Integrated Controller Options Specific Product Precautions EQFS32HH/Ball Screw Drive Horizontal/Lead 24 Vertical/Lead 24 5 4.5 4 3.5 3 2.5 2 1.5 1 0.5 0 45 40 35 30 25 20 15 10 5 0 200 400 600 800 1000 1200 3000 mm/s2 3000 mm/s2 Work load: W [kg] Work load: W [kg] 5000 mm/s2 10 mm/s2 0 0 Speed: V [mm/s] 200 400 600 800 1000 1200 Speed: V [mm/s] EQFS32HA/Ball Screw Drive Horizontal/Lead 16 Vertical/Lead 16 60 55
water, Deionized water1 Set temperature range [C] CH1: 15 to 25/CH2: 20 to 40 Cooling capacity2 [kW] 9 18 19 18 26 18 Heating capacity3 [kW] 1.5 1 4.5 1 6.5 1 Temperature stability4 [C] CH1: 0.1/CH2: 0.5 Rated flow (Outlet) [L/min] 45 (0.43 MPa) 10 (0.45 MPa) 45 (0.45 MPa) 10 (0.45 MPa) 125 (0.45 MPa) 10 (0.45 MPa) Maximum flow rate [L/min] 120 16 130 16 180 16 Maximum pump head [m] 50 49 55
method PID control Ambient temperature1 C 5 to 45 HRW HECR HEC Circulating fluid2 Tap water, 15% ethylene glycol aqueous solution, Deionized water Set temperature range1 C 5 to 35 Cooling capacity 50/60 Hz3 kW 9.0/10.5 Heating capacity 50/60 Hz4 kW 1.7/2.2 Temperature stability5 C 0.5 HEB Circulating fluid system HED Rated flow 50/60 Hz (Outlet)6 L/min 29/45 Maximum flow rate 50/60 Hz L/min 55
temperature C 5 to 35 Automatic fluid fill port Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Overflow port Rc1 (Symbol F: G1, Symbol N: NPT1) Fluid contact material Metal Stainless steel, Copper (Heat exchanger brazing), Bronze, Brass Resin PTFE, PU, FKM, EPDM, PVC, NBR, POM, PE, NR Supply side pressure range MPa 0.3 to 0.5 Supply side temperature range C 5 to 40 Required flow L/min 25 30 50 55
Conditions DC inverter Inverter fan pump Low High Motor rotation rate (For air-cooled type) Inverter pump Power reducing effect of the inverter pump Inverter pump Current model HRSH090 35 L/min 55 L/min Inverter Power consumption (Pump only) Power consumption (Pump only) pump 0.6 kW 1.1 kW Tank Tank 55 L/min 35 L/min 35 L/min 0.3 MPa 35 L/min 0.3 MPa Users equipment Users equipment The motor
Measuring Conditions Description Laser dust monitor (Automatic particle counter by lightscattering method) Measuring instrument Minimum measurable particle diameter 0.1 m Suction flow rate 28.3 L/min (ANR) Sampling time 5 min Setting conditions Interval time 55 min Sampling air flow 141.5 L (ANR) Clean bench (ISO Class 5 equivalent) Vacuum suction from vacuum port Laser dust monitor Particle
supply voltage [V] 100 to 120 VAC (50/60 Hz), 200 to 230 VAC (50/60 Hz) Reference page Page 607 533 11-LEJS Series AC Servo Motor Clean Room Specication Specifications 11-LEJS40, 63 AC Servo Motor Model 11-LEJS40S2 6 11-LEJS63S3 7 Stroke [mm] Note 1) 200, 300, 400, 500, 600, 700, 800 900, 1000, 1200 300, 400, 500, 600, 700, 800, 900 1000, 1200, 1500 Work load [kg] Note 2) Horizontal 30 55
L 16 44 8 L (7.5) 8 2514 131 (35) (25) 5.5 47.04 SMC 55 Approx. 10 Multi-core vinyl cable 0.3 mm 2 x 25C 2 x M2.6 x 0.45 Socket side Terminal no. Rail mounting hole pitch 12.5 0 1 2 3 4 5 6 7 8 9 No.
J I 12 Z ZZ H G 3 +0.03 0 depth 2 GA A 19 3.3 3.5 A 5.8 4 x M4 x 0.7 3 4 3 +0.05 0 depth 2.5 A-A Model G GA H I J K M Z ZZ 11-MXJ8-5 11-MXJ8-10 11-MXJ8-15 11-MXJ8-20 12 18 17 6 17 28.5 44.5 38 45 12 18 17 6 17 28.5 44.5 38 45 19 28 20 8 25 39.5 54.5 48 55 Other dimensions are the same as standard model (Series MXJ). 19 28 20 8 25 39.5 54.5 48 55 829 Air Slide Table 11-MXJ Made to Order Air
Construction Diaphragm Seat Body 1112 B Diaphragm Valve for Ultra High Purity Manually operated type Series AZ3652 & 4652 inch (mm) Dimensions AZ3652 & 4652 Ports: 2PW (Welded) Ports: 2P (Machined) 1.5 (38) 1.5 (38) BAR STOCK BODY Note) FORGED BODY 0.44 (11.2) 2.17 (55) 2.17 (55) 0.44 (11.2) A A B A A Connections: MV, FV Connections: MV B A A A A Connections: TW Connections: TW 1.0 (25.4)
Weight (g) D-Z73 D-Z76 D-Z80 Auto switch model 0.5 m (Nil) 3 m (L) 5 m (Z) 7 31 50 10 55 7 31 Lead wire length D-Z73, Z80 D-Z76 Dimensions (mm) M2.5 x 4L Slotted set screw M2.5 x 4L 27.6 1.5 Slotted set screw 30.5 2.3 2.5 6.2 6.2 Indicator light D-Z80 without indicator light Indicator light DD5.7 5.5 2.7 Most sensitive position Most sensitive position 3.4 12.5 12.5 1641 Reed Auto Switch
Refer to front matters 54 and 55 for Safety Instructions and pages 3 to 11 for Actuator and Auto Switch Precautions. Material Tubing type Tube no. Bore size O.D. Polyurethane 2.5 mm 4 mm TU0425 Metric size Soft nylon 2.5 mm 4 mm TS0425 Piping Caution (N) Theoretical Output Bore size (mm) Action Piston area (mm2) Operating pressure (MPa) Rod size (mm) 0.2 0.3 0.4 0.5 0.6 0.7 1.
