High Vacuum Angle Valve

Construction/Operation Auto switch (Option) Heater (Option) Pilot port (Pressurize to close) P-2 q Bonnet assembly (Maintenance parts)1 (Including w, e, y, u, i, o) Magnet (Option) Pilot port (Pressurize to open) P-1 r Exterior seal (Maintenance part)1 i Bellows holder (Material: Stainless steel 304) u Bellows assembly (Maintenance parts)1 (Including y, i) Bellows (Material: Stainless steel

HRX-OM-R028

30 31 52 50 56 31 03 65 Response message (Slave to Master) STX Slave Address ACK Command Reading data ETX BCC 02 30 31 06 50 56 31 30 30 31 38 37 03 0F 5.5 Message configuration HRSH Series 5-14 HRX-OM-R028 Chapter 5 Simple communication protocol function 5.6 BCC EXOR algorithm of all characters from STX to ETX is read with the check code for error detection.

Pressure Sensor for General Fluids

(at 25 oC) Model PSE57-02 PSE57-02-28 Fluid Applicable Gas or liquid that will not attack or corrode the materials of parts in contact with fluid Power supply voltage 12 to 24 VDC10% with 10% voltage ripple or less Electrical spec.

Fieldbus system (CC-Link compliant)

(Only for EX510-S 02 ) : Only mounting direction of the SI unit to the mounting bracket is different between EX510-S A and EX510-S B. Mounting direction can be changed from horizontal to vertical by changing the screws which construct the mounting bracket.

Fieldbus system (DeviceNet compliant)

(Only for EX510-S 02 ) : Only mounting direction of the SI unit to the mounting bracket is different between EX510-S A and EX510-S B. Mounting direction can be changed from horizontal to vertical by changing the screws which construct the mounting bracket.

Fieldbus system (PROFIBUS DP compliant)

(Only for EX510-S 02 ) : Only mounting direction of the SI unit to the mounting bracket is different between EX510-S A and EX510-S B. Mounting direction can be changed from horizontal to vertical by changing the screws which construct the mounting bracket.

Regulator

Option/Semi-standard symble:When more than one specification is required, indicate in alphanumeric order. 1 3 4 5 6 2 Symble Description 0.020.2MPa 0 0 0 0 Set pressure range 1 1 1 1 0.020.4MPa 2 2 2 2 0.020.8MPa + 1 Exhaust direction 0 0 0 0 Bottom exhaust + 2 Rc Nil Nil Nil Nil Pipe thread type NPT N N N N F F F F G + 3 Port size 02 02 02 02 1/4 + 4 Nil Nil Nil Nil Without pressure gauge

4/5 Port Air Operated Valve Series SYJA3000 1

1.9 0.48 0.46 0.57 2.1 0.36 center Base mounted (With sub-plate) 1/8 Note 1) M5 x 0.8 SYJA740-01 0.36 0.86 3.4 Exhaust 1.2 200 (120) 3 position 0.35 0.48 [0.57] [0.41] [1.3] center 3.3 0.78 0.43 Pressure 0.45 0.56 2.1 [0.85] [0.25] [0.54] center 170 (90) Single 2.3 0.61 0.35 0.74 2.9 0.41 2 position 190 (110) Double Closed 1.9 0.50 0.44 0.60 2.2 0.46 center 1/4 Note 1) M5 x 0.8 SYJA740-02

SYJA3000

01 02 01 02 01 02 12.6 (0.7) 170 (90) 2 position single SYJA714012.6 (0.7) 190 (110) 2 position double SYJA72408.5 (0.47) 3 position closed cente SYJA7340(1) M5 X 0.8 200 (120) 1/8, 1/4 9 (0.5) [6.5 (0.36)] 3 position exhaust center SYJA7440PA, B: 13.5 (0.75) [7 (0.39)] A, BR1, R2: 7 (0.39) 3 position pressure center 01 02 SYJA7540Note1) P, A, B port: Rc(PT)1/8R1, R2 port: Rc(PT)1/4 Note2

4/5 Port Air Operated Valve SYJA3000 Series

. *2 position single only SYJA7 20 1 01 Body ported SYJA7 40 2 Base mounted Symbol Body ported Port size Thread type Type of actuation Nil Rc G NPT NPTF Without sub-plate Nil 2 position single 2 position double 4 3 2 position double 2 position single 2 1 1/8 With sub-plate 01 F N T 2(B) (A)4 2(B) (A)4 3 position closed center 1/4 With sub-plate 02 3 position exhaust center (R1)5 1 (P) 3(R2

