&snac

3 4 5 5 6 7 l\caut ion l n s t a l l a t i o n l n s t a l l a t , I D G s * M ( V ) i o n . r o n i n l e t s i d e 0 f m e m b l a n e a i r J i u t t , s u r e l v i n s t a l l m i s t s e p a r a t 0 r a n d m i c r o m i s t s e P a r a t o r ' t w i f n o u t t t r e m , i t d 0 e s n o t p e r f o r m ' w e l l b e c a u s e v a t e r a n d o i l f l o w i n ' l t F I u s h P j P

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

min) 10.0 L/min (5 L/min) 0.1 L/min PF2M710(-L) 0.5 L/min 10.5 L/min (5.25 L/min) 0.5 L/min 10.5 L/min (5.25 L/min) 0.3 L/min 25.0 L/min (12.5 L/min) PF2M725(-L) 1.3 L/min 26.3 L/min (13.1 L/min) 26.3 L/min (13.1 L/min) 1.3 L/min 50.0 L/min (25 L/min) 0.5 L/min PF2M750(-L) 52.5 L/min (26.3 L/min) 2.5 L/min 52.5 L/min (26.3 L/min) 2.5 L/min 100.0 L/min (50 L/min) 1.0 L/min PF2M711(-L) 5.0

MY1

Applicable cylinder Port variations MY1B10 MY1H10 L R L L R R R Note 1) Note 1) R R R L L R L L L L R Slide table operating direction Note 1) These ports are not applicable to MY1H10.

Smooth Cylinder/Low Speed Cylinder

CDQSXB20-30D CDQSXB12-5D 60 CQ-M5 x 60 L 30 CQ-M3 x 30 L 35D 10D 65 x 65 L 35 x 35 L 40D 15D 70 x 70 L 40 x 40 L 6.5 Example) CQ-M3x30 L 4 pcs. 6.5 45D 20D 75 x 75 L 45 x 45 L REA 50D 25D 80 x 80 L 50 x 50 L CDQSXB25-5D 30D Mounting bolt 40 55 x 55 L CQ-M5 x 40 L REB 10D CDQSXB16-5D 45 30 x 45 L CQ-M3 x 30 L 15D 10D 50 35 x 50 L x 35 L REC 20D 15D 55 40 x 55 L x 40 L 6.5 CY 25D 20D 60 45

PF2A/PF2W

ISA2 52.5 l/min 2.5 l/min IS 10 l/min 100 l/min PF2A511 105 l/min 5 l/min ZSM 20 l/min 200 l/min 210 l/min 10 l/min PF2 PF2A521 IF 50 l/min 500 l/min 525 l/min 25 l/min PF2A551 Data Sensor Flow rate range 0.5 l/min 2 l/min 5 l/min 10 l/min 20 l/min 40 l/min 100 l/min 0.5 l/min 4 l/min PF2W504 PF2W504T 0.35 l/min 4.5 l/min 16 l/min 2 l/min PF2W520 PF2W520T 1.7 l/min 17l/

Title not found

Hea\,y duty gu de rod type Wdide bearng lOpott typ" l l l l l l l l l l r r t t t r r l l l t t t t t t l l l l tza t t t t t t t t t l t t t t t t t t t l ,75 _ t t t l l l l l l l znn t r t t t t l t l l ' For bore sizes 12 & 16, only tu15 x 0.8 is availade.

%silltr

A p k v = 27.94.4@2 + l-013) . Ap 222. l@2 + r-013) .

SMC Basic Pneumatics

A p k v = 27.94.4@2 + l-013) . Ap 222. l@2 + r-013) .

