Stations: 05, System, Port Combinations: Ejector System, Common PV: ø5/16", Inch Size, Exhaust: 2 [Vacuum Pump System, w/o Silencer; (Ejector System has Individual Exhaust Port)], Wiring: D-sub Connector, 25 Pins, Option: w/DIN Rail Mounting Bracket, Manifold Assembly, Delivery Condition: Delivered as Individual Parts, not Assembled

Stations: 05, System, Port Combinations: Vacuum Pump System, Common PV: ø8, Common PS: ø6, Metric Size, Exhaust: 2 [Vacuum Pump System, w/o Silencer; (Ejector System has Individual Exhaust Port)], Wiring: D-sub Connector, 25 Pins, Option: w/DIN Rail Mounting Bracket, Manifold Assembly, Delivery Condition: Delivered as Individual Parts, not Assembled

Stations: 05, System, Port Combinations: Ejector System, Common PV: ø8, Metric Size, Exhaust: 2 [Vacuum Pump System, w/o Silencer; (Ejector System has Individual Exhaust Port)], Wiring: D-sub Connector, 25 Pins, Option: -, Manifold Assembly, Delivery Condition: -

Stations: 05 (Stations), Wiring: L (Individual Wiring or None), Manifold Options: D [with Common Release Pressure Supply (PD) Port], Exhaust: Q (Vacuum Pump System), Pressure Switch for Vacuum/Pressure Sensor: E (Digital Pressure Switch for Vacuum, -100 to 100, NPN 2 Outputs, with Unit Selection Function), Leadwire: L (Standard Leadwires, X2), Unit Options: C [Vacuum Pump System PE Port Female

.: 03 (ø5/32"), Actuator Type: 05 (Straight Plunger), Suffix: None, Indicator: Z (w/Miniature Indicator)

Body Class: 2 (ø4 Orifice), Fitting Type: V, Tube Size: 05 (3/16"), Output Tube Size: None, Breathing Port Thread: Threaded, NPT1/8, Handle: 1 (90 Degree Turn Type)

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE

Model: LVH20 (Body Class 2, N.C.), Lever Operation: Non-locking, Self-reset, Tube Size: 05 (3/16")

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE

AMX-OM-L020_e

O . auto drai n: M i n. 0. 1 M Pa O PERATI O N M AN U AL M i n. 0. 05 M Pa Keep f ol l ow i ng t o operat e M ai n l i ne f i l t er properl y. M ax. 1. 0 M Pa Fol l ow i ng envi ronm ent s l ead t o cause breakage. Envi ronm ent Low er t han 5 D o not use under f ol l ow i ng envi ronm ent . D o not use under f ol l ow i ng condi t i ons.

Fluoropolymer Piping Equipment

Symbol 2 3 4 Metric sizes 04 06 08 10 12 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 Symbol B A Inch sizes Basic size With reducer 03 05 07 11 13 1/8" x 0.086" 3/16" x 1/8" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" Note 1) Applicable fittings: LQ2 Note 2) For details of the applicable tubing sizes, refer to page 945.

212

Applicable model LVR20 LVR40 LVR50 03 3 x 2 LVR20 LVR40 LVR50 03 1/8" x 0.086" 04 4 x 3 05 3/16" x 1/8" 06 6 x 4 07 1/4" x 5/32" 10 10 x 8 11 3/8" x 1/4" 12 12 x 10 13 1/2" x 3/8" 19 19 x 16 19 3/4" x 5/8" LQ3 Metric size Inch size Symbol Applicable tubing size Applicable model Symbol Applicable tubing O.D.

Ionizer

How to Order IZS31 CP X13 L (Tolerance 1%) Cable length 60 L: Cable length Symbol 7 01 02 04 05 06 07 08 09 11 12 13 14 15 16 17 18 19 20 1000 mm 2000 mm 4000 mm 5000 mm 6000 mm 7000 mm 8000 mm 9000 mm 11000 mm 12000 mm 13000 mm 14000 mm 15000 mm 16000 mm 17000 mm 18000 mm 19000 mm 20 mm (Red) 1 12 (6.2) 3 Cable Specifications No. of cable wire 12 0.14 mm2 (AWG26) 0.48 mm Nominal cross section

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

2.4 *1 Excluding the 20/20B(F)-L B A C B A C Pressure Pressure IO-Link: Process Data Relationship between the process data and pressure value ZSE20B-L (For vacuum pressure) ISE20B-L (For positive pressure) ZSE20BF-L (For compound pressure) Process data 5200 Process data Process data 5100 5200 5000 5000 5000 3000 1000 1000 Pressure [kPa] 1000 Pressure [kPa] Pressure [MPa] 600 580 900 10 1 .05

Air Cylinder

Bore size d H B C D NT-03 32 M10 x 1.25 6 17 19.6 16.5 NT-04 40/45 M14 x 1.5 8 22 25.4 21 NT-05 50/56/63/67 M18 x 1.5 11 27 31.2 26 NT-08 80/85 M22 x 1.5 13 32 37.0 31 NT-10 100 M26 x 1.5 16 41 47.3 39 5 JMB Series Auto Switch Mounting Auto Switch Proper Mounting Position (Detection at stroke end) and Mounting Height D-M9m/M9mV D-M9mW/M9mWV D-M9mA/M9mAV Hs A Ht B [mm] Auto

Series KV2 Fittings

Tube Size Packaging Table 01 03 05 07 09 11 13 15 19 1/8 5/32 3/16 1/4 5/16 3/8 1/2 5/8 3/4 Tube Size Type A (Monowall) Type B (Reinforced) TIV01 TIV03 TIV05 TIV07 TIV09 TIV11 TIV13 TIV15 TIV19 3/4 1/8 5/32 3/16 1/4 5/16 3/8 1/2 5/8 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 Length (Meters) S S S S S S S S

Directional Control Driver for Electric Cylinder

Adjusted thrust OFF: 100% thrust (Max. thrust) ON: A-PHASE (Retracted side) OFF: B-PHASE (Extended side) Output ON command input Red 2 ON Adjusted thrust command input Yellow SET 3 Traveling direction command input A-PHASE 4 Orange Cable for motor output terminal LC3F2 1 C3 02 1 CN3 Motor Output Terminal Table 2 1 Terminal Function Pin number Optional cable color Cable type Cable length 02 05