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Bonnet assembly Step 3 Reassembly of valve seal 1 (No.1) Step 4 Reassembly of valve seal 1 (No.2) 3 2 1 Groove for mounting the seal 4 Valve seal 1 Valve Bonnet assembly Bonnet assembly Eliminate any dust within groove for mounting the seal of the valve. Wipe off any dust on the surface of the valve seal 1, then place the valve seal 1 in the seal mounting groove.

Bearing 2 5 Cover 2 4 Bearing retainer 1 3 Shaft 1 2 Piston 1 1 Body 1 No Description Qty.

P port 1/8 F N T R 4 one-touch fitting P A port M5 x 0.8, 1/8, C4, C6 6 one-touch fitting R port 1/8 5/32" one-touch fitting 1/4" one-touch fitting Note) For more than 9 stations, supply/exhaust air to/from both sides of P and R port 23 Series SYJ500 Type 20 Manifold: Top Ported/SS3YJ5-20Stations -00(-F) [ ] for AC (18.5) L3 Grommet (G) 2-4.5 (For mounting) (10) (5) 43.6 [50.6] 28.2 + +

-40A VNA7-50A 1 8 1 4 1 4 1 4 1 105 120 140 77 96 113 53 60 74 26.5 30 37 120.5 137 160 20 24 24 129.5 147 170 170.1 187.6 210.6 211.5 229 252 55 63 74 1 2 1 2 564 A VNA Series Process Valve: 2 Port Valve For Compressed Air and Air-hydro Circuit Control How to Order Pilot Solenoid Valves Valve size 1/2/3/4 Valve size 5/6/7 SF4 5 D 23 Q VO307 5 D 1 Q CE-compliant CE-compliant Coil rated voltage

Element Description EtherNet/IPTM connection PORT 2. 1 (M12 4-pin socket, D-coded) 1 Fieldbus interface connector (BUS OUT) EtherNet/IPTM connection PORT 1. 1 (M12 4-pin socket, D-coded) 2 Fieldbus interface connector (BUS IN) 3 Power supply connector Power supply with load voltage for valves and operating voltage for SI unit. 1 (M12 4-pin plug, A-coded) 4 FE terminal Functional earth.

Connection thread Proper tightening sizeR,NPT,G torque Nm 1/8 35 1/4 812 3/8 1520 (6) Installation of Connection thread (6)-1 For M5,10-32UNF Tightening method 1/2 2025 First, tighten it by hand, then give it an additional 1/6 turn to 1/4 turn with an appropriate wrench.. Refer to Table below for reference.

32 50 50 7 60 120 96 118 1 2, 3 4 82 68 88 92 1 181 53 12 81 70 35 36 66 52 9 66 140 96 133 DC C Model VS3135-02 VS3135-03 VS3135-04 VS3145-04 VS3145-06 A B Port size Rc 1 4, 3 8, 1 2 163 64 50.8 196 68 60.5 1 2, 3 4 4-16-7

06 10 M6 x 1 Depth 7.5 39 50 0 77 74 59 155 128 143 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 5 Soft Start-up Valve AV2000/3000/4000/5000 Modular F.R.L.

Dynamic moment Me3 L2 We W = 1/3 14.7 (50 + 27) 103 Review Me3. = 0.38 [Nm] 3 = Me3/Me3 max = 0.38/3 = 0.13 Guide central axis A Me1 W We Me1 = 1/3 We (L1 + B) 103 = 1/3 14.7 (50 + 48) 103 L1 B = 0.48 [Nm] 4 = Me1 /Me1 max = 0.48/3 = 0.16 Review Me1.

Note 4) Assembly of a bracket and set nuts Standard Specifications AWM20 AWD20 AWM30 AWD30 AWM40 AWD40 Model Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 Fluid Air Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa Set pressure range 0.05 to 0.85 MPa Pressure gauge port size Note 1) 1/8 1/4 Ambient and fluid temperature Note 2) 5 to 60C (with no freezing) AWM20 to AWM40 0.3 m (95% filtered

Note 4) Assembly of a bracket and set nuts Standard Specifications AWM20 AWD20 AWM30 AWD30 AWM40 AWD40 Model Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 Fluid Air Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa Set pressure range 0.05 to 0.85 MPa Pressure gauge port size Note 1) 1/8 1/4 Ambient and fluid temperature Note 2) 5 to 60C (with no freezing) AWM20 to AWM40 0.3 m (95% filtered

4/5Port Air Operated Valve Series VFA3000 Model Configuration Port size Rc(PT) Effective area (mm2)(Cv) Rc(PT) Pilot port size Rc(PT) Weight (kg) Valve model 1 8 Rc(PT) 1 4 Rc(PT) 15.3 (0.85) 18 (1) 3 8 1 8 1 4 1 8 VFA3122-F 2 position single ,EXH: 01 02 0.18 1 8 1 8 1 4 14.4 (0.8) 18 (1) 01 02 VFA31302 position single (EXH: ) 0.15 1 8 1 8 Body ported Base mounted (With sub-plate) 1 8 1 4

D D N NPN1 M8 P PNP1 /M8 1 L M SI2 M8 P (psi)1 1 2kPaMPa 1 ZS-24-A A M35 L,M45 L, 2 ZS-24-D D M35 L,M45 L, 2 / V100-49-1-1 300 mm() V100-49-1-2 500 mm() V100-49-1-3 1000 mm() V100-49-1-4 2000 mm() V100-49-1-7 5000 mm() PCA-1557772 3000 mm() -11No.PS-OMM0006CN-E LCD (UP) (SET) (DOWN) () LCD 4 (UP)ON/OFF (DOWN)ON/OFF (SET) -12No.PS-OMM0006CN-E 2 ON/OFF 2 7 "8"7 "

2 3 4 5 Case Cover Element Seal Bracket 1 2 1 2 1 One-touch fittings w Replacement Element Part No. e q Part no.

VVZS3000-4-1 VVZS2000-4 14.4 x 12 x 1.2 7.5 x 4.5 x 1.5 VVZS2000-11-n (1) q Description Material Seal B Seal A NBR NBR NBR NBR Carbon steel Carbon steel Note 1) n: Stations Note 2) Manifold block assembly is attached with tie-rod for increasing stations. w e O-ring O-ring r t Tie-rod y Tie-rod for station addition VVZS2000-11-1-1 (2) Assembly part no.

Bonnet assembly (Actuator part) Step 3 Reassembly of valve seal 1 (No.1) Step 4 Reassembly of valve seal 1 (No.2) 2 1 3 4 Groove for mounting the seal Valve Valve seal 1 Bonnet assembly Bonnet assembly Eliminate any dust within groove for mounting the seal of the valve. Wipe off any dust on the surface of the valve seal 1, then place the valve seal 1 in the seal mounting groove.

ZH07B ZH10B ZH13B ZH05D ZH07D ZH10D ZH13D ZH15D ZH18D ZH20D 12/Rc 3 8 Body ported type (Without silencer) 8/Rc 1 8 10/Rc 1 4 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 8/Rc 1 8 8/Rc 1 8 10/Rc 1 4 10/Rc 1 4 3 8 12/Rc 10/Rc 1 4 12/Rc 3 8 12/Rc 3 8 16/Rc 1 2 16/Rc 1 2 13-5-2 3 Series ZH Vacuum Ejector: Box Type (Built-in Silencer)/Body Ported Type Ejector JIS Symbol Body ported type (Without

H 4 S y m b o l Initial power / Power 100 VAC 200/40 200/50 400/100 200 VAC 800/40 800/50 800/100 consumption (W) Heater assembly number XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc.