rated coil voltage Allowable voltage fluctuation Type of coil insulation 1 (P) 5 (R1) 3 (R2) Not required (Non-lube) Push type (Tool required)/Locking type (Tool required) 150

7

size (D) Conduit U E 280 C (42) 45 T 23 G1/2 For Heated water/ High temperature oil Full-wave rectifier A B IN OUT M 2 x P Port size L K J I F (D) (mm) Model Conduit Conduit terminal Electrical entry Port size P A B C E F I J K L U D M V 55 (61) T T 55 (61) U 3/8, 1/2 96.5 (102.5) 25.5 30 4 B VXD2 70 20 11.5 14 50 33 37 28 108 77 47.5 ( ): Denotes the Normally Open (N.O.) dimensions. 150

Slit Valve

(Pa) (abs) Operating pressure differential (kPa) 4 or less Operating pressure range (MPa) (G) 0.45 to 0.6 6.5 x 10 10 O-ring: FKM Internal leak Note 2) (Pam3/s) O-ring: Kalrez 6.5 x 10 9 6.5 x 10 8 Internal leak Note 2) (Pam3/s) at reversed pressure [Reversed pressure: 0.1 MPa (abs) or less] O-ring: FKM O-ring: Kalrez 6.5 x 10 7 6.5 x 10 11 External leak Note 2) (Pam3/s) Gate part 5 to 150

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 100 90 80 70 60 50 40 30 20 10 0 Suction flow [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure 80 60 Suction flow 40 Air consumption 20 0 0 20 40 60 80 Suction flow [L/min(ANR)] Supply pressure [MPa] ZHP-15 ZHP-15 (Supply pressure: 0.35 MPa) 100 100 90 80 70 60 50 40 30 20 10 0 150

Large blow and

.: P Without bracket Air pressure supply (P) port Thread size: Q R J K Note 1) 4 x Sa Thread depth Sb 2 x L O H I N G A M Vacuum flow Dust bag When dust bag is mounted T F E D Suction air Discharge air Suction air U C C B Hose band V (mm) A 73 B 34 C 19 D 10 E 13.2 F 16.2 G 69.8 H 31 I J 35 K 27 L 4.5 M 35 N 18 O P 13 Q Rc1/8 R 28 Sa M3 x 0.5 Sb 5 T 300 U 150 V 190 Model ZH10--X185 ZH20--

Bernoulli Gripper

Air consumption [L/min (ANR)] Air consumption [L/min (ANR)] 140 120 160 120 100 140 100 120 80 100 80 60 80 60 60 40 40 40 20 20 20 0 0 0 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure [MPa] 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure [MPa] 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure [MPa] ZNC60m ZNC80m 300 200 180 Air consumption [L/min (ANR)] Air consumption [L/min (ANR)] 250 160 140 200 120 100 150

Vacuum Pad

SMC vacuum pad Search http://www.smcworld.com Catalogs ZP2 ES100-76 ZP3 ES100-100 Best Pneumatics Pad diameter Symbol 16 18 20 25 30 32 40 46 50 63 80 100 125 150 250 300 340 U C C C C C C MU EU AU C C C C C C C UM UT C ( ( CT C C B C C C C C Note) Note) J ( ( ( MB ( ZJ ( ( D C C C AN Note) Note) Note) MT ( ( ( W U H C C C C C C ( ( ( HT ( ( HB C C C C ( C C ( 30 x 50 ( HW U ( ( ( (

Clean Regulator/Fluororesin Type

pressure (pilot pressure) Fluid Ambient and fluid temperature Valve leakage Tubing Integrated fittings With nut 0.08 1.2 Weight (kg) 0.10 0.28 1.3 Particulate Generation Characteristics Flow-through Characteristics Particle concentration (particles/mL) Particle diameter: 0.1 m or larger 400 1000 350 Value of specific resistance to that of supplied DI water Resistivity (km) 300 100 250 200 150

CRQ2

Weight JIS Symbol (g) Standard weight Size 90 180 10 120 150 15 220 270 20 600 700 30 900 1100 40 1400 1600 Values less the weight of auto switch. Precautions Be sure to read before handling. Refer to pages 11-13-3 to 11-13-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 11-1-4 to 11-1-6 for Precautions on every series.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Size Single vane Double vane Adjustment range of adjustment bolt (B) 90 145 150 1 25 Adjustment range of adjustment bolt (A) (S): 10 (D): 5 180 140 90 230 240 90 (S): 10 (D): 5 3 30 180 225 90 360 375 7 50 180 355 90 510 580 20 60 22.5 180 505 Allowable Load Positioning pin hole Do not permit the load and moment applied to the table to exceed the allowable values shown in the table below

Auto Switch Guide

Weight (g) D-P5DW Auto switch model 0.5 Lead wire length (m) 3 150 5 244 Magnetic Field Resistance Auto Switch Internal Circuit When the AC welding current is 16000 A or less, the operational distance between the welding conductor (welding gun or cable) and the cylinder or auto switch can be 0 mm. Please consult with SMC when exceeding 16000 A.

CE2

30 42 76.5 + 0.058 0 + 0.3 + 0.1 0.032 0.059 D248.5 127 18 12 15 95 38 328.5 81 90 19 9 70 12 110 12 35 50 88.5 + 0.070 0 + 0.3 + 0.1 0.032 0.059 263 148 25 16 18 110 49 352 101 105 23 11.5 86 16 130 15 40 59 106 + 0.070 0 + 0.3 + 0.1 0.032 0.059 -X 31.5 297 192 20 25 140 61 403 119 130 28 13.5 102 20 160 18 48 76 112.5 + 0.084 0 + 0.3 + 0.1 0.040 0.073 35.5 309 214 25 25 162 64 430 133 150