ASP

Model D3 T2 L5 11.6 15.2 12.8 15.2 15.2 18.5 18.5 20.9 14 15.8 18 19.7 20.3 23.1 13.7 18.7 16.8 18.7 18.7 20.8 20.8 21.8 38.4 44.7 43.4 46.4 51.3 54.1 64.2 66 32 35 65 68 107 110 212 215 22.9 28.2 25.2 28.2 28.2 32.6 32.6 34.4 34.6 33.9 11.8 39.6 38.9 6 8 6 8 8 10 10 12 ASP330F-01-06S ASP330F-01-08S ASP430F-02-06S ASP430F-02-08S ASP530F-03-08S ASP530F-03-10S ASP630F-04-10S ASP630F-04-12S

AS

Applicable series AS-10D AS-20D AS-25D AS-30D AS-40D AS-12L AS-10L AS-20L AS-25L AS-30L AS-40L AS1002F AS2002F AS2052F AS3002F AS4002F AS1002F-02 AS1002F AS2002F AS2052F AS3002F AS4002F DIN rail mounting bracket L-bracket Bracket for AS1002F-02 is not available. Prepare DIN rail by user.

AS-FM

AS1201FM, AS1211FM AS1301FM, AS1311FM AS2201FM-01, AS2211FM-01 AS2301FM-01, AS2311FM-01 AS2201FM-02, AS2211FM-02 AS2301FM-02, AS2311FM-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 20 10 50 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 40 30 10 5 20 10 0 5 20 10 10 0 5 0 10 Number of needle rotations Number of needle rotations Number

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

AS23 1FE-02 AS32 1FE AS33 1FE AS42 1FE AS43 1FE Model 8 10 6 8 10 12 12 10 6 8 10 Tubing O.D.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type

(mm) 6 8 10 12 4 (1) AS221FE-01 AS231FE-01 R 1/8 20, 25, 32 AS221FE-02 AS231FE-02 R 1/4 20, 25, 32, 40 AS321FE-03 AS331FE-03 R 3/8 40, 50, 63 AS421FE-04 AS431FE-04 63, 80, 100 R 1/2 Note 1) Elbow type only Note 2) Distinction between meter-out/meter-in types by appearance Those are distinguished by the lock nut.

Speed Controller: Standard Type In-line Type AS Series

Free flow Controlled flow Weight (g) Critical pressure ratio Critical pressure ratio Sonic conductance dm3/(sbar) Sonic conductance dm3/(sbar) Model Port size Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS1000-M3 AS1000-M5 AS2000-01 AS2000-02 AS3000-02 AS3000-03 AS4000-02 AS4000-03 AS4000-04 AS5000-02 AS5000-03 AS5000-04 M3 x 0.5 20 0.06 20 0.06 4.7 0.15 M5 x 0.8 90 0.25 80 0.22 33 1/

FH150

Port size Applicable hydraulic fluid Material Spring (Nominal size) (Nominal size) NBR -70 -1 Petroleum, Water-glycol, Emulsion KA00052 KA00471 02 to 04 (C65) (P30) KA01174 KA00104 FKM -70 02 to 04 Phosphoric ester (C65) (P30) Note) The material and nominal size notations are based on JISB2401. 522 C

Series SJ2000/3000 D-sub Connector / Flat Ribbon Cable / PC Wiring Plug-in Connector Type

Symbol Stations 02 24 Symbol Stations 02 24 D side U side 1 3 2 Stations 2 stations 24 stations 2 stations 24 stations Up to 24 solenoids possible. PG: Flat ribbon cable (20 pins) PH: Flat ribbon cable (10 pins) SUP/EXH block (D side mounting) Note Up to 18 solenoids possible. Note Up to 8 solenoids possible.

Body Ported Type Vacuum Ejector ZH Series

10 One-touch Screw-in One-touch 01 02 02 Screw-in Screw-in Screw-in ZH13DA09 11 11 One-touch One-touch One-touch 09 N02 11 One-touch Screw-in One-touch N01 N02 N02 Screw-in Screw-in Screw-in ZH15DA08 10 10 One-touch One-touch One-touch 08 03 10 One-touch Screw-in One-touch 02 03 03 Screw-in Screw-in Screw-in ZH15DA09 11 11 One-touch One-touch One-touch 09 N03 11 One-touch

Regulator for 2 MPa ARX 20

G36 4 01 G46 4 02 G36 P10 N01 G46 P10 N02 G36 P4 N01 G46 P4 N02 1348110A B Regulating pressure range Bracket 0.05 to 0.85MPa 0.05 to 0.30MPa 0 1 ARX20 Nil F ARX21 Nil F Thread type G Pressure gauge Rc NPT G Nil N F ARX20N ARX21N P Port size Panel nut 1/8 1/4 01 02 Option combination numbers Panel nut is also included with B.