Vacuum Pad 1 1000 V = D 2 x L x (L) For the conductance, the equivalent conductance can be found in 8.
. 10-1 10-2 . 10-2 10-3 . 10-3 10-4 . 10-3 11 R 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-2 12 S 12-1 . 12-1 12-2 . 12-2 12-3 . 12-2 2 13 T 13-1 . 13-1 13-2 . 13-1 13-3 . 13-1 13-4 . 13-2 13-5 . 13-3 14 V 14-1 . 14-1 14-2 . 14-1 14-3 . 14-2 14-4 . 14-2 15 15-1 . 15-1 3 IDX-OM-W023 i i i-1 () 3 i 1 1 3 IDU Series i-1 i-1 IDX-OM-W023 i
Refer to the AC adapter image below under Accessories. *2 The AC cord has a rated voltage of 125 V.
B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4
Grommet 12 V Diagnostic indication (2-color indication) 5 V, 12 V IC Relay, PLC Yes 24 V 12 V Grommet IC 5 V, 12 V Water resistant (2-color indication) 12 V 3-wire (NPN equivalent) A96 IC 5 V Yes Grommet A93 A90 IC 100 V 100 V or less Relay, PLC 12 V 24 V 2-wire No 1 Water resistant type auto switches can be mounted on the above models, but in such case SMC cannot guarantee water
M9PWV M9BWV M9NAV1 Solid state auto switch Reed auto switch 5 V, 12 V 12 V IC circuit Diagnostic indication (2-color indicator) Relay, PLC 5 V, 12 V 12 V IC circuit Yes Yes No Grommet 24 V Water resistant (2-color indicator) 5 V, 12 V IC circuit M9PAV1 M9PA1 M9BAV1 M9BA1 12 V A96V A96 5 V 12 V IC circuit Grommet 24 V A93V2 A93 A90 100 V Relay, PLC 2-wire A90V IC circuit 100 V or less 1 Water
2 1 Transportation . 2 1 2 2 Installation . 2 2 2 2 1 Location . 2 2 2 2 2 Tie Down . 2 3 2 2 3 Air piping . 2 3 2 2 4 Drain Tube . 2 3 2 2 5 Electric Wiring diagram . 2 4 2 3 Cautions about reinstallation . 2 6 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation . 3 1 3 3 Shutdown . 3 2 3 4 Cautions about restart . 3 2 3 5 Check points before restart . 3
Gap 15 Cover (B) 1 14 Cover (A) 1 13 Hexagon socket set screw 1 12 Joint 1 11 Hexagon socket head cap screw 2 10 Hexagon socket head cap screw 2 Fig. 1 9 Hexagon socket head cap screw 2 8 Block retainer 2 No gap 7 Stopper block 2 6 Rubber bumper 1 5 Lever retainer 1 4 Stopper lever 1 3 Stopper ring 1 2 Auto switch 2 Fig. 2 1 Rotary actuator 1 Product Assembly procedure For D-S/T99(V), S9P
Max. suction flow rate Qmax = (2 to 3) x Q /min (ANR) Q : Average suction flow rate /min (ANR) V : Piping capacity T1 : Arrival time to stable Pv 63% after adsorption (sec.) T2 : Arrival time to stable Pv 95% after adsorption (sec.) 2.
AW20P-270AS AR20P-260S G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD27 AR30P-270AS AR30P-260S G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD38N Note) AR40P-270AS AR40P-260S G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48N Note) Set nut Round 1.0MPa Note 2) Note 3) Pressure gauge Square embedded type Round 0.2MPa Note 3) Square embedded type N.O. N.C.
