KDM

No. of connecting tubes Model Weight Color of release button KDM10-23 KDM10-04 KDM10-06 KDM10-08 KDM20-23 KDM20-04 KDM20-06 KDM20-08 3.2 4 6 300 g 10 520 g 8 3.2 Blue 520 g 4 6 8 20 950 g KDM20 Applicable Tubing Tubing material Tubing O.D.

MHx-OMM0057

1.5~2 SMC AF AR 4. 4-1 13 - 4-2 1 15 2 16 3 17 B 4 18 5 19 6 20 7 21 U 8 22 R 9 A 23 C 10 B 24 11 A 25 12 13 14 MHL2-10D MHL2-16D MHL2-20D MHL2-25D MHL2-32D MHL2-40D 26 27 28 29 30 NBR MHL10-PS MHL16-PS MHL20-PS MHL25-PS MHL32-PS MHL40-PS ) 262627282930 1 14 - 4-3 1 U U 2 R B B R 3 15 - 4-4 1 2 O O O 3 16 - Revision history 4-14-1, Sotokanda, Chiyoda-ku

SI unit (CC-Link compatible)

Designation Description 1 SLD Shield 2 DB Communication wire DB 3 DG Communication wire DG 4 DA Communication wire DA 5 Unused : Recommended mating M12 4-pin plug, part no. PCA-1567717. (Refer to page 28) BUS IN: M12 4-pin plug, A-coded (SPEEDCON) No.

ATX-OM-F004E

4.

Vane Type Rotary Actuator Series CRB1 New 63mm Bore Size

N (Example) R73CN Operating time 1.2ms Operating temperature range 5 to 60C ((41 to 140F) Impact resistance 300m/s (11.2 in/s) (Reed), 1000m/s (39 in/s) (solid state) 2 Series CRB1 Specifications Single vane (S) Double vane (D) 90 , 180 , 270 +4 0 +4 0 +4 0 90 +4 0 100 +4 0 100 , 190 , 280 +4 0 +4 0 +4 0 Vane type Standard Rotation Optional Air (unlubricated) Fluid 1.5 (217 psi) Proof

Process Pump

An application which could have negative effects on people, property, or animals requiring special safety analysis. 4.

Clean Gas Filter

Helium leak volume 4.0 x 10-9 Pam3/sec or less Case/Cover Stainless steel 316 (Interior/Exterior: Electrolytic polishing) Main material Filter medium PTFE membrane Seal Fluororubber (FKM) -8- 2-3 Dimensions 1) SFC100-02, SFC100-03 Model A SFC100-02 Rc1/4 SFC100-03 Rc3/8 2) SFC102-02, SFC102-03 Model A SFC102-02 TSJ1/4 SFC102-03 TSJ3/8 3) SFC105-02, SFC105-03 Model A B C SFC105-02 URJ1/4 22

Safety Instructions

Insufficient tightening may loosen threads, or cause air leakage. 4.

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Power Valve Precision Regulator

Warning Warning Recommended Tightening Torpue Unit: Nm Connection thread M5 1/8 1/4 3/8 1/2 3/4 1 1 1/4 1 1/2 2 Torpue 1to1.5*1 3 to 5 8to12 15to20 20to25 28to30 36to38 40to42 48to50 48to50 *1 After tightening by hand, use a tightening tool to tighten an additional 1/6 to 1/4 turn as a guideline. Caution Caution Mounting 1.

EXxx-OMP0004CN

L 7 1500[mm] 8 3000[mm] 9 5000[mm] B code No. 5.0 mm 1 DC24 V() AWG22 2 0 V() 1.27 mm 3 DC24 V() 21.7 mm 4 0 V() 5 / -31No.EX-OMP0004CN-I M12 10 EX9-AWTS BUS OUT IP67 (SI 1 ) -32No.EX-OMP0004CN-I Revision history A B C D E F [2016 7 ] G [2019 6 ] H [2019 11 ] I [2022 6 ] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

Digital pressure switch for energy-saving control ejector

Setting of [F 4] Auto-preset completed. Press button in measurement mode to set pressure.

PSxx-OMS0004CN

3 m -15No.PS-OMS0004CN-D [mA] [V] A B 01MPa 0 1MPa -100100 kPa -100 kPa 100 kPa 0500 kPa 0 500 kPa -16No.PS-OMS0004CN-D A B PSE57-01 8 R1/8 PSE57-02 12 R1/4 M12 ZS-37-A 1 2 4 3 M12 ZS-37-B 3 4 2 1 M12 -17No.PS-OMS0004CN-D ZS-31-X D E F G H I ZS-31-X188 20 9 R1/8 Rc1/8 14 1.5 ZS-31-X175 29 13 R1/4 Rc1/4 17 1.6 -18No.PS-OMS0004CN-D Revision history A B C D 4-14-1, Sotokanda, Chiyoda-ku

VND Series

Doc.no.VN-OMA0013-D Steam Valve PRODUCT NAME VND Series MODEL/ Series Contents Safety Instructions -2,3 Precautions on Design -4 Selection -4 Mounting -4 Piping -5 Operating Environment -5 Maintenance -5 Precautions -5 Specific Product Precautions -6 Troubleshooting -7 1 VN-OMA0013-D Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment

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