ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet Flat Type with Groove A 3 30.5 11 1.2 11 04 6 37 14 14.5 10 47 18 20.5 J K Width across flats E 3 30.5 11 1.8 11 6 37 14 14.5 10 47 18 20.5 06 08 N S U F GN GS HS 7 15 55 36.5 1.2 10 20 62.5 44 06 08 15 55 36.5 1.8 20 62.5 44 04 JB K ZP3 T UM B5 C2 3 31.5 12 11 J K 10 6 38 15 14.5 10 48 19 20.5 JB K 15 56 37.5 10 20 63.5 45 10

Thermo-chiller/Rack Mount Type

HRR050-W-20 30 Facility water flow rate [L/min] 25 20 15 10 5 0 0 10 20 30 40 50 Facility water inlet temperature [C] This is the facility water flow rate at the circulating fluid rated flow and the cooling capacity listed on pages 20 and 21. 24 HRR Series Dimensions Air-cooled Refrigeration HRR010-A-20-m (75 10) 440 (Includes protruding parts) Ventilation air inlet Ventilation air outlet

Basic Type/Direct Mount Type

Note 3) For replacement of the 10 wear ring A, contact SMC or your nearest sales representative. Seal kit includes a grease pack (6, 10: 5 and 10 g, 15 to 63: 10 g). Order with the following part number when only the grease pack is needed.

Solid State Auto Switches

(Red Green Red) D-M5NW D-M5PW D-M5BW Auto switch model Wiring type 3-wire 2-wire Output type PNP NPN Applicable load IC circuit, Relay, PLC 24 VDC Relay, PLC Power supply voltage 5, 12, 24 VDC (4.5 to 28 VDC) Current consumption 10 mA or less Load voltage 28 VDC or less 24 VDC (10 to 28 VDC) Load current 40 mA or less 1.5 V or less (0.8 V or less at 10 mA load current) 5 to 40 mA 80

One-touch Fittings Series KQ2

22.5 15.5 9.6 17.5 10 2.5 25.5 24.5 13.7 15.4 14.29 7 18 2.7 8 9 18 5 10 19 3.2 10 20 32 12 20 28 16 23 33 59 28 36 62 10-32UNF 12.7 2.3 9.3 15.6 1 16 22 11.11 5 32 23 16 1 8 1 4 10.4 10 18 3 26 25 14.29 KQ2L05-32 10-32UNF 20 22 2.3 11.11 11.4 10 19.5 3 16 1 8 1 4 22.5 26.5 15.1 23.5 27.5 29.5 24.5 28.5 30.5 26.5 29.5 31.5 35.5 31.5 33.5 37.5 24 26 16.5 3.5 14.29 10-32UNF 2.3 18.1 13.6

Title not found

9/16 21/32 21/32 11/32 11/32 9/32 9/32 10-FB3 10-FB2 10-FB4 10-FB1 10-FLB1 (Short) 10-FLB2 10-FLB2 (Short) 10-FLB1 21 Page 5 Distributed by Power Aire, Inc.

AS-FG/ASD-FG

Flow direction symbols on body Meter-out type Meter-in type Flow Rate and Effective Area Symbol JIS symbol ASD230FG ASD330FG ASD430FG ASD530FG ASD630FG 4, 6 Model 6 8 10, 12 10 12 8, 10 6 6, 8 Metric size 1/4" 5/16" 3/8" Tube O.D. 1/8" 5/32" 3/16" 1/4" 1/4" 5/16" 3/8" 3/8" Inch size l/min (ANR) Flow rate Controlled (Free) flow 295 350 75 175 500 600 700 1200 1300 4.5 5.3 2.7 1.1 7.6 9.1

Digital Flow Switch

L/min 0 to 1 L/min 0 to 3 L/min 0.5 to 0.5 L/min 5 to 500 L/min 5 to 500 L/min 10 to 1000 L/min 20 to 2000 L/min 2 to 200 L/min 1 to 1 L/min 10 to 1000 L/min 3 to 3 L/min 20 to 2000 L/min Power supply voltage 24 VDC 10% 12 to 24 VDC 10% 12 to 24 VDC 10% 24 VDC 10% 12 to 24 VDC 10% 12 to 24 VDC 10% Temperature characteristics 2% F.S. 2% F.S. (15 to 35C) 2% F.S. (15 to 35C) (25C standard)

Thermo-con/Rack Mount Type

capacity [W] Facility water temperature 35C Facility water temperature 20C 1500 1500 1000 1000 Facility water temperature 20C Facility water temperature 10C 500 500 Facility water flow rate: 10 L/min Facility water flow rate: 10 L/min 0 0 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] HECR012-W Circulating fluid: Tap water

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

14 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 20 12 12 10,11 10, 11, 12 08, 09 1000 10 15 8 500 06, 07 10 6 500 4 5 2 0 0 5 10 0 5 10 0 Number of needle rotations Number of needle rotations 15-9-53 12 Series ASD-FG Construction ASD230FG ASD330FG/430FG ASD530FG/630FG ASD530FG-02 @1 !