A C F U U M V E A V L Heater (Option) (Maintenance space) Indicator Auto switch (Option) B L K S H J M G A A (mm) Model A 189 198 B 66 79 C 2 2 D 11 11 E 55 75 F 41 52 G 63 68 H 20 20 J Max. 5 Max. 5 K L XLDQ-40 XLDQ-50 65 70 143 153 474 XLAQ/XLDQ Series Glossary of Terms 2 Shaft Sealing Method 1 Seal Materials Bellows Bellows offer cleaner sealing with reduced particle generation and less
1.5 M36 x 1.5 21 21 47 47 50 50 64 + Stroke 64 230 + 2 (strokes) 200 2-Rc 1 2 (port size) 30 30 2 x 4-31.5 depth of counter bore 26 Width across flats 36 40 40 62 62 4-19 through 182 226 3 5.5 Note 1) Flat washer 4 pcs. 2 x 4-M22 x 2.5 thread depth 38 36 Note 1) 2 x 4-M22 x 2.5 threads through for strokes of 20mm or less. 109 + Stroke 17 + Stroke 17 182 226 2-M24 x 3 effective thread depth
NPN) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) Reed switch Solid state switch A96V A96 5 V IC Yes Yes Grommet A93 M9N M9P M9B F9N F9P F9B F9NW F9PW F9BW F9BA A93V F9NV F9PV F9BV F9NWV F9PWV F9BWV 100 V 24 V 12 V Relay, PLC 5 V, 12 V IC 12 V 5 V, 12 V IC Relay, PLC 24 V Grommet 12 V Diagnostic indication (2-color) 5 V, 12 V IC
Goes to 2. OUT1 output mode selection in Initial Setting on page 16-2-41. SET Press the SET button.
Relay, PLC 24 V Yes Grommet 3-wire (NPN) IC circuit Diagnostic indication (2-color) 5 V, 12 V 3-wire (PNP) 12 V 2-wire A96 A96V 5 V IC circuit 3-wire (NPN equiv.)
Y69A Y7PV Y69B Y7NWV Y7PWV Y7BWV 100 V 24 V 12 V Z73 Y59A Y7P Y59B Y7NW Y7PW Y7BW 3-wire (NPN) 2-wire Relay, PLC 5 V, 12 V IC circuit 3-wire (PNP) 2-wire 12 V Relay, PLC 24 V Grommet 3-wire (NPN) 3-wire (PNP) Diagnostic indication (2-color indication) IC circuit 5 V, 12 V 2-wire 12 V Lead wire length symbols: 0.5 mNil (Example) Y59A 3 m L (Example) Y59AL 5 m Z (Example) Y59AZ Since
Y69A Y7PV Y69B Y7NWV Y7PWV Y7BWV 100 V 24 V 12 V Z73 Y59A Y7P Y59B Y7NW Y7PW Y7BW 3-wire (NPN) 2-wire Relay, PLC 5 V, 12 V IC circuit 3-wire (PNP) 2-wire 12 V Relay, PLC 24 V Grommet 3-wire (NPN) 3-wire (PNP) Diagnostic indication (2-color indication) IC circuit 5 V, 12 V 2-wire 12 V Lead wire length symbols: 0.5 mNil (Example) Y59A 3 m L (Example) Y59AL 5 m Z (Example) Y59AZ Since
Y69A Y7PV Y69B Y7NWV Y7PWV Y7BWV 100 V 24 V 12 V Z73 Y59A Y7P Y59B Y7NW Y7PW Y7BW 3-wire (NPN) 2-wire Relay, PLC 5 V, 12 V IC circuit 3-wire (PNP) 2-wire 12 V Relay, PLC 24 V Grommet 3-wire (NPN) 3-wire (PNP) Diagnostic indication (2-color indication) IC circuit 5 V, 12 V 2-wire 12 V Lead wire length symbols: 0.5 mNil (Example) Y59A 3 m L (Example) Y59AL 5 m Z (Example) Y59AZ Since
indication (2-color indication) 5 V, 12 V Relay, PLC Yes 2-wire 24 V Water resistant (2-color indication) 12 V Grommet IC circuit With diagnostic output (2-color indication) F79F 4-wire (NPN) 5 V, 12 V Magnetic field resistant (2-color indication) P5DW 2-wire Solid state switches marked with are produced upon receipt of order.
IC circuit 5 V, 12 V 3-wire (PNP) Relay, PLC 2-wire 12 V Grommet 5 V, 12 V 24 V 3-wire (NPN) 3-wire (PNP) IC circuit Diagnostic indication (2-color indication) 12 V 2-wire Lead wire length symbols: 0.5 mNil (Example) A93 3 mL (Example) A93L 5 mZ (Example) F9NWZ Since there are other applicable auto switches than listed, refer to page 8-10-22 for details.