100

0 90 Vacuum pressure reached 80 kPa Vacuum pressure in tank [kPa] 80 Vacuum pressure [kPa] 66 kPa 70 60 53 kPa 50 40 kPa 40 26 kPa 30 20 13 kPa 10 0 Suction flow rate [L/min (ANR)] 10 0 20 30 40 50 60 70 80 90 100 1 10 Time to reach vacuum [s] 1 0 2 3 4 5 6 7 8 9 10 11 12 Vacuum Break Flow Rate Characteristics*1 (Representative value) *1 Silencer exhaust specification The graph shows the

Antistatic One-touch Fittings Series KA

(mm) Weight (g) M A L D Part No. 3.2 4 33.5 34.5 36.5 18.5 KAR23-04 18.5 17.5 18 15.5 9.6 3.4 2.9 2.3 2.1 5 KAR04-06 KAR04-08 5.6 5.6 6 8 10.4 4 16 12.8 10 KAR04-10 39.5 37 39.5 3.6 3 KAR06-08 8 18.5 6 10 KAR06-10 17 12.8 KAR06-12 42 5.2 12 20 3.5 13.1 13.1 8 KAR08-10 41 4.5 18.0 18.0 10 20 18.5 15.2 KAR08-12 42 5.1 12 10 KAR10-12 42 33 32.8 32.8 12 20 21 17 139

25

(mm) Installation distance Detection range 10 45 25 100 Detection range 50 180 423 RoHS Ionizer IZS40/41/42 Series How to Order Type 40 Standard type IZS 40 IZS 42 1600 1600 10 10 B B Type 40 Type 41/42 Made to Order Bar type Type 41 42 Feedback sensor type Dual AC type IZS41 IZS42 Sensor Symbol Sensor Built-in sensor Feedback sensor Auto balance sensor [High accuracy type] Nil F G Emitter

KA

(mm) Fitting size d Soft nylon Polyurethane D L A M Part No. 3.2 9.6 18.5 17.5 18 4 33.5 34.5 36.5 18.5 15.5 KAR23-04 3.4 2.9 2.0 1.8 5 KAR04-06 KAR04-08 5.6 5.6 6 8 10.4 4 16 12.8 39.5 37 39.5 10 KAR04-10 3.3 2.5 KAR06-08 8 18.5 6 17 12.8 KAR06-12 42 4.7 12 20 10 KAR06-10 13.1 13.1 3.0 8 KAR08-10 41 4.0 18.0 18.0 10 20 18.5 15.2 KAR08-12 42 4.6 12 10 KAR10-12 44.5 33 32.8 32.8 12 20 21 18.5

Series H, DL, L, LL Self-align Fittings

A L1 L2 M 1 8 4 LL04-01 45 10 21.8 50.9 15 3.5 52.7 10 14 10 1 4 1 8 LL04-02 LL06-01 53 47 14 10 54.9 51.9 54.7 54.8 1 4 3 8 1 8 6 LL06-02 LL06-03 LL08-01 44 66 63 14 17 12 16 9 55.9 57.9 52.9 21.8 56.8 58.5 57 12 10 14 1 4 3 8 1 4 8 LL08-02 LL08-03 LL10-02 68 77 89 16 19 14 17 14 23.3 56.9 58.9 58.9 59 60.7 62.7 14 12 17 3 8 1 2 1 4 3 8 1 2 Reference dimensions after R(PT) thread installation

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

19 R 3/8 40 35 AS331FG-03-10 AS331FG-N03-07 32.6 52.4 45 21 25.6 43.7 38.7 10 18.5 1/4" 13.2 63 56 17 23 20.6 16.2 12.9 NPT 3/8 AS331FG-03-12 AS331FG-N03-09 45.4 40.4 40.2 35.2 34.4 54.2 48 22 28.2 44.9 39.7 12 20.9 5/16" 15.2 65 59 18.5 23 19 AS431FG-04-10 AS331FG-N03-11 32.6 57.1 52.4 21 32.6 49.4 43.7 25.8 10 18.5 3/8" 17.9 23 104 16.2 65 21 16.2 28.6 49.2 56.7 24 49.6 R 1/2 42.1 AS431FG

Model Selection 1

) 0.6 0.7 Critical pressure 0.65 [658] (158) 0.5 0.6 0.55 Sonic [656] (151) 0.5 0.4 0.45 [654] (143) 0.4 0.3 0.35 0.3 [650] (133) 0.2 0.25 0.2 [646] (120) 0.15 0.1 0.1 0.05 2 2 2 2 3 2 3 2 3 2 03 04 VX211 VX22 VX23 VX2 4 VX2 50 VX2 60-02 VX2 602 10 15 5 3 5 10 15 20 25 30 4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate the saturated

AC Servo Motor Driver (Pulse input type/Positioning type)

PA06 1 100 35 100 (10) (7) (10) Electronic gear denominator *3.