IIIIIIIIII

FLOW CAPACITY . 10-32 port 1/8" NPT port 2.0 CFM (56 LPM) with supply 10 PSI above set-point 2.3 CFM (65 LPM) with supply 10 PSI above set-point Operating characteristics are influenced by flow and outlet restriction Part Number Description S-5200-10S-5200-30S-5200-60S-5200-1000-10 PSI, 10-32 ports 0-30 PSI, 10-32 ports 0-60 PSI, 10-32 ports 0-100 PSI, 10-32 ports XX XX XX XX 0-10 PSI, 1/

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

12 10,11 10,11,12 08,09 1000 10 15 8 500 06,07 10 6 500 4 5 2 0 0 5 10 0 5 10 0 Number of needle rotations Number of needle rotations 15-9-101 11 Construction ASD230F ASD330F/430F ASD530F/630F ASD530F-02 !

Series AS-FM/AS-M/ASD-FM

0.8 Upstream pressure 0.5MPa 20 10 50 0.15 0.3 Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) 40 0.6 Effective area mm Effective area mm Effective area mm 0.1 0.2 30 0.4 10 5 20 0.1 0.05 0.2 10 0 0 0 0 0 Number of needle revolutions 5 10 Number of needle revolutions 5 10 10 20 0 Number of needle revolutions 2 Speed Controller for Low Speed Operation Series AS-FM Construction

EXxx-OMZ0016

EXW1 EXW1 Up to 100 m V.1.0/V.2.0 Available*1 EXW1 EXW1+EX600 *2 V.1.0 NA EXW1 EX600 Up to 10 m V.1.0 NA EX600 EXW1 Up to 10 m V.1.0 NA Available*3 EX600 EXW1+EX600 Up to 10 m V.1.0 NA Available*3 EX600 EX600 Up to 10 m V.1.0 NA Available *1: Available in protocol V.2.0. *2: Up to 100 m between an EXW1 series Base and Remote, and up to 10 m between an EXW1 series Base and an EX600-W series

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

15 0 5 10 15 20 25 0 5 10 15 20 Vertical L7 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 600 600 600 Z 400 400 400 200 200 200 Mep m 0 0 0 0 5 10 15 0 5 10 15 20 25 0 5 10 15 20 L8 Work load [kg] Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting orientation 1.

HRX-OM-Q026

Ambient temperature (C) Recommended circulating fluids 10 to 45 Tap water, ethylene glycol aqueous solution 15(wt)% -5 to 10 Ethylene glycol aqueous solution 15(wt)% -20 to -5 Ethylene glycol aqueous solution 40(wt)% Circulating fluid temperature(C) Recommended circulating fluids 10 to 35 Tap water, ethylene glycol aqueous solution 15(wt)% 5 to 10 Ethylene glycol aqueous solution 15(wt)%

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

Flow Direction Symbols on Body Meter-out type Meter-in type Symbol Indication symbol Flow Rate and Sonic Conductance Model ASD230FG ASD330FG ASD430FG ASD530FG ASD630FG Metric size 8, 10 6 8 10, 12 10 12 4, 6 6, 8 6 3/16" 1/4" 1/8" 5/32" 1/4" 5/16" 3/8" Tubing O.D. 3/16" 1/4" Inch size 1/4" 5/16" 3/8" 3/8" Flow rate (L/min (ANR)) 75 175 295 350 500 600 700 1200 1300 Controlled flow Free

VQ4000

SOL.B SOL.A 10 10 () (+) White Black SOL.A Double wiring (connected to SOL. A and SOL. B) is adopted for the internal wiring of each station, regardless of valve and option types. Mixed single and double wiring is available as an option. For details, refer to below.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

Flow Direction Symbols on Body Flow Rate and Sonic Conductance Meter-out type Meter-in type Symbol Indication symbol ASD230F ASD330F ASD430F ASD530F ASD630F Model 4, 6 6, 8 6 8, 10 6 8 10, 12 10 12 Metric size 1/8" 5/32" 3/16" 1/4" 1/4" 5/16" 3/8" Tubing O.D. 3/16" 1/4" 1/4" 5/16" 3/8" 3/8" Inch size 350 500 600 700 1200 1300 295 75 175 Flow rate (L/min (ANR)) Controlled flow Free flow

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

Standard M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 10-V14: 13(27) 10-V14A: 16(30) 10-V14: 12(26) 10-V14A: 15(29) Large flow capacity Standard 10-V124A Note 1) Large flow capacity Valve model 12 [32 Note 3)] Flow characteristics 23 [21 Note 3)] b b Cv Cv C[dm3/(sbar)] 0.054 0.099 0.037 0.076 C[dm3/(sbar)] 0.037 0.076 0.054 0.099 10-V114 10-V114A 10-V124 Note 1) 0.008 0.016 0.015 0.024 0.015 0.024