Table of Contents

l 300 M16 x l 300 M16 x l 300 M16 x l 500 M24 x l 500 M24 x l 500 AT6C AT11C AT22C AT37C AT55C AT75C AT125C AT150C AT220C 1 2 Rc 1/2 Rc 3/4 Rc 1 Rc 1 Rc 1 1/4 Rc 1 1/4 Rc 2 Rc 2 Rc 2 Rc 110 110 110 180 180 180 260 260 Rc 3 4 Rc 1 1 2 1 2 Rc 1 2B (JIS 10kFF) 2B (JIS 10kFF) 3B (JIS 10kFF) 4B (JIS 10kFF) 4B (JIS 10kFF) 14-16-2 1 Heatless Air Dryer Series ID Model Heatless ID series is best

Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

CQS

CQSKB125D 10D 15D 20D 25D 30D M3 X 30 l X 35 l X 40 l X 45 l X 50 l X 55 l M3 X 30 l X 35 l X 40 l X 45 l X 50 l X 55 l M5 X 30 l X 35 l X 40 l X 45 l X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l M5 X 35 l X 40 l X 45 l X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l X 80 l M3 X 25 l X 30 l X 35 l X 40 l X 45 l X 50 l M3 X 25 l X 30 l X 35 l X 40 l X 45 l X 50 l M5 X 25 l X 30 l X 35 l X 40 l X 45

Air Slide Table

Allowable overhang L [mm] Allowable overhang L [mm] 167 Model Selection MXQ Series Determine the overhang.

Electric Actuators

Front mount type l l l Model Bolt Max. tightening torque Nm Max. screw-in depth (l mm) Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M6 x 1 7.4 10 LXP M6 x 1 7.4 12 2. Through holes Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M5 x 0.8 4.4 37.5 3.

Battery-less

16: LEFS32(L/R)EA Lead 16: LEFS32(L/R)EA 20 10 Lead 24: LEFS32(L/R)EH Lead 24: LEFS32(L/R)EH 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] Vertical LEFS40(L/R)/Ball Screw Drive Horizontal 70 60 30 Lead 10: LEFS40(L/R)EB Lead 10: LEFS40(L/R)EB Work load: W [kg] Work load: W [kg] 50 40 20 Lead 20: LEFS40(L/R)EA 30 Lead 30: LEFS40(L/R)EH Lead 20

MY1

Data MY1B16 to 100 MY1M16 to 63 MY1C16 to 63 MY1H16 to 40 L L R L L L L R R R R R L R R L Note 2) Note 2) R R L L O-ring L R Slide table operating direction Piping tube Note 2) For bottom piping, refer to the figure above.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

150 + l 20 151 150 130 129 170 + l 149 + l 180 + l 159 + l 25 158 157 137 136 179 + l 158 + l 187 + l 163 + l 32 165 165 141 141 187 + l 163 + l 212 + l 184 + l 40 187(196) 164 159(168) 207(216) + l 179(188) + l 192 242 + l 210 + l 50 217(229) 190 185(197) 237(249) + l 205(217) + l 222 252 + l 215 + l 63 227(239) 195 190(202) 247(259) + l 210(222) + l 232 303.5 + l 245 + l 80 288.5(302.5)

F

A G E G A S K E T: N I P P L E: M-3N M-5N U N I V E R S A L T E E: M-3UT M-5UT P L U G: M-3P M-5P M-5G1 M-3G P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R E L B O W: M-5L G A S K E T: M-5GH T E E: M-5T H O S E N I P P L E: M-5H-4 M-5H-6 H O S E E L B O W: M-5HL-4 M-5HL-6 Similar to Picture

PFxx-OMX0002

to 6000 L/min 120 to 12000 L/min Instantaneous flow 30 to 3150 L/min 60 to 6300 L/min 120 to 12600 L/min Set point range Accumulated flow 0 to 999,999,999,990 L 0 to 999,999,999,900 L Flow specifications Instantaneous flow 2 L/min 5 L/min 10 L/min Minimum resolution Accumulated flow 10 L 100 L Accumulated volume per pulse (Pulse width = 50 msec.)

Air Cylinder

159 + l 150 172 + l 136 158 + l 149 171 + l 32 141 163 + l 156 178 + l 141 163 + l 156 178 + l 40 164 184 + l 182 202 + l 159 (168) 179 (188) + l 177 (186) 197 (206) + l 50 190 210 + l 210 230 + l 185 (197) 205 (217) + l 205 (217) 225 (237) + l 63 195 215 + l 217 237 + l 190 (202) 210 (222) + l 212 (224) 232 (244) + l 80 236 245 + l 254 263 + l 230 (244) 239 (253) + l 248 (262) 257 (277)

SY

number L 44 16 8 Terminal no.