3

L/min 24 VDC 10% 12 to 24 VDC 10% 12 to 24 VDC 10% 12 to 24 VDC 10% 24 VDC 10% Temperature characteristics (25C reference) 3% F .S. (15 to 35C) 5% F .S. (0 to 50C) 2% F .S.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Refer to page 11-11-36 for detailed solid state switches with pre-wire connectors. 11-5-5 5 Series MSUA Specifications Model 2 MSUA3 MSUA7 MSUA20 MSUA1 Single vane Vane type Single vane Single vane Single vane Rotating angle 1 90 10 180 10 90 10 180 10 90 10 180 10 90 10 180 10 Air (Non-lube) Fluid 1.05 1.5 Proof pressure (MPa) Ambient and fluid temperature 5 to 60C 0.15 to 1.0 Operating

MGQ

OUT 113 23 34 45 57 68 79 90 102 113 12 6 IN 85 17 26 34 43 51 60 68 77 85 OUT 201 40 60 80 101 121 141 161 181 201 Symbol Specifications 16 8 IN 151 30 45 60 76 91 106 121 136 151 -XA Change of rod end shape OUT 314 63 94 126 157 188 220 251 283 314 Heat resistant cylinder (150C) -XB6 20 10 Low speed cylinder (10 to 50 mm/s) -XB9 IN 236 47 71 94 118 142 165 189 212 236 Intermediate stroke

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Load weight Allowable moment MY2H/m3 MY2H/M3 MY2H/M1 MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 20 20 20 20 Load weight kg Moment Nm Moment Nm Moment Nm MY2H40 MY2H40 MY2H40 MY2H40 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 4 4 3 3 3 3 MY2H16 2 2 2 2 0.2 MY2H16 MY2H16 MY2H16 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300 400500 1000 1500 100

80

Give adequate confirmation, and then determine a model, just because the compatibility list shows the general case. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump

10

Symbol O.D. thread size Stroke 0805 1006 1410 8 mm 5 mm 2 pcs. 1 pc. 10 mm 6 mm 3 pcs. 1 pc. 14 mm 10 mm 1 pc.

JXCx-OMT0005CN

No.1 (2)(5)(10)(13) DRIVE No.

IDX-OM-O004C

() S O 45 () 45 () O O CAUTION Check that air pressure is zero before servicing. 4 3 5. 5 5.1 3 ON OFF 60cm 1 10% () ( ) 60cm 1 10% 3 5 1 5. ( ) 60cm 1 2 IN OUT INOUT () 5 2 6. 6 6.1 IDF15E1-10 IDF15E1-20 550 MPa 0.151.0 () 240 (85%) 50Hz 2.8 (ANR) 1) 60Hz 3.1 m 3/min 50Hz 2.9 2) 60Hz 3.2 MPa 0.7 35 32 10 () AC100V(50Hz) AC100,110V(60Hz) 3) AC200V(50Hz

Magnetically Coupled Rodless Cylinder

14 62 29 14.5 M3 7 4.5 M4 x 0.7 34 26 3 6 20.5 8 4 51 17 70 29 14.5 M4 8 5.5 M5 x 0.8 39 31 3 7 21 9.5 4.5 62.5 22 76 34 17 M5 10 6.5 M6 x 1 50 41 3 7.5 25.5 9.5 7.5 74.5 28 90 39 19.5 M5 10 6.5 M6 x 1 60 45 3 7.5 Note 1) FE, FF and HB provide a clearance of 1mm between the body and the floating joint, but do not consider dead weight deflection of the cylinder tube, etc.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

14 62 29 14.5 M3 7 4.5 M4 x 0.7 34 26 3 6 20.5 8 4 51 17 70 29 14.5 M4 8 5.5 M5 x 0.8 39 31 3 7 21 9.5 4.5 62.5 22 76 34 17 M5 10 6.5 M6 x 1 50 41 3 7.5 25.5 9.5 7.5 74.5 28 90 39 19.5 M5 10 6.5 M6 x 1 60 45 3 7.5 Note 1) FE, FF and HB provide a clearance of 1mm between the body and the floating joint, but do not consider dead weight deflection of the cylinder tube, etc.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 Operation 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Caution

HRX-OM-T004

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge