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2 / / / 2 n_n / LoC() 4 UnL LoC 4 LoC UnL 5F.S.(2.5F.S.) 1 12341 2 2 2 -27No.PS-OMH0005CN-D (2030 ) -28No.PS-OMH0005CN-D PSE200 ( ) 1 ON ON OFF Yes No 2 OFF ON 1 OFF 3 4 5 OFF 6 -29No.PS-OMH0005CN-D 7 Yes No 8 8 9 10 11 12 13 14 15 16 -30No.PS-OMH0005CN-D No.

DC1224 V DC1224 V 8 DC(+) DC(-) DC1224 V DC1224 V DC(+) 9 DC(-) / / 10 ( ) 11 / 5m / 12 2030 20 -28No.PS-OMG0001CN-H No.

No.PF-OMS0001CN-A // PFMC7501 PFMC7102 PFMC7202 2 10 11 12 14 15 17 18 [] 22 OU1OUT2 {3 ] 23 [] 25 26 F0 27 F1 OUT1 29 F2 OUT2 37 F3 42 F10 43 F20 47 F22 48 F30 49 F31 50 F80 OFF 51 F81 52 F82 53 F90 54 F98 56 F99 57 58 62 63 65 66 66 69 71 -1No.PF-OMS0001CN-A (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO

No.PF-OMU0002-D PRODUCT NAME Digital Flow Switch MODEL/ Series/ Product Number PF3A703H PF3A706H PF3A712H Table of Contents Safety Instructions 2 Model Indication and How to Order 10 Names and Functions of Individual Parts 11 Definition and terminology 12 Mounting and Installation 14 Installation 15 Piping method 16 Wiring 17 Outline of Settings [Measurement mode] 21 Change of Set Value [

Min. load impedance: 100 k (Output impedance: 1 k) Analogue output Current output: 4 to 20 mA, Accuracy: 2%F.S. or less Max. load impedance: 300 or less with 12 VDC, 600 or less with 24 VDC Supply voltage 12 to 24 VDC 10% Power consumption (No load) 20 mA or less Enclosure IP65 Environment Operating temperature range Operation: 0 to 50 C, Storage: -25 to 85 C (no condensation or freezing

Danger: Analogue output: 4 to 20 mA Max. load impedance: 300 (12 VDC) 600 (24 VDC) Operator 1: Refer to the PF2D3 operation manual for details of the flow monitor. 3: Load indicates analogue input equipment such as an ammeter.

VDC/ 4 W 24 VDC/ 4 W 12 VDC/ 4 W 24 VDC/ 4 W 12 VDC/ 6 W 24 VDC/ 6 W Electric specifications 8.4 VDC (Rated 35%)/ 0.8 W Allowable voltage fluctuation*5 10% of rated voltage (0 to +10%) Type of coil insulation Class B 5 VDC (Rated 42%)/ 0.7 W 10 VDC (Rated 42%)/ 0.7 W 5 VDC (Rated 42%)/ 0.7 W 10 VDC (Rated 42%)/ 0.7 W 4.2 VDC (Rated 35%)/ 0.8 W Holding*2 Holding voltage/ Power consumption

Tightening torque: HEC006--22 to 24 Nm HEC012--28 to 30 Nm Drain -12 to 14 Nm 3) A plug is mounted on DRAIN for recirculating fluid. When the piping for drain is connected, remove this plug beforehand. Be sure to arrange the piping on the drain to exhaust the constant temperature recirculating fluid in the unit at the maintenance.

XL-OMV0002 L XLC / SMC 2 11 4 () 22 6 3 7 4 9 5 11 6 12 1 XL-OMV0002 1) (ISO/IEC)(JIS) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218-1992: Manipulating industrial robots

1 / 17 FGX-OM-F001-A PRODUCT NAME Return Filter MODEL / Series / Product Number FH100 Series FH100 X0 Series 2 / 17 FGX-OM-F001-A Contents Safety Instructions 1 1.How to Order 9 2.Construction and names of individual parts 10 3.Specifications 11 4.Installation and Piping 12 5.Maintenance 13 6.Maintenance parts 14 3 / / 17 FGX-OM-F001 FGX F001-A Return Filter Return Filter Return Filter Safety

Output current 100mA Input signal (3) JOG+ (4) JOGMain circuit 10mA or less (13) CAL (14) E-STOP (12) GND_I/O GND (1) Sig-in+ 250 (2) Sig-inGND (7) Pos-out+ (8) Pos-outGND (3)Wiring example IN-777 HART communicator Analog signal input 1 Sig-in+ 2 Sig-in(4-20mA) + 5 PWR_DC24V 6 PWR_GND Power supply 24V Analog position signal output 7 Pos-out+ 8 Pos-out(4-20mA) 12 GND_I/O 3 JOG+ 4 JOGInput