Action Double acting Fluid Air Proof pressure 174 psi [1.2 MPa] Max. operating pressure 116 psi [0.8 MPa] 73 psi [0.5 MPa] Min. operating pressure 44 psi [0.3 MPa] Ambient and fluid temperatures 14 to 140F [10 to 60C] (No freezing) Cushion Clamping side: None Unclamping side: Rubber bumper Operating time Clamping: 1 sec. or more, Unclamping: 1 sec. or more Max. allowable clamping moment 1 55
11-/22-MXP10, 12, 16 Electrical entry from outside Electrical entry from inside Parallel electrical entry B A B B A A Solid state auto switch D-M9B, D-M9N Reed auto switch D-A93 (mm) (mm) Stroke (mm) 20 41 29 47 35 Stroke (mm) 20 45 25 51 31 Auto switch operating range Auto switch operating range 15 40.5 20.5 Model Model 25 50.5 30.5 30 59 39 10 35 15 25 46.5 34.5 30 55
Auto Switch Proper Mounting Position (mm) A B C D Auto switch model D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV D-A9 D-A9V D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV 36.5 41.5 56.5 67 67 83.5 92.5 D-A9 D-A9V D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV 17.5 17.5 17.5 18 18 19.5 18.5 D-A9 D-A9V D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV 24.5 29.5 44.5 55 55 71.5 80.5 D-A9 D-A9V K dimension (Switch rail height) Bore
H (Conduit terminal: T) I (DIN terminal: D) Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U Model VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 144.5 55 125.5 52 42 26 29 4.5 14 24.3 72.5 2.3 80.5 25 75 34 80 84.5 124 135.5 151.5 137 153 156 172 60.5 73 1 80 90 62 72 50 60 31 36 35 40 5.5 6.5 17.5 20 28.3 33.3 84 100 2.3 2.3 92 108 30 35 84 90 43 49 89 95 93.5 99.5 Port
110.5 60 79.5 102.5 50 60 VXS24 1/2 29.5 69.5 67 61.5 55 110.5 63.5 79.5 109 50 63.5 VXS25 3/4 32 78 69.5 70 57.5 113 72 82 120.5 52.5 72 VXS26 1 32 81 69.5 72.5 57.5 113 74.5 82 126.5 52.5 74.5 Model Port size P 224 Zero Differential Pressure Type Pilot Operated 2 Port Solenoid Valve VXS Series For Steam Replacement Parts DIN Connector Part No.
55 1000.3 Switch mounting bracket Note 2) 12 70 12 Fulcrum 13 40 15 10 F 2 x 4 x M10 x 1.5 depth 12 107 Note 3) 70 2 x 2 x 8H7 +0.015 0 ( ) depth 12 60 1 52 (58.7) (70) 95 700.05 85 75 330 270 0.3 193 (173) 133 25 100 100 (10) Rc1/ 4 Unclamp side port 306 (30.2) (30.2) 360 139 Limit switch Note 1) Rc1/ 4 Clamp side port +0.015 0 4 x 8H7( )through 820.05 143 115 50 4 x 14 through 320 (mm)
valve seal assembly (Maintenance parts) (Material: Stainless steel 304 plus sealant) S valve (Material: Stainless steel 304) i Valve side exhaust Refer to page 478 for the maintenance parts. 473 XLDQ Series Dimensions C D E E C G H I H V A C F U U M V E A V L Heater (Option) (Maintenance space) Indicator Auto switch (Option) B L K S H J M G A A (mm) Model A 189 198 B 66 79 C 2 2 D 11 11 E 55
VM2 SMC 74 45 40 54 Max. deflection position Unlock position Lock position 14 40.8 7 Stroke 3 Symbol (A) 4 (B) 2 32 26.5 20.5 11 53 (72) B 12 14 A 3 (EB) 1 (P) 5 (EA) 2 x M5 x 0.8 (Port 3, 5) 39.2 33.2 27.2 2 x Rc1/8 (Port 2, 4) Rc1/8 (Port 1) Travel required for operation 3 Full Operating Force (F .O.F .) 55 N (at 0.5 MPa) 3 x 6.5 mounting hole Travel required to release the lock 7 Force